Charged particle beam scanning method and charged particle beam apparatus

• US 7,598,497 B2
• Filed: 08/22/2007
• Issued: 10/06/2009
• Est. Priority Date: 08/31/2006
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Company Limited (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Yamamoto, Kouichi, Kageyama, Kaneo
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US11/892,332
• Publication Number:
  US 20080054187A1
• Time in Patent Office: 776 Days
• Field of Search: 250/396.R, 250/310
• US Class Current: 250/396.00R
• CPC Class Codes: H01J 2237/1536 Image distortions due to scanning
• CPC Class Codes: H01J 2237/2809 characterised by the imaging problems involved
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01J 2237/2826 Calibration for object processing apparatus H01J2237/30433
• CPC Class Codes: H01J 37/222 Image processing arrangements associated with the tube image data processing or generation, in general G06T
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

A method and an apparatus for calculating a scan signal so that the scan region becomes a scan region which is based on magnification ratio between desired magnification in a scan-line interval direction and desired magnification in a scan-line direction, and performing a calculation for rotating the scan direction with respect to the scan signal in order to suppress a distortion which is caused to occur when the technology where the scan direction of a charged particle beam is rotated is applied to the technology where the charged particle beam is scanned such that the scan-line interval is enlarged.

Claims

1. A charged particle beam scanning method for scanning a charged particle beam such that scan-line interval is enlarged when a sample is scanned with said charged particle beam in a two-dimensional manner, and forming image of said sample whose magnification in a scan-line interval direction becomes lower than whose magnification in a scan-line direction,

said charged particle beam scanning method, comprising the steps of:

calculating value based on magnification ratio between desired magnification in said scan-line interval direction and desired magnification in said scan-line direction,

calculating a first calculated scan signal by multiplying a scan signal in said scan-line interval direction or in said scan-line direction by said value based on said magnification ratio between said magnification in said scan-line interval direction and said magnification in said scan-line direction,

carrying out a calculation for rotating scan direction with respect to said first calculated scan signal, and

calculating second calculated scan signals in said scan-line interval direction and in said scan-line direction so that magnification ratio with respect to a scan signal becomes said desired magnification ratio, said scan signal resulting from carrying out said calculation for rotating said scan direction.

2. The charged particle beam scanning method according to claim 1, wherein

said second calculated scan signals are calculated based on a coefficient based on said magnification in said scan-line interval direction, when said scan signal in said scan-line direction is multiplied by said value based on said magnification ratio between said magnification in said scan-line interval direction and said magnification in said scan-line direction,

said second calculated scan signals being calculated based on a coefficient based on said magnification in said scan-line direction, when said scan signal in said scan-line interval direction is multiplied by said value based on said magnification ratio between said magnification in said scan-line interval direction and said magnification in said scan-line direction.

3. The charged particle beam scanning method according to claim 2, wherein

said value based on said magnification ratio between said magnification in said scan-line interval direction and said magnification in said scan-line direction is equal to said magnification in said scan-line interval direction dividing said magnification in said scan-line direction, said scan signal in said scan-line direction being multiplied by said value,

said value based on said magnification ratio between said magnification in said scan-line interval direction and said magnification in said scan-line direction being equal to said magnification in said scan-line direction dividing said magnification in said scan-line interval direction, said scan signal in said scan-line interval direction being multiplied by said value.

4. A charged particle beam scanning method for scanning a charged particle beam so that magnification in a scan-line interval direction becomes lower than magnification in a scan-line direction by changing scan-line interval,

said charged particle beam scanning method, comprising the steps of:

calculating a scan signal in said scan-line direction or in said scan-line interval direction based on magnification ratio between desired magnification in said scan-line direction and desired magnification in said scan-line interval direction,

carrying out a calculation for rotating scan direction of said charged particle beam with respect to said scan signal, and

calculating scan signals in said scan-line direction and in said scan-line interval direction so that magnifications become said desired magnification in said scan-line direction and said desired magnification in said scan-line interval direction with respect to a scan signal, said scan signal resulting from carrying out said calculation for said rotation.

5. The charged particle beam scanning method according to claim 4, wherein

said scan signal calculated based on said magnification ratio between said magnification in said desired scan-line direction and said magnification in said scan-line interval direction is determined by multiplying said scan signal in said scan-line direction, or said scan signal in said scan-line interval direction by value based on said in said scan-line interval direction and said magnification in said scan-line direction, or said magnification in said scan-line direction and said magnification in said scan-line interval direction.

6. The charged particle beam scanning method according to claim 4, wherein

said calculation for rotating said scan direction of said charged particle beam is carried out with respect to said scan signal to which said calculation is applied, said calculation being based on said magnification ratio between said magnification in said scan-line direction and said magnification in said scan-line interval direction.

7. A charged particle beam apparatus, comprising:

a charged particle beam source,

a deflector for scanning a charged particle beam on a sample, said charged particle beam being emitted from said charged particle beam source, and

a control apparatus for controlling a signal supplied to said deflector, wherein

said control apparatus

calculates a scan signal so that scan region becomes a scan region which is based on magnification ratio between set magnification in a scan-line direction and set magnification in a scan-line interval direction,

carries out a calculation for rotating scan direction of said charged particle beam with respect to said scan signal, and

calculates scan signals corresponding to said set magnification in said scan-line direction and said set magnification in said scan-line interval direction with respect to a scan signal, said scan signal resulting from carrying out said calculation for said rotation.

8. The charged particle beam apparatus according to claim 7, further comprising:

a display apparatus capable of setting said magnification in said scan-line direction, said magnification in said scan-line interval direction, and rotation angle of said scan direction.

9. The charged particle beam apparatus according to claim 7, wherein

said magnification in said scan-line interval direction is lower than said magnification in said scan-line direction.

10. A calculation apparatus for calculating scan signals based on set magnifications and set rotation angle of scan direction, said scan signals being supplied to a charged particle beam apparatus, wherein

said calculation apparatus

multiplies said scan signal in a scan-line direction, or said scan signal in a scan-line interval direction by value based on magnification ratio between magnification Mx and magnification My, said magnification Mx being set in a scan-line direction of a charged particle beam, said magnification My being set in a scan-line interval direction of said charged particle beam and being set at a lower magnification than said magnification Mx, and

carries out a rotation calculation with respect to said scan signal multiplied by said value based on said magnification ratio between said magnifications Mx and My, said rotation calculation being based on said set rotation angle.

11. The calculation apparatus according to claim 10, wherein, in performing said multiplication,

said calculation apparatus calculates