Coated article with IR reflecting layer and method of making same
First Claim
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1. A heat treated coated article including a coating supported by a glass substrate, the coating comprising:
- a dielectric layer;
a layer comprising silicon nitride;
a layer comprising zinc oxide over and directly contacting the layer comprising silicon nitride;
a layer comprising an oxide of Ni and/or Cr over and directly contacting the layer comprising zinc oxide;
an infrared (IR) reflecting layer comprising silver on the glass substrate, located over and directly contacting the layer comprising an oxide of Ni and/or Cr;
another layer comprising an oxide of Ni and/or Cr located over and directly contacting the IR reflecting layer comprising silver;
a layer comprising a metal oxide located over and directly contacting the another layer comprising the oxide of Ni and/or Cr;
a layer comprising silicon nitride located over the layer comprising the metal oxide; and
wherein the layer comprising zinc oxide is formed using a ceramic target comprising zinc oxide so that the IR reflecting layer comprising silver has a specific resistivity (SR) of no greater than 4.2 microohms·
cm and the coating has a sheet resistance of no greater than 3.8 ohms/square.
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Abstract
A coated article is provided with at least one infrared (IR) reflecting layer (e.g,. silver based). In certain example embodiments, silicon nitride, zinc oxide, and an oxide of Ni and/or Cr are provided under the IR reflecting layer. It has been found that improved thermal stability may be realized upon heat treatment. In certain example instances, the silicon nitride may be replaced with tin oxide.
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Citations
22 Claims
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1. A heat treated coated article including a coating supported by a glass substrate, the coating comprising:
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a dielectric layer; a layer comprising silicon nitride; a layer comprising zinc oxide over and directly contacting the layer comprising silicon nitride; a layer comprising an oxide of Ni and/or Cr over and directly contacting the layer comprising zinc oxide; an infrared (IR) reflecting layer comprising silver on the glass substrate, located over and directly contacting the layer comprising an oxide of Ni and/or Cr; another layer comprising an oxide of Ni and/or Cr located over and directly contacting the IR reflecting layer comprising silver; a layer comprising a metal oxide located over and directly contacting the another layer comprising the oxide of Ni and/or Cr; a layer comprising silicon nitride located over the layer comprising the metal oxide; and wherein the layer comprising zinc oxide is formed using a ceramic target comprising zinc oxide so that the IR reflecting layer comprising silver has a specific resistivity (SR) of no greater than 4.2 microohms·
cm and the coating has a sheet resistance of no greater than 3.8 ohms/square. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 20)
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16. A coated article including a coating supported by a glass substrate, the coating comprising, from the glass substrate outwardly:
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a layer comprising silicon nitride or tin oxide; a layer comprising zinc oxide over and directly contacting the layer comprising silicon nitride or tin oxide; a layer comprising an oxide of Ni and/or Cr over and directly contacting the layer comprising zinc oxide; an infrared (IR) reflecting layer comprising silver over and directly contacting the layer comprising an oxide of Ni and/or Cr; a dielectric layer; and wherein the IR reflecting layer comprising silver has a specific resistivity (SR) of no greater than 4.5 microohms.cm and the coating has a sheet resistance of no greater than 3.8 ohms/square, and wherein the layer comprising zinc oxide is doped with F and/or B. - View Dependent Claims (17, 18, 19, 21, 22)
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Specification