Wavelength-sensitive detector with elongate nanostructures

• US 7,598,482 B1
• Filed: 06/26/2006
• Issued: 10/06/2009
• Est. Priority Date: 07/29/2005
• Status: Expired due to Fees

• Current Assignee: IMEC International
• Original Assignee: IMEC International
• Inventors: Verhulst, Anne S., Vandervorst, Wilfried
• Primary Examiner(s): Luu; Thanh X
• Assistant Examiner(s): Legasse, Jr.; Francis M
• Application Number:
  US11/475,300
• Publication Number:
  US 20090266974A1
• Time in Patent Office: 1,198 Days
• Field of Search: 250/214.1, 250/214.R, 257/448, 977/742, 977/932, 977/933, 977/954
• US Class Current: 250/214.1
• CPC Class Codes: H01L 31/0352 characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
• CPC Class Codes: H01L 31/09 Devices sensitive to infrared, visible or ultraviolet radiation H01L31/101 takes precedence
• CPC Class Codes: Y10S 977/954 Of radiant energy

Abstract

A wavelength-sensitive detector is provided that is based on elongate nanostructures, e.g. nanowires. The elongate nanostructures are parallel with respect to a common substrate and they are grouped in at least first and second units of a plurality of parallel elongate nanostructures. The elongate nanostructures are positioned in between a first and second electrode, the first and second electrodes lying respectively in a first and second plane substantially perpendicular to the plane of substrate, whereby all elongate nanostructures in a same photoconductor unit are contacted by the same two electrodes. Circuitry is added to read out electrical signals from the photoconductor units. The electronic density of states of the elongate nanostructures in each unit is different, because the material, of which the elongate nanostructures are made, is different or because the diameter of the elongate nanostructures is different. Each unit of elongate nanostructures therefore gives a different response to incident photons such that wavelength-specific information can be derived with the device.

Claims

1. A wavelength-sensitive detector comprising a first photoconductor unit and a second photoconductor unit on a substrate;

wherein the first photoconductor unit has a first bandgap and the second photoconductor unit has a second bandgap different from the first bandgap;

wherein a plane of the first photoconductor unit and a plane of the second photoconductor unit are substantially parallel to each other and are substantially perpendicular to a plane of the substrate;

wherein each photoconductor unit comprises a first electrode having a first longitudinal direction and a first sidewall lying in a first plane parallel with the first longitudinal direction and a second electrode having a second longitudinal direction and a second sidewall lying in a second plane parallel with said second longitudinal direction;

wherein the first photoconductor unit comprises a plurality of first type elongated nanostructures positioned in between the first electrode and the second electrode of the first photoconductor unit, the elongated nanostructures each having a longitudinal axis, wherein the longitudinal axes of the first type elongated nanostructures are substantially parallel to each other and are substantially perpendicular to a plane of the first electrode and a plane of the second electrode of the first photoconductor unit; and

wherein the second photoconductor unit comprises a plurality of second type elongated nanostructures positioned in between the first electrode and the second electrode of the second photoconductor unit, the elongated nanostructures each having a longitudinal axis, wherein the longitudinal axes of the second type elongated nanostructures are substantially parallel to each other and are substantially perpendicular to a plane of the first electrode and a plane of the second electrode of the second photoconductor unit, wherein the first type elongated nanostructures are of a first material, and a first diameter and a first length, and wherein the second type elongated nanostructures are of a second material, and a second diameter and a second length, wherein at least one of the first material, the first diameter, and the first length is different from the second material, the second diameter, and the second length, wherein the first photoconductor unit is situated in between the substrate and the second photoconductor unit, and wherein the first type elongated nanostructures have a larger bandgap than the second type elongated nanostructures.

2. The wavelength-sensitive detector of claim 1, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise a semiconducting material.

3. The wavelength-sensitive detector of claim 1, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise single walled carbon nanotubes.

4. The wavelength-sensitive detector of claim 1, wherein the first type elongated nanostructures and the second type elongated nanostructures are different from each other in at least one of a material and a diameter.

5. The wavelength-sensitive detector of claim 1, wherein the elongated nanostructures in at least one of the first photoconductor unit and second photoconductor unit are partly n-type doped and partly p-type doped, such that the photoconductor unit comprises a pn diode.

6. The wavelength-sensitive detector of claim 1, wherein the elongated nanostructures within a photoconductor unit are stacked next to each other, on top of each other, or both next to each other and on top of each other.

7. The wavelength-sensitive detector of claim 1, wherein the first electrode and the second electrode each comprise a conductive material.

8. The wavelength-sensitive detector of claim 1, wherein the elongated nanostructures of a photoconductor unit have a diameter of from 0.3 nm to 300 nm.

9. The wavelength-sensitive detector of claim 1, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise at least one material selected from the group consisting of group IV materials, binary compounds of group IV materials, group III/V materials, binary compounds of group III/V materials, tertiary compounds of group III/V materials, quaternary compounds of group III/V materials, group II/VI materials, or binary compounds of II/VI materials, tertiary compounds of II/VI materials, and quaternary compounds of II/VI materials.

10. The wavelength-sensitive detector of claim 1, wherein the elongated nanostructures of a photoconductor unit have a doping profile.

11. The wavelength-sensitive detector of claim 1, wherein the elongated nanostructures of a photoconductor unit are embedded in a material which is transparent in a range of wavelengths to be detected.

12. The wavelength-sensitive detector of claim 1, wherein the detector is configured to determine a frequency of incident radiation.

13. The wavelength-sensitive detector of claim 1, wherein the detector is configured to determine a polarization of incident radiation.

14. The wavelength-sensitive detector of claim 1, wherein the detector is configured to convert an optical signal into an electrical signal and to determine a frequency of incident light at a same time.

15. The wavelength-sensitive detector of claim 1, wherein the detector is configured to represent one pixel of a color-sensitive camera.

16. The wavelength-sensitive detector of claim 1, wherein the plurality of first type elongated nanostructures consists essentially of elongated nanostructures each made from a same material and each having a substantially same diameter and a substantially same length, and wherein the plurality of second type elongated nanostructures consists essentially of elongated nanostructures each made from a same material and each having a substantially same diameter and a substantially same length.

17. The wavelength-sensitive detector of claim 1, wherein all elongated nanostructures of the first photoconductor unit are the same and wherein all elongated nanostructures of the second photoconductor unit are the same.

18. The wavelength-sensitive detector of claim 8, wherein the elongated nanostructures of a photoconductor unit have a diameter from 0.3 nm up to 100 nm.

19. A wavelength-sensitive detector comprising a first photoconductor unit and a second photoconductor unit on a substrate;

wherein the first photoconductor unit has a first bandgap and the second photoconductor unit has a second bandgap different from the first bandgap;

wherein a plane of the first photoconductor unit and a plane of the second photoconductor unit are substantially parallel to each other and are substantially perpendicular to a plane of the substrate;

wherein each photoconductor unit comprises a first electrode having a first longitudinal direction and a first sidewall lying in a first plane parallel with the first longitudinal direction and a second electrode having a second longitudinal direction and a second sidewall lying in a second plane parallel with said second longitudinal direction;

wherein the first photoconductor unit comprises a plurality of first type elongated nanostructures positioned in between the first electrode and the second electrode of the first photoconductor unit, the elongated nanostructures each having a longitudinal axis, wherein the longitudinal axes of the first type elongated nanostructures are substantially parallel to each other and are substantially perpendicular to a plane of the first electrode and a plane of the second electrode of the first photoconductor unit; and

wherein the second photoconductor unit comprises a plurality of second type elongated nanostructures positioned in between the first electrode and the second electrode of the second photoconductor unit, the elongated nanostructures each having a longitudinal axis, wherein the longitudinal axes of the second type elongated nanostructures are substantially parallel to each other and are substantially perpendicular to a plane of the first electrode and a plane of the second electrode of the second photoconductor unit, wherein the first type elongated nanostructures are of a first material, a first diameter and a first length, and wherein the second type elongated nanostructures are of a second material, a second diameter and a second length, wherein at least one of the first material, the first diameter, and the first length is different from the second material, the second diameter, and the second length, wherein the second photoconductor unit is situated on top of the first photoconductor unit, the second photoconductor unit comprising a plurality of second type elongated nanostructures oriented in a direction substantially perpendicular to a direction of the plurality of first type elongated nanostructures in the first photoconductor unit.

