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Method and apparatus for producing plasma

  • US 7,589,470 B2
  • Filed: 01/31/2006
  • Issued: 09/15/2009
  • Est. Priority Date: 01/31/2006
  • Status: Expired due to Fees
First Claim
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1. A plasma generator comprising:

  • a high frequency power source in communication with a waveguide;

    a plurality of couplers extending into said waveguide wherein said couplers include external portions comprising electrodes defining a plasma area therebetween, the electrodes being spaced apart by a distance selected to increase field strength in said plasma area.

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