Highly sensitive AMR bridge for gear tooth sensor

• US 7,592,803 B1
• Filed: 06/23/2008
• Issued: 09/22/2009
• Est. Priority Date: 06/23/2008
• Status: Expired due to Fees

• Current Assignee: Headway Technologies Incorporated
• Original Assignee: MagiQ Technologies, Incorporated
• Inventors: Gorman, Grace, Guo, Yimin
• Primary Examiner(s): LEDYNH, BOT L
• Application Number:
  US12/214,865
• Time in Patent Office: 456 Days
• Field of Search: 324/174, 324/207.21, 324/207.25, 324/252, 324/249, 735/143.1, 735/143.9, 360313-316, 360324-327, 365 7- 8, 365/158
• US Class Current: 324/207.25
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00
• CPC Class Codes: G01R 33/096 anisotropic magnetoresistance sensors

Abstract

An AMR gear tooth rotation sensor and a method for utilizing it are disclosed. These facilitate easy manufacture of the device without sacrificing either high sensitivity or high signal output. This is achieved by forming individual sensing elements out of AMR stripes and then connecting four such sensing elements as a Wheatstone bridge. The latter is attached to a permanent magnet that provides a bias field whose value rises and falls as wheel teeth and valleys (respectively) move past the rotation sensor.

Claims

1. A method to determine rotational speed of a toothed wheel having ferromagnetic teeth and a rim with a center line, comprising:

forming, on a substrate, multiple stripes of anisotropic magneto-resistance (AMR) material, each AMR stripe having a width, a length, and an aspect ratio of at least 5;

positioning and aligning a number of said AMR stripes to lie side by side and tip to tip, separated one from another by a separation distance that is at least 5 times smaller than said AMR stripe width, thereby forming an AMR sensing element that has a long axis, parallel opposing long sides, and an outermost AMR stripe at each long side;

series connecting said AMR stripes thereby enabling said sensing element to function as a single resistor;

positioning and aligning an additional AMR stripe alongside each of said outermost AMR stripes, said additional stripes being electrically isolated from said AMR sensing element and separated therefrom by a distance of no more than 2 microns;

series connecting four of said AMR sensing elements in a closed loop as an AMR Wheatstone bridge having a first node at which two adjacent AMR sensing elements are connected and a second node at which two remaining AMR sensing elements are connected, thereby forming a magnetic sensor;

providing an assemblage of one or more permanent magnets and attaching said magnetic sensor thereto, thereby forming a rotation detector;

with said magnetic sensor closest to said rim, positioning said rotation detector to overlie said rim at a first distance therefrom and adjusting said magnetic sensor and said assemblage so that said magnetic sensor symmetrically overlies a center line of said rim and said assemblage is laterally displaced relative to said center line by a second distance whereby said assemblage provides a magnetic field whose y-component serves as a biasing field;

then applying a fixed voltage between said first and second nodes of said AMR Wheatstone bridge whereby first and second output voltages are generated at nodes adjacent to said first and second nodes; and

then determining a difference between said first and second output voltages and computing therefrom said rotational speed of said toothed wheel, including zero rotational speed.

2. The method of claim 1 wherein said AMR material is selected from the group consisting of permalloy, binary alloys of Ni, Fe, Co, and B, and ternary alloys of Ni, Fe, Co, and B.

3. The method of claim 1 wherein said stripe width is in a range of 10 to 30 microns.

4. The method of claim 1 wherein said stripe width is in a range of 5 to 500 microns.

5. The method of claim 1 wherein said stripe length is in a range of 50 to 250 microns.

6. The method of claim 1 wherein said stripe length is in a range of 25 to 500 microns.

7. The method of claim 1 wherein said number of AMR stripes in each AMR sensing element is in a range of 5 to 20.

8. The method of claim 1 wherein said number of AMR stripes in each AMR sensing element is in a range of 1 to 100.

9. The method of claim 1 wherein said first distance of said rotation detector from said rim is in a range of from 0.5 to 6 mm.

10. The method of claim 1 wherein said second distance that said assemblage is laterally displaced relative to said center line is in a range of from 0.5 to 6 mm.

11. An apparatus to determine rotational speed of a toothed wheel having ferromagnetic teeth and a rim with a center line, comprising:

on a substrate, multiple stripes of anisotropic magneto-resistance (AMR) material, each AMR stripe having a width, a length, and an aspect ratio of at least 5;

said AMR stripes lying side by side and tip to tip, separated one from another by a separation distance that is at least 5 times smaller than said AMR stripe width, thereby defining an AMR sensing element that has a long axis, parallel opposing long sides, and an outermost AMR stripe at each long side;

said AMR stripes being serially connected as a single resistor;

an additional AMR stripe alongside each of said outermost AMR stripes, said additional stripes being electrically isolated from said AMR sensing element and separated therefrom by a distance of no more than 2 microns;

four of said AMR sensing elements being serially connected in a closed loop as an AMR Wheatstone bridge having a first node at which two adjacent AMR sensing elements are connected and a second node at which two remaining AMR sensing elements are connected, thereby forming a magnetic sensor;

a rotation detector comprising an assemblage of one or more permanent magnets attached to said magnetic sensor; and

said rotation detector being oriented so that said magnetic sensor overlies said rim at a first distance therefrom and is closer to said rim than said assemblage; and

wherein said magnetic sensor symmetrically overlies a center line of said rim and said assemblage is laterally displaced relative to said center line by a second distance, whereby said assemblage provides a magnetic field whose y-component serves as a biasing field.

12. The apparatus described in claim 11 wherein said AMR material is selected from the group consisting of permalloy, binary alloys of Ni, Fe, Co, and B, and ternary alloys of Ni, Fe, Co, and B.

13. The apparatus described in claim 11 wherein said stripe width is in a range of 10 to 30 microns.

14. The apparatus described in claim 11 wherein said stripe width is in a range of 5 to 500 microns.

15. The apparatus described in claim 11 wherein said stripe length is in a range of 50 to 250 microns.

16. The apparatus described in claim 11 wherein said stripe length is in a range of 25 to 500 microns.

17. The apparatus described in claim 11 wherein said number of AMR stripes in each AMR sensing element is in a range of 5 to 20.

18. The apparatus described in claim 11 wherein said number of AMR stripes in each AMR sensing element is in a range of 1 to 100.

19. The apparatus described in claim 11 wherein said first distance of said rotation detector from said rim is in a range of from 0.5 to 6 mm.

20. The apparatus described in claim 11 wherein said second distance that said assemblage is laterally displaced relative to said center line is in a range of from 0.5 to 6 mm.