Semiconductor device
First Claim
Patent Images
1. A semiconductor device comprising:
- an insulating substrate;
a variable capacitor including a pair of electrodes and a dielectric, which is formed over the insulating substrate; and
a display device over the insulating substrate,wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes, andwherein the semiconductor device includes a means for converting change of capacitance of the variable capacitor into an electrical signal.
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Abstract
A variable capacitor is formed from a pair of electrodes and a dielectric interposed between the electrodes over a substrate, and an external input is detected by changing capacitance of the variable capacitor by a physical or electrical force. Specifically, a variable capacitor and a sense amplifier are provided over the same substrate, and the sense amplifier reads the change of capacitance of the variable capacitor and transmits a signal in accordance with the input to a control circuit.
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Citations
64 Claims
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1. A semiconductor device comprising:
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an insulating substrate; a variable capacitor including a pair of electrodes and a dielectric, which is formed over the insulating substrate; and a display device over the insulating substrate, wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes, and wherein the semiconductor device includes a means for converting change of capacitance of the variable capacitor into an electrical signal. - View Dependent Claims (5, 9, 13, 17, 21, 25, 29, 33, 37, 41, 45, 49, 53, 57, 61)
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2. A semiconductor device comprising:
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an insulating substrate; a plurality of variable capacitors each including a pair of electrodes and a dielectric, which are formed over the insulating substrate; and a display device over the insulating substrate, wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes, and wherein the semiconductor device includes a means for converting change of capacitance of each variable capacitor into an electrical signal. - View Dependent Claims (6, 10, 14, 18, 22, 26, 30, 34, 38, 42, 46, 50, 54, 58, 62)
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3. A semiconductor device comprising:
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an insulating substrate; a variable capacitor including a pair of electrodes and a dielectric interposed therebetween, wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes; a read-out circuit that detects change of capacitance of the variable capacitor; and a display device, wherein the variable capacitor, the read-out circuit, and the display device are provided over the insulating substrate. - View Dependent Claims (7, 11, 15, 19, 23, 27, 31, 35, 39, 43, 47, 51, 55, 59, 63)
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4. A semiconductor device comprising:
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an insulating substrate; a plurality of variable capacitors each including a pair of electrodes and a dielectric interposed therebetween, wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes; a read-out circuit that detects change of capacitance of each variable capacitor; and a display device, wherein the variable capacitors, the read-out circuit, and the display device are provided over the insulating substrate. - View Dependent Claims (8, 12, 16, 20, 24, 28, 32, 36, 40, 44, 48, 52, 56, 60, 64)
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Specification