MEMS device fabricated on a pre-patterned substrate
First Claim
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1. A microelectromechanical systems (MEMS) device, comprising:
- a substrate including a top surface and a plurality of trenches formed in the top surface, the trenches being spaced from one another, wherein each of the trenches includes a sidewall having an upper end defining a boundary with the top surface of the substrate;
a first electrode layer formed over the top surface of the substrate, wherein the first electrode layer is discontinuous at the trenches to thereby separate the first electrode layer into a plurality of portions, wherein the plurality of portions extend to horizontal positions of the boundaries defined by the trenches when viewed from above the substrate; and
a second electrode formed over the first electrode, the second electrode being separated from the first electrode by a cavity.
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light.
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Citations
26 Claims
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1. A microelectromechanical systems (MEMS) device, comprising:
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a substrate including a top surface and a plurality of trenches formed in the top surface, the trenches being spaced from one another, wherein each of the trenches includes a sidewall having an upper end defining a boundary with the top surface of the substrate; a first electrode layer formed over the top surface of the substrate, wherein the first electrode layer is discontinuous at the trenches to thereby separate the first electrode layer into a plurality of portions, wherein the plurality of portions extend to horizontal positions of the boundaries defined by the trenches when viewed from above the substrate; and a second electrode formed over the first electrode, the second electrode being separated from the first electrode by a cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A microelectromechanical systems (MEMS) device, comprising
a substrate having a top surface and a plurality of grooves formed in the top surface; -
a plurality of first electrode strips formed over the top surface of the substrate and electrically separated from one another by the grooves; and a second electrode formed over the first electrode strips and separated from the first electrode strips by cavities, wherein the first electrode strips comprise a conductive material, and wherein the device further comprises the conductive material in the grooves, the conductive material in the grooves being electrically separated from the first electrode strips by being recessed. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification