Micromechanical motion sensor
First Claim
1. A micromechanical motion sensor, comprising:
- an electrostatic oscillating drive;
an oscillatably mounted bar spring element capable of being excited to a permanent periodic oscillation by the electrostatic oscillating drive to which a periodic drive voltage is applied;
an electrostatic compensation drive arrangement acting upon the bar spring element,wherein;
an appropriate periodic compensation voltage is applied to the electrostatic compensation drive arrangement to compensate for a non-linearity of a spring constant of the bar spring element; and
an arrangement for detecting a deflection imparted to the bar spring element.
1 Assignment
0 Petitions
Accused Products
Abstract
A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.
8 Citations
20 Claims
-
1. A micromechanical motion sensor, comprising:
-
an electrostatic oscillating drive; an oscillatably mounted bar spring element capable of being excited to a permanent periodic oscillation by the electrostatic oscillating drive to which a periodic drive voltage is applied; an electrostatic compensation drive arrangement acting upon the bar spring element, wherein;
an appropriate periodic compensation voltage is applied to the electrostatic compensation drive arrangement to compensate for a non-linearity of a spring constant of the bar spring element; andan arrangement for detecting a deflection imparted to the bar spring element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
Specification