Controlled fabrication of gaps in electrically conducting structures
First Claim
1. A method for controlling a gap between electrically conducting features on a membrane, comprising the steps of:
- providing a plurality of electrically conducting features disposed on a membrane including an aperture aligned with a gap between the features;
exposing the features to a fabrication process environment conditions of which are selected to alter an extent of the gap;
applying a voltage bias across the gap during process environment exposure of the features;
measuring electron tunneling current across the gap during process environment exposure of the features to indicate an extent of the gap; and
controlling the process environment during process environment exposure of the features, based on the tunneling current measurement, to control an extent of the gap.
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Accused Products
Abstract
A method for controlling a gap in an electrically conducting solid state structure provided with a gap. The structure is exposed to a fabrication process environment conditions of which are selected to alter an extent of the gap. During exposure of the structure to the process environment, a voltage bias is applied across the gap. Electron tunneling current across the gap is measured during the process environment exposure and the process environment is controlled during process environment exposure based on tunneling current measurement. A method for controlling the gap between electrically conducting electrodes provided on a support structure. Each electrode has an electrode tip separated from other electrode tips by a gap. The electrodes are exposed to a flux of ions causing transport of material of the electrodes to corresponding electrode tips, locally adding material of the electrodes to electrode tips in the gap.
90 Citations
23 Claims
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1. A method for controlling a gap between electrically conducting features on a membrane, comprising the steps of:
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providing a plurality of electrically conducting features disposed on a membrane including an aperture aligned with a gap between the features; exposing the features to a fabrication process environment conditions of which are selected to alter an extent of the gap; applying a voltage bias across the gap during process environment exposure of the features; measuring electron tunneling current across the gap during process environment exposure of the features to indicate an extent of the gap; and controlling the process environment during process environment exposure of the features, based on the tunneling current measurement, to control an extent of the gap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification