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Disc resonator gyroscopes

  • US 7,581,443 B2
  • Filed: 07/20/2006
  • Issued: 09/01/2009
  • Est. Priority Date: 07/20/2005
  • Status: Active Grant
First Claim
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1. A sensor, comprising:

  • a disc resonator having a central support and an ultra thin conductive layer deposited on etched side walls of the disc resonator;

    a baseplate wafer for supporting the disc resonator at the central support; and

    a cap wafer covering the disc resonator;

    wherein the baseplate wafer and the cap wafer comprise an enclosure of the disc resonator and the cap wafer comprises a single wafer having a cavity forming a wall surrounding the disc resonator and the wall is bonded directly to the baseplate wafer to enclose the disc resonator.

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