Non-volatile memory devices including etching protection layers and methods of forming the same

• US 7,589,375 B2
• Filed: 12/20/2006
• Issued: 09/15/2009
• Est. Priority Date: 03/22/2005
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Jung, Soon-Moon, Kim, Jong-Hyuk, Park, Han-Byung, Jang, Jae-Hoon, Rah, Young-Seop
• Primary Examiner(s): Wilczewski; M.
• Assistant Examiner(s): Thomas; Toniae M
• Application Number:
  US11/642,297
• Publication Number:
  US 20070096197A1
• Time in Patent Office: 1,000 Days
• Field of Search: 257/74, 257315-316, 257/E21.614, 257/E25.018, 257/E27.026, 438/201, 438/211, 438/257, 438/455, 438/588
• US Class Current: 257/316
• CPC Class Codes: H01L 27/0688 Integrated circuits having a three-dimensional layout
• CPC Class Codes: H10B 10/00 Static random access memory [SRAM] devices
• CPC Class Codes: H10B 10/18 Peripheral circuit regions

Abstract

A non-volatile memory device includes a semiconductor substrate including a cell array region and a peripheral circuit region. A first cell unit is on the semiconductor substrate in the cell array region, and a cell insulating layer is on the first cell unit. A first active body layer is in the cell insulating layer and over the first cell unit, and a second cell unit is on the first active body layer. The device further includes a peripheral transistor on the semiconductor substrate in the peripheral circuit region. The peripheral transistor has a gate pattern and source/drain regions, and a metal silicide layer is on the gate pattern and/or on the source/drain regions of the peripheral transistor. A peripheral insulating layer is on the metal silicide layer and the peripheral transistor, and an etching protection layer is between the cell insulating layer and the peripheral insulating layer and between the metal silicide layer and the peripheral insulating layer.

Claims

1. A non-volatile memory device, comprising:

a semiconductor substrate including a cell array region and a peripheral circuit region;

a first cell unit on the semiconductor substrate in the cell array region;

a cell insulating layer on the first cell unit;

a first active body layer in the cell insulating layer and over the first cell unit;

a second cell unit on the first active body layer;

a peripheral transistor on the semiconductor substrate in the peripheral circuit region, the peripheral transistor having a gate pattern and source/drain regions;

a metal silicide layer on the gate pattern and/or on the source/drain regions of the peripheral transistor;

a peripheral insulating layer on the metal silicide layer and the peripheral transistor; and

an etching protection layer between the cell insulating layer and the peripheral insulating layer and between the metal silicide layer and the peripheral insulating layer.

2. The non-volatile memory device of claim 1, wherein each of the first and second cell units comprises a NAND-type string including a plurality of serially connected cell transistors.

3. The non-volatile memory device of claim 1, wherein each of the first and second cell units comprises a NOR-type memory cell.

4. The non-volatile memory device of claim 1, wherein the first active body layer has the same conductivity type as the semiconductor substrate in the cell array region.

5. The non-volatile memory device of claim 1, wherein the metal silicide layer comprises cobalt silicide (CoSi₂) and/or nickel silicide (NiSi₂).

6. The non-volatile memory device of claim 1, wherein the etching protection layer comprises a nitride layer.

7. The non-volatile memory device of claim 6, wherein the nitride layer comprises silicon nitride.

8. The non-volatile memory device of claim 1, further comprising:

a second active body layer in the cell insulating layer and arranged over the second cell unit; and

a third cell unit on the second active body layer and covered by the cell insulating layer.

9. The non-volatile memory device of claim 8, wherein each of the first to third cell units comprises a NAND-type string including a plurality of serially connected cell transistors.

10. The non-volatile memory device of claim 8, wherein each of the first to third cell units comprises a NOR-type memory cell.

11. A method of forming a non-volatile memory device, comprising:

providing a semiconductor substrate having a cell array region and a peripheral circuit region;

forming a first cell unit on the semiconductor substrate in the cell array region and a peripheral transistor on the semiconductor substrate in the peripheral region;

forming a first insulating layer on the first cell unit and the peripheral transistor;

forming a first active body layer on the first insulating layer in the cell array region;

forming a second cell unit on the first active body layer;

forming a second insulating layer on the second cell unit and the first insulating layer;

patterning the first and second insulating layers to expose the peripheral transistor;

forming a metal silicide layer on a gate pattern and/or on source/drain regions of the peripheral transistor; and

forming a peripheral insulating layer on the metal silicide layer and the peripheral transistor.

12. The method of claim 11, further comprising;

forming an etching stop layer on the first cell unit and on the peripheral transistor prior to forming the first insulating layer; and

removing the etching stop layer in the peripheral circuit region after patterning the first and second insulating layers.

13. The method of claim 11, wherein the etching stop layer comprises a nitride layer.

14. The method of claim 11, further comprising forming an etching protection layer on the metal silicide layer prior to forming the peripheral insulating layer.

15. The method of claim 11, wherein the etching protection layer comprises a nitride layer.

16. The method of claim 11, wherein the metal silicide layer comprises cobalt silicide (CoSi₂) and/or nickel silicide (NiSi₂).

17. The method of claim 11, wherein each of the first and second cell units comprises a NAND-type string including a plurality of serially connected cell transistors.

18. The method of claim 11, wherein each of the first and second cell units comprises a NOR-type memory cell.

19. The method of claim 11, further comprising:

forming a second active body layer on the second insulating layer in the cell array region before patterning the first and second insulating layers;

forming a third cell unit on the second active body layer; and

forming a third insulating layer on the third cell unit and the second insulating layer, wherein a portion of the third insulating layer in the peripheral circuit region is removed while the first and second insulating layers are patterned.

20. The method of claim 19 , wherein each of the first to third cell units comprises a NAND-type string including a plurality of serially connected cell transistors.

21. The method of claim 19, wherein each of the first to third cell units comprises a NOR-type memory cell.