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Wafer container with cushion sheets

  • US 7,588,150 B2
  • Filed: 07/24/2007
  • Issued: 09/15/2009
  • Est. Priority Date: 07/25/2006
  • Status: Expired due to Fees
First Claim
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1. A cushioned wafer container comprising:

  • a plurality of mutually superimposed wafer trays each for retaining a semiconductor wafer; and

    an elastic wafer-retaining cushion sheet attached to a top of each of said wafer trays to place said semiconductor wafer thereon;

    wherein said semiconductor wafer placed on a surface of said wafer-retaining cushion sheet is accommodated in an interior space formed between each of said wafer trays and another of said wafer trays that is adjacently superimposed thereover;

    said wafer container further comprising;

    a wafer suction-adhering surface formed on the surface of said wafer-retaining cushion sheet, said wafer suction-adhering surface adhering by suction to said semiconductor wafer;

    said wafer trays each being provided with a plurality of bottom openings opening to a reverse side of said wafer-retaining cushion sheet, an air chamber communicating with said bottom openings, and an air inlet for supplying pressurized air into said air chamber from an outside;

    wherein when pressurized air is supplied into said air chamber through said air inlet to increase air pressure in said air chamber, said wafer-retaining cushion sheet is elastically deformed into an upwardly inflated form at regions facing said bottom openings, thus causing separation between said semiconductor wafer and at least a part of the wafer suction-adhering surface of said wafer-retaining cushion sheet.

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