20. The wavelength-sensitive detector of claim 19, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise a semiconducting material.

21. The wavelength-sensitive detector of claim 19, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise single walled carbon nanotubes.

22. The wavelength-sensitive detector of claim 19, wherein the first type elongated nanostructures and the second type elongated nanostructures are different from each other in at least one of a material and a diameter.

23. The wavelength-sensitive detector of claim 19, wherein the elongated nanostructures in at least one of the first photoconductor unit and second photoconductor unit are partly n-type doped and partly p-type doped, such that the photoconductor unit comprises a pn diode.

24. The wavelength-sensitive detector of claim 19, wherein the elongated nanostructures within a photoconductor unit are stacked next to each other, on top of each other, or both next to each other and on top of each other.

25. The wavelength-sensitive detector of claim 19, wherein the first electrode and the second electrode each comprise a conductive material.

26. The wavelength-sensitive detector of claim 19, wherein the elongated nanostructures of a photoconductor unit have a diameter of from 0.3 nm to 300 nm.

27. The wavelength-sensitive detector of claim 19, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise at least one material selected from the group consisting of group IV materials, binary compounds of group IV materials group III/V materials, binary compounds of group III/V materials, tertiary compounds of group III/V materials, quaternary compounds of group III/V materials, group II/VI materials, or binary compounds of II/VI materials tertiary compounds of II/VI materials, and quaternary compounds of II/VI materials.

28. The wavelength-sensitive detector of claim 19, wherein the elongated nanostructures of a photoconductor unit have a coping profile.

29. The wavelength-sensitive detector of claim 19, wherein the elongated nanostructures of a photoconductor unit are embedded in a material which is transparent in a range of wavelengths to be detected.

30. The wavelength-sensitive detector of claim 19, wherein the detector is configured to determine a frequency of incident radiation.

31. The wavelength-sensitive detector of claim 19, wherein the detector is configured to determine a polarization of incident radiation.

32. The wavelength-sensitive detector of claim 19, wherein the detector is configured to convert an optical signal into an electrical signal and to determine a frequency of incident light at a same time.

33. The wavelength-sensitive detector of claim 19, wherein the detector is configured to represent one pixel of a color-sensitive camera.

34. The wavelength-sensitive detector of claim 19, wherein the plurality of first type elongated nanostructures consists essentially of elongated nanostructures each made from a same material and each having a substantially same diameter and a substantially same length, and wherein the plurality of second type elongated nanostructures consists essentially of elongated nanostructures each made from a same material and each having a substantially same diameter and a substantially same length.

35. The wavelength-sensitive detector of claim 19, wherein all elongated nanostructures of the first photoconductor unit are the same and wherein all elongated nanostructures of the second photoconductor unit are the same.

36. The wavelength-sensitive detector of claim 26, wherein the elongated nanostructures of a photoconductor unit have a diameter from 0.3 nm up to 100 nm.

37. A wavelength-sensitive detector comprising a first photoconductor unit and a second photoconductor unit on a substrate;

wherein the first photoconductor unit has a first bandgap and the second photoconductor unit has a second bandgap different from the first bandgap;

wherein a plane of the first photoconductor unit and a plane of the second photoconductor unit are substantially parallel to each other and are substantially perpendicular to a plane of the substrate;

wherein each photoconductor unit comprises a first electrode having a first longitudinal direction and a first sidewall lying in a first plane parallel with the first longitudinal direction and a second electrode having a second longitudinal direction and a second sidewall lying in a second plane parallel with said second longitudinal direction;

wherein the first photoconductor unit comprises a plurality of first type elongated nanostructures positioned in between the first electrode and the second electrode of the first photoconductor unit, the elongated nanostructures each having a longitudinal axis, wherein the longitudinal axes of the first type elongated nanostructures are substantially parallel to each other and are substantially perpendicular to a plane of the first electrode and a plane of the second electrode of the first photoconductor unit; and

wherein the second photoconductor unit comprises a plurality of second type elongated nanostructures positioned in between the first electrode and the second electrode of the second photoconductor unit, the elongated nanostructures each having a longitudinal axis, wherein the longitudinal axes of the second type elongated nanostructures are substantially parallel to each other and are substantially perpendicular to a plane of the first electrode and a plane of the second electrode of the second photoconductor unit, wherein the first type elongated nanostructures are of a first material, a first diameter and a first length, and wherein the second type elongated nanostructures are of a second material, a second diameter and a second length, wherein at least one of the first material, the first diameter, and the first length is different from the second material, the second diameter, and the second length, wherein the detector is configured to determine a polarization of incident radiation, and wherein the detector comprises at least a first photoconductor unit and a second photoconductor unit, the first photoconductor unit comprising first type elongated nanostructures oriented in a first direction and a second photoconductor unit comprising second type elongated nanostructures oriented in a second direction, wherein the first direction and the second direction are substantially perpendicular to each other.

38. The wavelength-sensitive detector of claim 37, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise a semiconducting material.

39. The wavelength-sensitive detector of claim 37, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise single walled carbon nanotubes.

40. The wavelength-sensitive detector of claim 37, wherein the first type elongated nanostructures and the second type elongated nanostructures are different from each other in at least one of a material and a diameter.

41. The wavelength-sensitive detector of claim 37, wherein the elongated nanostructures in at least one of the first photoconductor unit and second photoconductor unit are partly n-type doped and partly p-type doped, such that the photoconductor unit comprises a pn diode.

42. The wavelength-sensitive detector of claim 37, wherein the elongated nanostructures within a photoconductor unit are stacked next to each other, on top of each other, or both next to each other and on top of each other.

43. The wavelength-sensitive detector of claim 37, wherein the first electrode and the second electrode each comprise a conductive material.

44. The wavelength-sensitive detector of claim 37, wherein the elongated nanostructures of a photoconductor unit have a diameter of from 0.3 nm to 300 nm.

45. The wavelength-sensitive detector of claim 37, wherein the first type elongated nanostructures and the second type elongated nanostructures each comprise at least one material selected from the group consisting of group IV materials, binary compounds of group IV materials, group III/v materials, binary compounds of group III/V materials, tertiary compounds of group III/V materials, quaternary compounds of group III/V materials, group II/VI materials, or binary compounds of II/VI materials, tertiary compounds of II/VI materials, and quaternary compounds of II/VI materials.

46. The wavelength-sensitive detector of claim 37, wherein the elongated nanostructures of a photoconductor unit have a doping profile.

47. The wavelength-sensitive detector of claim 37, wherein the elongated nanostructures of a photoconductor unit are embedded in a material which is transparent in a range of wavelengths to be detected.

48. The wavelength-sensitive detector of claim 37, wherein the detector is configured to determine a frequency of incident radiation.

49. The wavelength-sensitive detector of claim 37, wherein the detector is configured to determine a polarization of incident radiation.

50. The wavelength-sensitive detector of claim 37, wherein the detector is configured to convert an optical signal into an electrical signal and to determine a frequency of incident light at a same time.

51. The wavelength-sensitive detector of claim 37, wherein the detector is configured to represent one pixel of a color-sensitive camera.

52. The wavelength-sensitive detector of claim 37, wherein the plurality of first type elongated nanostructures consists essentially of elongated nanostructures each made from a same material and each having a substantially same diameter and a substantially same length, and wherein the plurality of second type elongated nanostructures consists essentially of elongated nanostructures each made from a same material and each having a substantially same diameter and a substantially same length.

53. The wavelength-sensitive detector of claim 37, wherein all elongated nanostructures of the first photoconductor unit are the same and wherein all elongated nanostructures of the second photoconductor unit are the same.

54. The wavelength-sensitive detector of claim 44, wherein the elongated nanostructures of a photoconductor unit have a diameter from 0.3 nm up to 100 nm.