Magnetostrictive multi-layer sensor for detecting a deformation
First Claim
1. A sensor comprising:
- a substrate comprising a mechanically deformable region that is deformable in a direction non-parallel to a surface of the substrate;
a magnetostrictive multi-layer sensor element configured to detect a mechanical deformation of the mechanically deformable region in a direction that is non-parallel to the substrate surface, the multi-layer sensor element comprising a sensor layer comprising a material having a positive or a negative magnetostriction constant; and
a device, arranged on the substrate, configured to generate a controllable magnetic field by which a performance of the magnetostrictive multi-layer sensor element is influenced, wherein the magnetostrictive multi-layer sensor element comprises an electrical resistance that is a function of the controllable magnetic field and a deformation of the mechanically deformable region, the electrical resistance forming a part of a half- or full-bridge.
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Abstract
A sensor includes a substrate having a mechanically deformable region that is deformable in a direction non-parallel to a surface of the substrate, and a magnetostrictive multi-layer sensor element configured to detect a mechanical deformation of the mechanically deformable region in a direction that is non-parallel to the substrate surface. The multi-layer sensor element includes a sensor layer having a material having a positive or a negative magnetostriction constant. The sensor further includes a device, arranged on the substrate, that is configured to generate a controllable magnetic field by which a performance of the magnetostrictive multi-layer sensor element is influenced, wherein the magnetostrictive multi-layer sensor element exhibits an electrical resistance that is a function of the controllable magnetic field and a deformation of the mechanically deformable region.
16 Citations
23 Claims
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1. A sensor comprising:
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a substrate comprising a mechanically deformable region that is deformable in a direction non-parallel to a surface of the substrate; a magnetostrictive multi-layer sensor element configured to detect a mechanical deformation of the mechanically deformable region in a direction that is non-parallel to the substrate surface, the multi-layer sensor element comprising a sensor layer comprising a material having a positive or a negative magnetostriction constant; and a device, arranged on the substrate, configured to generate a controllable magnetic field by which a performance of the magnetostrictive multi-layer sensor element is influenced, wherein the magnetostrictive multi-layer sensor element comprises an electrical resistance that is a function of the controllable magnetic field and a deformation of the mechanically deformable region, the electrical resistance forming a part of a half- or full-bridge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification