Micro-electro mechanical systems switch and method of fabricating the same
First Claim
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1. A MEMS (micro-electro mechanical systems) switch comprising;
- a substrate including a plurality of trenches, a ground line and a signal line having an opened portion;
a moving plate separated from the substrate at a predetermined space and including an electrode plate, a contact member for connecting the opened portion and a plurality of deep corrugates, wherein each deep corrugate is to be inserted into a respective trench of the plurality of trenches, each deep corrugate comprising a respective insulating layer and a respective electrode plate, and a groove is formed at each deep corrugate; and
a supporting member for supporting the moving plate.
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Abstract
A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an electrode plate and the opened portion and having a deep corrugate to insert the trench; and a supporting member for supporting the moving plate. Such a MEMS switch prevents the thermal expansion and the stiction problem.
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Citations
18 Claims
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1. A MEMS (micro-electro mechanical systems) switch comprising;
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a substrate including a plurality of trenches, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including an electrode plate, a contact member for connecting the opened portion and a plurality of deep corrugates, wherein each deep corrugate is to be inserted into a respective trench of the plurality of trenches, each deep corrugate comprising a respective insulating layer and a respective electrode plate, and a groove is formed at each deep corrugate; and a supporting member for supporting the moving plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of manufacturing a MEMS (micro-electro mechanical systems) switch comprising:
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forming a plurality of trenches, a ground line and a signal line having an opened portion on a substrate in a first direction; forming a supporting member in at least one of both ends of the substrate in a vertical direction from the first direction; forming a sacrificial layer having a predetermined thickness on the entire surface of the substrate after forming the supporting member; forming a moving plate having an electrode layer connected to the supporting member on the sacrificial layer and a contact member for connecting the opened portion, wherein forming the moving plate includes forming an insulating layer on the entire surface of the substrate; removing the sacrificial layer; and wherein after removing the sacrificial layer, the moving plate forms a respective deep corrugate above each of the plurality of trenches, each respective deep corrugate including the insulating layer and the electrode layer, and a groove is formed at each deep corrugate. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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Specification