Method of fabricating vertical structure LEDs
First Claim
1. A method of producing semiconductor devices, comprising:
- growing a plurality of semiconductor layers on an insulating substrate;
forming first ohmic contacts on the plurality of semiconductor layers;
forming a metal support layer over the first ohmic contacts;
removing the insulating substrate;
forming second ohmic contacts adjacent to the plurality of semiconductor layers; and
separating out individual semiconductor devices,wherein the first ohmic contacts and the second ohmic contacts are respectively located at opposite sides of the plurality of semiconductor layers.
2 Assignments
0 Petitions
Accused Products
Abstract
A method of fabricating semiconductor devices, such as GaN LEDs, on insulating substrates, such as sapphire. Semiconductor layers are produced on the insulating substrate using normal semiconductor processing techniques. Trenches that define the boundaries of the individual devices are then formed through the semiconductor layers and into the insulating substrate, beneficially by using inductive coupled plasma reactive ion etching. The trenches are then filled with an easily removed layer. A metal support structure is then formed on the semiconductor layers (such as by plating or by deposition) and the insulating substrate is removed. Electrical contacts, a passivation layer, and metallic pads are then added to the individual devices, and the individual devices are then diced out.
96 Citations
41 Claims
-
1. A method of producing semiconductor devices, comprising:
-
growing a plurality of semiconductor layers on an insulating substrate; forming first ohmic contacts on the plurality of semiconductor layers; forming a metal support layer over the first ohmic contacts; removing the insulating substrate; forming second ohmic contacts adjacent to the plurality of semiconductor layers; and separating out individual semiconductor devices, wherein the first ohmic contacts and the second ohmic contacts are respectively located at opposite sides of the plurality of semiconductor layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. A method of fabricating light emitting diodes, comprising:
-
forming a GaN buffer layer over an insulating substrate; forming an active layer over the GaN buffer layer; forming a GaN contact layer over the active layer; forming a first ohmic contact over the GaN contact layer; forming a support structure over the first ohmic contact; removing the insulating substrate; forming a second ohmic contact over the GaN buffer layer; and separating out individual light emitting diodes, wherein the first ohmic contact and the second ohmic contact are respectively located at opposite sides of the active layer. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
-
-
38. A method of fabricating light emitting diodes, comprising:
-
forming a first GaN-based layer over an insulating substrate; forming an active layer over the first GaN-based layer; forming a second GaN-based layer over the active layer; forming a first ohmic contact over the second GaN-based layer; forming a support structure over the first ohmic contact; removing the insulating substrate; and forming a second ohmic contact over the first GaN-based layer, wherein the first ohmic contact and the second ohmic contact are respectively located at opposite sides of the active layer, wherein the first ohmic contact layer is located between the second GaN-based layer and the support structure. - View Dependent Claims (39, 40, 41)
-
Specification