Protected polyvinyl alcohol auxiliary for forming fine pattern and process for producing the same

• US 7,598,320 B2
• Filed: 03/18/2004
• Issued: 10/06/2009
• Est. Priority Date: 03/28/2003
• Status: Active Grant

• Current Assignee: Merck Patent GmbH (Merck & Co., Inc.)
• Original Assignee: AZ Electronic Materials USA Corp (AZ Electronic Materials SA)
• Inventors: Nishikawa, Masato, Takahashi, Kiyohisa
• Primary Examiner(s): EGWIM, KELECHI CHIDI
• Application Number:
  US10/550,110
• Publication Number:
  US 20060211814A1
• Time in Patent Office: 2,028 Days
• Field of Search: 525/56, 525/60, 525/61, 525/62
• US Class Current: 525/56
• CPC Class Codes: C08F 16/06 Polyvinyl alcohol ; Vinyl alcohol
• CPC Class Codes: C08F 2810/20 leading to a crosslinking, either explicitly or inherently
• CPC Class Codes: C08F 8/28 Condensation with aldehydes or ketones
• CPC Class Codes: C08F 8/30 Introducing nitrogen atoms or nitrogen-containing groups
• CPC Class Codes: C08F 8/44 Preparation of metal salts or ammonium salts
• CPC Class Codes: G03F 7/40 Treatment after imagewise removal, e.g. baking

Abstract

A modified polyvinyl alcohol (PVA) protected with a protecting group of the present invention is one wherein an amount of high-molecular weight body components of the modified polyvinyl alcohol having a weight-average molecular weight of 250,000 or more as determined by polyethylene glycol standards according to a gel permeation chromatography is 1000 ppm or less in the modified polyvinyl alcohol. The modified PVA is prepared by removing a metal ion and an acid from the modified PVA such as acetalized PVA with ion exchange treatment and then heat-treating at 80° C. or higher. An auxiliary for fine pattern formation of the present invention comprises the aforementioned modified PVA, a water-soluble crosslinking agent, and water or a mixed solvent of water and a water-soluble organic solvent. The auxiliary for fine pattern formation is applied over a resist pattern 3 and a coated layer 4 is formed thereon. Then the resist pattern 3 and the coated layer 4 are heated and thereby an acid is diffused from the resist pattern 3 to the coated layer 4. As a result, the coated layer in the vicinity of the resist pattern surface is crosslinked and cured by the diffused acid. The coated layer is developed to form a hole pattern having crosslinked and cured layer on the resist pattern, of which the hole size is less than a limit resolution of the wavelength of a light-exposure and which have no development defects.

Claims

1. An auxiliary for fine pattern formation comprising a modified polyvinyl alcohol protected with a protecting group, a water-soluble crosslinking agent, and water or a mixed solvent of water and a water-soluble organic solvent, wherein the amount of high-molecular weight body components of the modified polyvinyl alcohol protected with a protecting group, which has a weight-average molecular weight of 250,000 or more as determined by polyethylene glycol standards according to a gel permeation chromatography, is 1000 ppm or less in the modified polyvinyl alcohol.

2. The auxiliary for fine pattern formation according to claim 1, wherein the modified polyvinyl alcohol protected with a protecting group is one that was treated so as to remove acid components and metal ions therefrom.

3. The auxiliary of claim 1, where the protecting group is selected from a formyl group, an acetyl group, a malonyl group, a benzoyl group, a cynnamoyl group, a formal group, an acetyl group, a butyral group, a t-butoxycarbonyl group and an ethoxyethylene group.

4. The auxiliary of claim 1, where the water-soluble crosslinking agent is selected from melamine derivatives, guanamine derivatives, urea derivatives, glycol uril, and alkoxy alkylated amino resin.

5. The auxiliary of claim 1, where the water-soluble organic solvent is capable of being dissolved at 0.1% by weight or more in water.

6. The auxiliary of claim 1, where the water-soluble organic solvent is selected from alcohols, ketones, esters, ethylene glycol monoalkyl ethers, ethylene glycol monoalkyl ether acetates, propylene glycol monoalkyl ethers, propylene glycol monoalkyl ether acetates, lactic esters, aromatic hydrocarbons, amides, lactones and mixtures thereof.

7. The auxiliary of claim 1, where the modified polyvinyl alcohol protected with a protecting group is heat treated after removing acid components and metal ions from the solution.

8. The auxiliary of claim 1, where the modified polyvinyl alcohol protected with a protecting group is heat treated at a temperature of 80°

C. or more.

9. The auxiliary of claim 2, where the acid components and metal ions are removed using an ion exchange resin.