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Flexible single-crystal film and method of manufacturing the same

  • US 7,592,239 B2
  • Filed: 04/28/2004
  • Issued: 09/22/2009
  • Est. Priority Date: 04/30/2003
  • Status: Expired due to Fees
First Claim
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1. A method for manufacturing a flexible film, the method comprising:

  • providing a SOI wafer comprising a base wafer, one or more insulator layers on the base wafer, and a single-crystal layer on the one or more insulator layers;

    holding the SOI wafer with a jig to expose a first surface of the base wafer of the SOI wafer; and

    removing the base wafer of the SOI wafer by etching the exposed first surface of the base wafer while holding the SOI wafer with the jig to form the flexible film,wherein the flexible film is provided with a flexibility capable of bending.

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