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Micromechanical motion sensor

  • US 7,591,179 B2
  • Filed: 03/24/2004
  • Issued: 09/22/2009
  • Est. Priority Date: 05/08/2003
  • Status: Active Grant
First Claim
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1. A micromechanical motion sensor, comprising:

  • an electrostatic oscillating drive;

    an oscillatably mounted bar spring element capable of being excited to a permanent periodic oscillation by the electrostatic oscillating drive to which a periodic drive voltage is applied;

    an electrostatic compensation drive arrangement acting upon the bar spring element,wherein;

    an appropriate periodic compensation voltage is applied to the electrostatic compensation drive arrangement to compensate for a non-linearity of a spring constant of the bar spring element; and

    an arrangement for detecting a deflection imparted to the bar spring element.

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