Method and apparatus for specifying working position on a sample and method of working the sample
First Claim
1. A method of specifying an observing or working position, comprising the steps of:
- providing as a sample a semiconductor device having first wirings on a surface of the semiconductor device and second wirings in a layer of the semiconductor device under the surface thereof;
taking-in and storing digitized data of the first and second wirings of the sample in a 1st storage means;
displaying on a 1st display area an image of the stored digitized data containing a desired observing or working position of the first and second wirings of the sample;
indicating on the 1st display area a 1st position on the first wirings using a pointing device and storing the 1st position in a 2nd storage means;
moving the sample to an observing or working position for observing a desired observing or working position of the sample;
obtaining an image of the surface of the sample in the observing or working position and storing the image in a 3rd storage means;
displaying on a 2nd display area the image stored in the 3rd storage means;
indicating on the 2nd display area a position corresponding to the 1st position stored in the 2nd storage means and storing the position corresponding to the 1st position in a 4th storage means;
calculating a conversion function for converting a coordinate system of the 1st display area and of the 2nd display area using the position stored in the 2nd storage means and the position stored in the 4th storage means;
indicating on the 1st display area the desired observing or working position of the second wirings; and
specifying a position corresponding to the desired observing or working position of the second wirings on the 2nd display area in accordance with the calculated conversion function.
2 Assignments
0 Petitions
Accused Products
Abstract
Techniques for specifying an observing or working position of a sample are provided. Digitized data of a sample is obtained and stored in a 1st storage device. A 1st display area displays an image of a portion containing a desired observing or working position of the digitized data stored in the 1st storage device. A 1st position that is indicated by a pointing device on the 1st display area is stored in a 2nd storage device. The sample is moved to an observing or working position for observation, and an observation image of the sample is stored in the 3rd storage device. A 2nd display area displays the observation image of the sample stored in the 3rd storage device. A position indicated on the 2nd display area and corresponding to the 1st position stored in the 2nd storage device is stored in a 4th storage device. A conversion function for converting a coordinate system of the 1st display area and the 2nd display area is calculated using the 1st position stored in the 2nd storage means and the position stored in the 4th storage device. A position indicated in one of the 1st and 2nd display areas and corresponding to another position indicated in the other of the 1st and 2nd display areas is calculated in accordance with the calculated conversion function.
34 Citations
20 Claims
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1. A method of specifying an observing or working position, comprising the steps of:
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providing as a sample a semiconductor device having first wirings on a surface of the semiconductor device and second wirings in a layer of the semiconductor device under the surface thereof; taking-in and storing digitized data of the first and second wirings of the sample in a 1st storage means; displaying on a 1st display area an image of the stored digitized data containing a desired observing or working position of the first and second wirings of the sample; indicating on the 1st display area a 1st position on the first wirings using a pointing device and storing the 1st position in a 2nd storage means; moving the sample to an observing or working position for observing a desired observing or working position of the sample; obtaining an image of the surface of the sample in the observing or working position and storing the image in a 3rd storage means; displaying on a 2nd display area the image stored in the 3rd storage means; indicating on the 2nd display area a position corresponding to the 1st position stored in the 2nd storage means and storing the position corresponding to the 1st position in a 4th storage means; calculating a conversion function for converting a coordinate system of the 1st display area and of the 2nd display area using the position stored in the 2nd storage means and the position stored in the 4th storage means; indicating on the 1st display area the desired observing or working position of the second wirings; and specifying a position corresponding to the desired observing or working position of the second wirings on the 2nd display area in accordance with the calculated conversion function. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 17)
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13. An apparatus for specifying an observing or working position comprising:
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1st storage means for taking-in and storing digitized data of first wirings on a surface of a sample as a semiconductor device and second wirings in a layer of the semiconductor device under the surface thereof; a 1st display area for displaying an image of the digitized data stored in the 1st storage means containing a desired observing or working position of the first and second wirings; 2nd storage means for storing a 1st position indicated by a pointing device on the first wirings displayed on 1st display area; control means for moving the sample to the observing or working position so as to be capable of observing the desired observing or working position; 3rd storage means for storing an observation image of the surface of the sample in the observing or working position; a 2nd display area for displaying the stored observation image of the sample; 4th storage means for storing a position indicated on the 2nd display area corresponding to the 1st position stored in the 2nd storage means; 1st calculation means for calculating a conversion function for converting a coordinate system of the 1st display area and the 2nd display area using the 1st position stored in the 2nd storage means and the position stored in the 4th storage means; and 2nd calculation means for calculating in accordance with the calculated conversion function the desired observing or working position indicated in the 2nd display area corresponding to the observing or working position of the second wirings indicated in the 1st display area. - View Dependent Claims (14, 16, 18, 19)
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15. A method of working a sample comprising the steps of:
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providing a sample having a surface covered with a transparent protection film; positioning a working frame to a desired position under the transparent protection film in an optical microscope image of the sample; irradiating the transparent protection film with a laser beam to form marks on a surface of the transparent protection film; storing the optical microscope image containing the working frame and the marks in a 1st storage means; displaying the stored optical microscope image on a 1st display area, indicating positions of the marks using a pointing device, and storing the positions in a 2nd storage means; scan-irradiating a charged particle beam on a sample region containing the working frame and the marks to thereby obtain a secondary electron image and storing it in a 3rd storage means; displaying the obtained secondary electron image on a 2nd display area; indicating the positions of the marks on the 2nd display area using a pointing device and storing the positions in a 4th storage means; calculating a conversion function for converting a coordinate system of the 1st display area and the 2nd display area using the positions stored in the 2nd storage means and the positions stored in the 4th storage means; displaying in accordance with the calculated conversion function the working frame corresponding to the images displayed on the 1st display area and on the 2nd display area; and scan-irradiating the charged particle beam within the working frame of the 2nd display area to etch the sample. - View Dependent Claims (20)
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Specification