Method for atmospheric pressure reactive atom plasma processing for surface modification
First Claim
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1. A method for shaping an optic, comprising:
- placing an optic workpiece in a plasma processing chamber including an inductively-coupled plasma (ICP) torch having an outer tube to communicate a plasma gas to a distal end of the plasma torch, a coil surrounding the distal end of the outer tube, and an inner tube nested within the outer tube to communicate a reactive precursor to the distal end;
translating at least one of the optic workpiece and the plasma torch; and
communicating the plasma gas to the distal end;
generating a plasma discharge by applying current from a radio frequency (RF) power source to the coil to excite the plasma gas, wherein a plasma sheath is formed between the distal end and the plasma discharge; and
introducing the reactive precursor to the plasma discharge through the inner tube to generate a reactive species; and
shaping the surface of the optic workpiece using the reactive species within the plasma discharge;
controlling a distribution of reactive species within the plasma discharge; and
directing the plasma discharge to a target portion of the surface of the optic workpiece.
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Abstract
Reactive atom plasma processing can be used to shape, polish, planarize and clean the surfaces of difficult materials with minimal subsurface damage. The apparatus and methods use a plasma torch, such as a conventional ICP torch. The workpiece and plasma torch are moved with respect to each other, whether by translating and/or rotating the workpiece, the plasma, or both. The plasma discharge from the torch can be used to shape, planarize, polish, and/or clean the surface of the workpiece, as well as to thin the workpiece. The processing may cause minimal or no damage to the workpiece underneath the surface, and may involve removing material from the surface of the workpiece.
178 Citations
27 Claims
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1. A method for shaping an optic, comprising:
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placing an optic workpiece in a plasma processing chamber including an inductively-coupled plasma (ICP) torch having an outer tube to communicate a plasma gas to a distal end of the plasma torch, a coil surrounding the distal end of the outer tube, and an inner tube nested within the outer tube to communicate a reactive precursor to the distal end; translating at least one of the optic workpiece and the plasma torch; and communicating the plasma gas to the distal end; generating a plasma discharge by applying current from a radio frequency (RF) power source to the coil to excite the plasma gas, wherein a plasma sheath is formed between the distal end and the plasma discharge; and introducing the reactive precursor to the plasma discharge through the inner tube to generate a reactive species; and shaping the surface of the optic workpiece using the reactive species within the plasma discharge; controlling a distribution of reactive species within the plasma discharge; and directing the plasma discharge to a target portion of the surface of the optic workpiece. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification