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Wafer probe station having a skirting component

  • US 7,589,518 B2
  • Filed: 02/11/2005
  • Issued: 09/15/2009
  • Est. Priority Date: 06/11/1992
  • Status: Expired due to Fees
First Claim
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1. A probe station having a chuck for supporting a semiconductor under test comprising:

  • (a) a screw with a screw head and a shaft supported by said chuck;

    (b) a conductive member laterally surrounding and spaced apart from said chuck, wherein said shaft supports said conductive member and said screw head is exterior to said conductive member;

    (c) a spacer surrounding said shaft and positioned between said conductive member and said chuck, wherein said spacer and said conductive member are at the same potential; and

    (d) a probe for testing a semiconductor resting on said chuck.

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