Combustion transducer apparatus employing pressure restriction means
First Claim
1. A pressure restrictor for use with a piezoresistive pressure sensing element, said element capable of providing an output upon application of a pressure to said element, said pressure restrictor, comprising:
- a restrictor member having a plurality of apertures symmetrically disposed about a central axis of said restrictor member directed from a first end to a second end;
a pressure restrictor housing for clamping said restrictor member to said pressure sensing element at said second end, and said first end of said restrictor located in said housing for enabling said first end to receive an applied pressure and to pass said applied pressure to said second end solely through said apertures, wherein said pressure sensing element comprising;
a first and a second deflecting diaphragms positioned on a common substrate, wherein the first diaphragm is positioned on said substrate to respond to an applied pressure transmitted from first end to said second end via at least one of said apertures and said second diaphragm is positioned in line with said central axis of said restrictor member and substantially isolated from said applied pressure, each diaphragm having located thereon piezoresistors arranged in a half bridge configuration, with each half bridge connected to form a full Wheatstone bridge to enable said pressure element to provide an output proportional to said applied pressure with all inertial stresses cancelled.
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Abstract
A pressure restrictor for use with a pressure sensing element comprising a cylindrical member of a given diameter and length having a plurality of apertures directed from a first end to a second end is disclosed. A pressure restrictor housing holds and positions the cylindrical member in close proximity to the pressure sensing element at the second end by clamping the pressure restrictor between the housing and element. The apertures provided in the pressure restrictor are the sole path for application of pressure to the sensing element. The sensing element is a double diaphragm silicon sensor where one diaphragm is exposed to pressure and the other diaphragm is not exposed to pressure. Each diaphragm has located thereon a half-bridge wherein both half bridges are connected to provide a full bridge. The full bridge provides an output strictly proportional to pressure.
25 Citations
9 Claims
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1. A pressure restrictor for use with a piezoresistive pressure sensing element, said element capable of providing an output upon application of a pressure to said element, said pressure restrictor, comprising:
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a restrictor member having a plurality of apertures symmetrically disposed about a central axis of said restrictor member directed from a first end to a second end; a pressure restrictor housing for clamping said restrictor member to said pressure sensing element at said second end, and said first end of said restrictor located in said housing for enabling said first end to receive an applied pressure and to pass said applied pressure to said second end solely through said apertures, wherein said pressure sensing element comprising; a first and a second deflecting diaphragms positioned on a common substrate, wherein the first diaphragm is positioned on said substrate to respond to an applied pressure transmitted from first end to said second end via at least one of said apertures and said second diaphragm is positioned in line with said central axis of said restrictor member and substantially isolated from said applied pressure, each diaphragm having located thereon piezoresistors arranged in a half bridge configuration, with each half bridge connected to form a full Wheatstone bridge to enable said pressure element to provide an output proportional to said applied pressure with all inertial stresses cancelled. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification
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Current AssigneeKulite Semiconductor Products Inc
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Original AssigneeKulite Semiconductor Products Inc
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InventorsGeras, Elias, Kurtz, Anthony D.
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Primary Examiner(s)Hook; James F
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Application NumberUS11/036,884Publication NumberTime in Patent Office1,698 DaysField of Search138/44, 138/42, 138/41, 737/15, 737/21, 338/42, 338/36US Class Current73/721CPC Class CodesG01L 19/0636 using particle filtersG01L 19/0681 Protection against excessiv...
