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Ceramic member and manufacturing method for the same

  • US 7,582,367 B2
  • Filed: 09/27/2005
  • Issued: 09/01/2009
  • Est. Priority Date: 09/30/2004
  • Status: Active Grant
First Claim
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1. A ceramic member comprising:

  • a base including an alumina sintered body, a yttria sintered body formed on the alumina sintered body and exposed to a corrosive gas, and an intermediate layer including yttrium and aluminum formed between the alumina sintered body and the yttria sintered body; and

    a metallic member buried in the intermediate layer of the base;

    wherein a difference between a thermal expansion coefficient of the alumina sintered body and a thermal expansion coefficient of the yttria sintered body is equal to or less than about 0.50×

    10

    6
    /K;

    wherein the thermal expansion coefficient of the alumnina sintered body is greater than the thermal expansion coefficient of the yttria sintered body;

    wherein the alumina sintered body, the intermediate layer, the yttria sintered body, and the metallic member are formed into an integrated sintered body; and

    wherein a content of yttria in the yttria sintered body is 99 wt % or more.

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