Flexible single-crystal film and method of manufacturing the same
First Claim
1. A method for manufacturing a flexible film, the method comprising:
- providing a SOI wafer comprising a base wafer, one or more insulator layers on the base wafer, and a single-crystal layer on the one or more insulator layers;
holding the SOI wafer with a jig to expose a first surface of the base wafer of the SOI wafer; and
removing the base wafer of the SOI wafer by etching the exposed first surface of the base wafer while holding the SOI wafer with the jig to form the flexible film,wherein the flexible film is provided with a flexibility capable of bending.
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Abstract
The present invention relates to a flexible single-crystal film and a method of manufacturing the same from a single-crystal wafer. That is, the present invention can manufacture a silicon-on-insulator (SOI) wafer comprising a base wafer, one or more buried insulator layers, and a single-crystal layer into a flexible single-crystal film with a desired thickness by employing various wafer thinning techniques. The method for manufacturing a flexible film comprises the steps of (i) providing a SOI wafer comprising a base wafer, one or more buried insulator layers on the base wafer, and a single-crystal layer on said one or more buried insulator layers, (ii) forming one or more protective insulator layers on said single-crystal layer, (iii) removing said base wafer, and (iv) removing one or more of the insulator layers.
35 Citations
14 Claims
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1. A method for manufacturing a flexible film, the method comprising:
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providing a SOI wafer comprising a base wafer, one or more insulator layers on the base wafer, and a single-crystal layer on the one or more insulator layers; holding the SOI wafer with a jig to expose a first surface of the base wafer of the SOI wafer; and removing the base wafer of the SOI wafer by etching the exposed first surface of the base wafer while holding the SOI wafer with the jig to form the flexible film, wherein the flexible film is provided with a flexibility capable of bending. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification