Sensor with microelectro-mechanical oscillators
First Claim
Patent Images
1. A sensor comprising:
- a shuttle mass;
first and second masses vibrationally coupled to the shuttle mass, the first mass having a first resonant frequency in the absence of a first analyte, and a second resonant frequency after the exposure to the first analyte;
the second mass having a third resonant frequency in the absence of a second analyte, and a fourth resonant frequency after the exposure to the second analyte;
a vibration sensor configured to detect a response of the shuttle mass; and
an actuator configured to simultaneously drive the shuttle mass at a plurality of frequencies between a first predetermined frequency and a second predetermined frequency.
5 Assignments
0 Petitions
Accused Products
Abstract
A sensor is provided which is configured to detect the presence of multiple analytes, for example chemical or biological compounds, through the measurement of induced resonance shifts in a coupled array of microelectromechanical or micromechanical resonators.
23 Citations
21 Claims
-
1. A sensor comprising:
-
a shuttle mass; first and second masses vibrationally coupled to the shuttle mass, the first mass having a first resonant frequency in the absence of a first analyte, and a second resonant frequency after the exposure to the first analyte;
the second mass having a third resonant frequency in the absence of a second analyte, and a fourth resonant frequency after the exposure to the second analyte;a vibration sensor configured to detect a response of the shuttle mass; and an actuator configured to simultaneously drive the shuttle mass at a plurality of frequencies between a first predetermined frequency and a second predetermined frequency. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A sensor comprising:
-
a shuttle mass; first and second beams vibrationally coupled to the shuttle mass, the first beam having a first resonant frequency in the absence of a first analyte, and a second resonant frequency after the exposure to the first analyte;
the second beam having a third resonant frequency in the absence of a second analyte, and a fourth resonant frequency after the exposure to the second analyte;a vibration sensor configured to detect vibration of the shuttle mass; an actuator configured to simultaneously drive the shuttle mass at a plurality of vibrational frequencies. - View Dependent Claims (8, 9, 10, 11)
-
-
12. A sensor comprising:
-
a support mass vibrationally coupled to a base; first and second beams vibrationally coupled to the support mass, the first beam having a first resonant frequency in the absence of a first analyte, and a second resonant frequency in the presense the first analyte;
the second beam having a third resonant frequency in the absence of a second analyte, and a fourth resonant frequency in the presence of the second analyte;a vibration sensor configured to detect vibration of the support mass; and an actuator configured to simultaneously drive the support mass at a plurality of frequencies. - View Dependent Claims (13, 14, 15, 16)
-
-
17. A sensor comprising:
-
a support mass vibrationally coupled to a base; first and second beams vibrationally coupled to the support mass, the first beam having a first resonant frequency in the absence of a first analyte, and a second resonant frequency in the presense the first analyte;
the second beam having a third resonant frequency in the absence of a second analyte, and a fourth resonant frequency in the presence of the second analyte;a vibration sensor configured to detect vibration of the support mass; and an actuator configured to drive the support mass, wherein the first beam comprises a first material configured to absorb the first analyte, and wherein the second beam comprises a second material configured to absorb the second analyte, and wherein the support mass is coupled to the base through the first and second beams. - View Dependent Claims (18, 19)
-
-
20. A sensor comprising:
-
a sensing element having at least two vibrating members, each with a respective first resonant frequency, wherein the vibrating members are configured to exhibit a change in vibration response the presence of a plurality of analytes; a drive element coupled to the sensing element, said drive element configured to apply force to the sensing element to simultaneously induce a vibration at a plurality of frequencies within the sensing element; and a sensor configured to measure changes of a resonant frequency of at least one of the vibrating members. - View Dependent Claims (21)
-
Specification