Method and apparatus for calibrating and/or deskewing communications channels

• US 7,595,629 B2
• Filed: 09/13/2004
• Issued: 09/29/2009
• Est. Priority Date: 07/09/2004
• Status: Expired due to Fees

• Current Assignee: FormFactor Incorporated
• Original Assignee: FormFactor Incorporated
• Inventors: Miller, Charles A.
• Primary Examiner(s): Nguyen; Vinh P
• Application Number:
  US10/939,909
• Publication Number:
  US 20060010358A1
• Time in Patent Office: 1,842 Days
• Field of Search: None
• US Class Current: 324/750.02
• CPC Class Codes: G01R 31/3016 Delay or race condition test, e.g. race hazard test
• CPC Class Codes: G01R 31/31723 Hardware for routing the test signal within the device under test to the circuits to be tested, e.g. multiplexer for multiple core testing, accessing internal nodes routing the test signal to or from the device under test G01R31/31926
• CPC Class Codes: G01R 31/318511 Wafer Test
• CPC Class Codes: G01R 31/3191 Calibration
• CPC Class Codes: G01R 31/31937 Timing aspects, e.g. measuring propagation delay G01R31/3191 and G01R31/31922 take precedence; marginal testing G06F11/24
• CPC Class Codes: G01R 35/005 Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references G01R33/0035, G01R35/002 take precedence

Abstract

A series of pulses may be driven down each drive channel, which creates a series of composite pulses at the output of the buffer. Each composite pulse is a composition of the individual pulses driven down the drive channels. Timing offsets associated with the drive channels may be adjusted until the individual pulses of the composite pulse align or closely align. Those timing offsets calibrate and/or deskew the drive channels, compensating for differences in the propagation delays through the drive channels. The composite pulse may be feed back to the tester through compare channels, and offsets associated with compare signals for each compare channel may be aligned to the composite pulse, which calibrates and/or deskews the compare channels.

Claims

1. A probe card comprising:

a plurality of probes disposed to contact terminals of an electronic device to be tested;

means for electrically connecting ones of said probes to a source of test signals; and

circuitry configured to process a composite signal comprising a combination of calibration signals received at said probe card from said source of test signals and driven through ones of said probes into input terminals of a calibration substrate, said composite signal received at said probe card through a calibration probe disposed to contact an output terminal of said calibration substrate.

2. The probe card of claim 1, wherein said calibration probe comprises one of said plurality of probes disposed to contact terminals of an electronic device to be tested.

3. The probe card of claim 1, wherein said calibration probe comprises a spare probe that does not correspond to a contact terminal of said electronic device to be tested.

4. The probe card of claim 1, wherein said circuitry comprises a detector configured to detect a power level of said composite signal.

5. The probe card of claim 4, wherein said circuitry comprises a buffer configured to receive said composite signal and output said composite signal to said detector.

6. The probe card of claim 5, wherein said circuitry comprises a filter disposed between said buffer and said detector and configured to filter said composite signal output from said buffer and output said filtered composite signal to said detector.

7. The probe card of claim 1, wherein said circuitry comprises a detector configured to detect an edge of said composite signal.

8. The probe card of claim 7, wherein said circuitry comprises a buffer configured to receive said composite signal and output said composite signal to said detector.

9. The probe card of claim 8, wherein said circuitry comprises a filter disposed between said buffer and said detector and configured to filter said composite signal output from said buffer and output said filtered composite signal to said detector.

10. The probe card of claim 1, wherein said circuitry comprises a buffer configured to buffer said composite signal.

11. The probe card of claim 1, wherein said circuitry comprises a filter configured to filter said composite signal.

12. The probe card of claim 11, wherein said filter passes only selected harmonic content of said composite signal.

13. The probe card of claim 11, wherein said filter removes selected harmonic content of said composite signal.

14. The probe card of claim 1 further comprising a data storage device configured to store data representing deskewing offsets for said probe card, wherein said deskewing offsets correspond to an improved alignment of the test signals determined using the circuitry.

15. The probe card of claim 1 further comprising a data storage device in which are stored data representing deskewing offsets for said probe card, wherein said deskewing offsets correspond to an improved alignment of the test signals determined using the circuitry.

16. The probe card of claim 1, wherein:

said means for electrically connecting comprises a plurality of substrates, and

said circuitry is disposed on one of said substrates.

17. The probe card of claim 1, wherein said means for electrically connecting ones of said probes to a source of test signals comprises means for electrically connecting to a tester.

18. A probe card comprising:

a plurality of probes disposed to contact terminals of an electronic device to be tested;

an electrical connection configured to receive test signals from a tester;

means for electrically connecting ones of said probes to said test signals;

a data storage device configured to store data representing deskewing offsets for said probe card, wherein said deskewing offsets correspond to an improved alignment of the test signals through said probe card.

19. The probe card of claim 18, wherein data representing deskewing offsets for said probe card are stored in said data storage device.