Acoustic wave device

• US 7,586,240 B2
• Filed: 01/23/2008
• Issued: 09/08/2009
• Est. Priority Date: 01/23/2007
• Status: Active Grant

• Current Assignee: Taiyo Yuden Company Limited (Taiyo Yuden Co)
• Original Assignee: Fujitsu Limited, Fujitsu Media Devices Limited (Fujitsu Limited)
• Inventors: Tsuda, Keiji, Matsuda, Takashi, Inoue, Kazunori, Aikawa, Shunichi, Kimura, Jyouji
• Primary Examiner(s): BUDD, MARK OSBORNE
• Application Number:
  US12/018,460
• Publication Number:
  US 20080174207A1
• Time in Patent Office: 594 Days
• Field of Search: 310/344, 310/313.R
• US Class Current: 310/344
• CPC Class Codes: H01L 2224/11 Manufacturing methods
• CPC Class Codes: H03H 3/08 for the manufacture of resonators or networks using surface acoustic waves

Abstract

An acoustic wave device includes an acoustic wave element formed on a substrate, a first seal portion provided on the substrate so as to form a cavity above the acoustic wave element, and a second seal portion provided on the first seal portion, the first seal portion having a step so that the first seal portion has a width on a first side and another width on a second side arranged so that the first side is closer than the second side to the substrate, and the width on the first side is greater than the another width on the second side.

Claims

1. An acoustic wave device comprising:

an acoustic wave element formed on a substrate;

a first seal portion provided on the substrate so as to form a cavity above the acoustic wave element; and

a second seal portion provided on the first seal portion,

the first seal portion having a step so that the first seal portion has a width on a first side and another width on a second side arranged so that the first side is closer than the second side to the substrate, and the width on the first side is greater than the another width on the second side,

wherein the step has a rounded corner portion.

2. The acoustic wave device as claimed in claim 1, wherein the step has a stair shape.

3. The acoustic wave device as claimed in claim 1, wherein:

the first seal portion has a third seal portion provided on the substrate so as to surround a functional portion of the acoustic wave device, and a fourth seal portion provided on the third seal portion so as to form the cavity above the functional portion; and

the third seal portion is wider than the fourth seal portion.

7. The acoustic wave device as claimed in claim 3, wherein the third seal portion has a flat surface that contacts the fourth seal portion.

8. The acoustic wave device as claimed in claim 3, wherein the third seal portion has a rough surface that contacts the fourth seal portion.

9. The acoustic wave device as claimed in claim 1, wherein the first and second seal portions are formed by photosensitive resin.

4. An acoustic wave device comprising:

an acoustic wave element formed on a substrate;

a first seal portion provided on the substrate so as to form a cavity above the acoustic wave element; and

a second portion provided on the first seal portion,

the first seal portion having a step so that the first seal portion has a width on a first side and another width on a second side arranged so that the first side is closer than the second side to the substrate, and the width on the first side is greater than the another width on the second side,

wherein;

the first seal portion has a third seal portion provided on the substrate so as to surround a functional portion of the acoustic wave device, and a fourth seal portion provided on the third seal portion so as to form the cavity above the functional portion;

the third seal portion is wider than the fourth seal portion; and

a surface of the third seal portion on which the fourth seal portion and a side surface of the fourth seal portion form an acute angle.

5. An acoustic wave device comprising:

an acoustic wave element formed on a substrate;

a first seal portion provided on the substrate so as to form a cavity above the acoustic wave element; and

a second seal portion provided on the first seal portion,

the first seal portion having a step so that the first seal portion has a width on a first side and another width on a second side arranged so that the first side is closer than the second side to the substrate, and the width on the first side is greater than the another width on the second side,

wherein;

the first seal portion has a third seal portion provided on the substrate so as to surround a functional portion of the acoustic wave device, and a fourth seal portion provided on the third seal portion so as to form the cavity above the functional portion;

the third seal portion is wider than the fourth seal portion; and

a surface of the third seal portion on which the fourth seal portion and a side surface of the fourth seal portion form an obtuse angle.

6. An acoustic wave device comprising:

an acoustic wave element formed on a substrate;

a first seal portion provided on the substrate so as to form a cavity above the acoustic wave element; and

a second seal portion provided on the first seal portion,

the first seal portion having a step so that the first seal portion has a width on a first side and another width on a second side arranged so that the first side is closer than the second side to the substrate, and the width on the first side is greater than the another width on the second side,

wherein;

the first seal portion has a third seal portion provided on the substrate so as to surround a functional portion of the acoustic wave device, and a fourth seal portion provided on the third seal portion so as to form the cavity above the functional portion;

the third seal portion is wider than the fourth seal portion; and

a surface of the substrate on which the first seal portion is provided and a side surface of the third seal portion form an acute angle.