Ceramic member and manufacturing method for the same
First Claim
1. A ceramic member comprising:
- a base including an alumina sintered body, a yttria sintered body formed on the alumina sintered body and exposed to a corrosive gas, and an intermediate layer including yttrium and aluminum formed between the alumina sintered body and the yttria sintered body; and
a metallic member buried in the intermediate layer of the base;
wherein a difference between a thermal expansion coefficient of the alumina sintered body and a thermal expansion coefficient of the yttria sintered body is equal to or less than about 0.50×
10−
6/K;
wherein the thermal expansion coefficient of the alumnina sintered body is greater than the thermal expansion coefficient of the yttria sintered body;
wherein the alumina sintered body, the intermediate layer, the yttria sintered body, and the metallic member are formed into an integrated sintered body; and
wherein a content of yttria in the yttria sintered body is 99 wt % or more.
1 Assignment
0 Petitions
Accused Products
Abstract
A ceramic member is provided including a base including an alumina sintered body, an yttria sintered body formed on the alumina sintered body, an intermediate layer including yttrium and aluminum formed between the alumina sintered body and the yttria sintered body, and a metallic member buried in the intermediate layer of the base. A difference between the thermal expansion coefficient of the alumina sintered body and that of the yttria sintered body is equal to or less than about 0.50×10−6/K, and the thermal expansion coefficient of the alumina sintered body is greater than the thermal expansion coefficient of the yttria sintered body. The alumina sintered body, the intermediate layer, the yttria sintered body, and the metallic member are formed into an integrated sintered body, and the content of yttria in the yttria sintered body is 99 wt % or more.
-
Citations
16 Claims
-
1. A ceramic member comprising:
-
a base including an alumina sintered body, a yttria sintered body formed on the alumina sintered body and exposed to a corrosive gas, and an intermediate layer including yttrium and aluminum formed between the alumina sintered body and the yttria sintered body; and a metallic member buried in the intermediate layer of the base; wherein a difference between a thermal expansion coefficient of the alumina sintered body and a thermal expansion coefficient of the yttria sintered body is equal to or less than about 0.50×
10−
6/K;wherein the thermal expansion coefficient of the alumnina sintered body is greater than the thermal expansion coefficient of the yttria sintered body; wherein the alumina sintered body, the intermediate layer, the yttria sintered body, and the metallic member are formed into an integrated sintered body; and wherein a content of yttria in the yttria sintered body is 99 wt % or more. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A method of manufacturing a ceramic member, comprising the steps of:
-
forming an alumina sintered body; forming a yttria sintered body exposed to a corrosive gas, wherein a content of yttria in the yttria sintered body is 99 wt % or more; forming a metallic member; and integrating the alumina sintered body, the yttria sintered body and the metallic member; wherein an intermediate layer including yttrium and aluminum is formed between the alumina sintered body and the yttria sintered body; wherein the metallic member is buried in the intermediate layer; wherein a difference between a thermal expansion coefficient of the alumina sintered body and a thermal expansion coefficient of the yttria sintered body is equal to or less than about 0.50×
10−
6/K; andwherein the thermal expansion coefficient of the alumina sintered body is greater than the thermal expansion coefficient of the yttria sintered body. - View Dependent Claims (12, 13, 14, 15, 16)
-
Specification