Expanding thermal plasma deposition system
First Claim
1. A process for coating a substrate comprising:
- generating a plasma from two or more ETP sources, each ETP source including an anode having an orifice and defining a central axis; and
moving a substrate past each ETP source in a direction transverse to the central axis;
injecting vaporized reagents into the plasma to form the coating on the substrate, the injection of the reagents being injected apart from the ETP source and at a specified distance from the central axis in the region between the anode and the substrate, the specified distance being selected to obtain one or more uniform coating properties over the substrate.
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Accused Products
Abstract
A system to coat a substrate includes a deposition chamber maintained at sub-atmospheric pressure, one or more arrays containing two or more expanding thermal plasma sources associated with the deposition chamber, and at least one injector containing orifices for each array. The substrate is positioned in the deposition chamber and each expanding thermal plasma source produces a plasma jet with a central axis, while the injector injects vaporized reagents into the plasma to form a coating that is deposited on the substrate. The injector orifices are located within a specified distance from the expanding thermal plasma source to obtain generally a coating with generally uniform coating properties.
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Citations
23 Claims
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1. A process for coating a substrate comprising:
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generating a plasma from two or more ETP sources, each ETP source including an anode having an orifice and defining a central axis; and moving a substrate past each ETP source in a direction transverse to the central axis; injecting vaporized reagents into the plasma to form the coating on the substrate, the injection of the reagents being injected apart from the ETP source and at a specified distance from the central axis in the region between the anode and the substrate, the specified distance being selected to obtain one or more uniform coating properties over the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification