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Anti-stiction gas-phase lubricant for micromechanical systems

  • US 7,580,174 B2
  • Filed: 12/22/2005
  • Issued: 08/25/2009
  • Est. Priority Date: 11/23/2005
  • Status: Active Grant
First Claim
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1. A micromechanical device assembly comprising:

  • a moveable component having a first contact surface;

    a second contact surface, wherein the first contact surface of the moveable component interacts with the second contact surface during device operation;

    an enclosure having one or more walls that form an operating region; and

    a gas-phase lubricant disposed in the operating region between the first contact surface and the second contact surface, wherein the gas-phase lubricant is adapted to adsorb on the surface of the first or second contact surface during device operation to reduce stiction-related forces between the first contact surface and the second contact surface,wherein the gas-phase lubricant adsorbed on the first or second contact surface during device operation has a surface energy that is lower than the surface energy of the first or second contact surface.

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