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Three-axis accelerometers

  • US 7,578,189 B1
  • Filed: 05/10/2006
  • Issued: 08/25/2009
  • Est. Priority Date: 05/10/2006
  • Status: Active Grant
First Claim
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1. Apparatus, comprising:

  • a substrate;

    a proof mass comprising a portion of the substrate and that is separated from the substrate surrounding the proof mass by a gap; and

    a structural layer anchored to the proof mass and to the substrate that comprises a mechanical suspension and a plurality of sense and actuation electrodes separated from the proof mass by gaps.

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