MgO tunnel barriers and method of formation

• US 7,598,555 B1
• Filed: 10/25/2004
• Issued: 10/06/2009
• Est. Priority Date: 08/22/2003
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Papworth Parkin, Stuart Stephen
• Primary Examiner(s): FOURSON III, GEORGE R
• Application Number:
  US10/973,954
• Time in Patent Office: 1,807 Days
• Field of Search: 365/158, 438/3, 257/295, 257/E21.208
• US Class Current: 257/295
• CPC Class Codes: H10N 50/01 Manufacture or treatment
• CPC Class Codes: H10N 50/10 Magnetoresistive devices
• CPC Class Codes: H10N 50/85 Magnetic active materials

Abstract

MgO tunnel barriers are formed by depositing a thin layer of Mg on a suitable underlayer, and then directing oxygen and additional Mg towards the Mg layer. The oxygen reacts with the additional Mg and the Mg in the Mg layer to form a MgO tunnel barrier that enjoys excellent tunneling characteristics. The MgO tunnel barriers so formed may be used in magnetic tunnel junctions having tunneling magnetoresistance (TMR) values of greater than 100%. The highest TMR values are observed for junctions that have been annealed and that have a (100) crystallographic orientation.

Claims

1. A structure, comprising:

a first layer that includes magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials;

a MgO tunnel barrier; and

a second layer that includes magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials, wherein the first layer, the MgO tunnel barrier, and the second layer are in proximity with each other and form a magnetic tunnel junction, and wherein

i) the amount of any oxide between the MgO tunnel barrier and the first layer and any oxide between the MgO tunnel barrier and the second layer is sufficiently low, and

ii) the MgO tunnel barrier, the first layer, and the second layer are sufficiently free of defects,

that the tunnel magnetoresistance of the magnetic tunnel junction is greater than 100% at room temperature.

2. The structure of claim 1, wherein at least one of the first layer and the second layer includes a spacer layer that is in contact with the MgO tunnel barrier, wherein the spacer layer does not substantially interfere with the tunneling properties of the MgO tunnel barrier.

3. The structure of claim 1, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.

4. The structure of claim 1, wherein the MgO tunnel barrier has a thickness of between 4 and 15 angstroms.

5. The structure of claim 1, wherein at least one of the first layer and the second layer includes ferromagnetic material.

6. The structure of claim 1, wherein the tunnel magnetoresistance of the magnetic tunnel junction is greater than 140% at room temperature.

7. The structure of claim 1, wherein the tunnel magnetoresistance of the magnetic tunnel junction is greater than 160% at room temperature.

8. The structure of claim 1, wherein at least one of the first layer and the second layer includes antiferromagnetic material that is exchange biased with the magnetic material of said at least one layer, the antiferromagnetic material including at least one alloy selected from the group consisting of Ir—

Mn and Pt—

Mn, in which the alloy is substantially (100) oriented and is either fcc or slightly distorted fcc.

9. The structure of claim 1, wherein the second layer includes antiferromagnetic material and at least one material selected from the group consisting of Ta and TaN.

10. The structure of claim 1, wherein the MgO tunnel barrier is in direct contact with magnetic material of the first layer and is in direct contact with magnetic material of the second layer.

11. The structure of claim 1, wherein the first layer and the second layer each include magnetic material that is bcc and substantially (100) oriented.

12. The structure of claim 11, wherein the MgO tunnel barrier is (100) oriented.

13. The structure of claim 1, wherein at least one of the first layer and the second layer includes magnetic material that is bcc and substantially (100) oriented.

14. The structure of claim 13, wherein the MgO tunnel barrier is (100) oriented.

15. The structure of claim 1, wherein the MgO tunnel barrier includes polycrystalline grains.

16. The structure of claim 1, wherein each of the layers includes an alloy of Fe and Co, and the Fe content of the alloy is between 1 and 99 atomic %.

17. The structure of claim 1, wherein the tunnel junction has been annealed at a temperature greater than 200°

C. to increase the tunnel magnetoresistance of the tunnel junction.

18. The structure of claim 1, wherein the tunnel junction has been annealed at a temperature greater than 350°

C. to increase the tunnel magnetoresistance of the tunnel junction.

19. A structure, comprising:

a first ferromagnetic layer;

a second ferromagnetic layer; and

a MgO tunnel barrier between the first and second ferromagnetic layers,

wherein the first ferromagnetic layer, the MgO tunnel barrier, and the second ferromagnetic layer form a magnetic tunnel junction, and wherein the amount of any oxide between the MgO tunnel barrier and the first layer and any oxide between the MgO tunnel barrier and the second layer is sufficiently low that the magnetic tunnel junction has a tunnel magnetoresistance of greater than 100% at room temperature.

20. The structure of claim 19, wherein the tunnel magnetoresistance of the magnetic tunnel junction is greater than 120% at room temperature.

21. The structure of claim 20, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.

22. The structure of claim 20, wherein the MgO tunnel barrier is in direct contact with ferromagnetic material of the first layer and is in direct contact with ferromagnetic material of the second layer.

23. The structure of claim 20, wherein the first layer and the second layer each include ferromagnetic material that is bcc and substantially (100) oriented.

24. The structure of claim 20, wherein the MgO tunnel barrier is (100) oriented.

25. The structure of claim 20, wherein the MgO tunnel barrier includes polycrystalline grains.

26. The structure of claim 20, wherein each of the layers includes an alloy of Fe and Co, and the Fe content of the alloy is between 1 and 99 atomic %.

27. The structure of claim 20, wherein the tunnel junction has been annealed at a temperature greater than 200°

C. to increase the tunnel magnetoresistance of the tunnel junction.

28. The structure of claim 20, wherein the tunnel junction has been annealed at a temperature greater than 350°

C. to increase the tunnel magnetoresistance of the tunnel junction.

29. The structure of claim 20, wherein the tunnel magnetoresistance of the magnetic tunnel junction is greater than 140% at room temperature.

30. The structure of claim 20, wherein the tunnel magnetoresistance of the magnetic tunnel junction is greater than 160% at room temperature.

31. A structure, comprising:

a first layer that includes ferromagnetic material;

a MgO tunnel barrier; and

a second layer that includes ferromagnetic material,

wherein the first layer, the MgO tunnel barrier, and the second layer are in proximity with each other and form a magnetic tunnel junction that is sufficiently free of defects and deleterious oxide, that the magnetic tunnel junction has a tunnel magnetoresistance of greater than 100% at room temperature.

32. The structure of claim 31, wherein the magnetic tunnel junction is sufficiently free of defects and deleterious oxide, that the magnetic tunnel junction has a tunnel magnetoresistance of greater than 140% at room temperature.

33. The structure of claim 31, wherein the magnetic tunnel junction is sufficiently free of defects and deleterious oxide, that the magnetic tunnel junction has a tunnel magnetoresistance of greater than 160% at room temperature.

34. The structure of claim 33, wherein the MgO tunnel barrier is in direct contact with ferromagnetic material of the first layer and is in direct contact with ferromagnetic material of the second layer.

35. The structure of claim 33, wherein the first layer and the second layer each include ferromagnetic material that is bcc and substantially (100) oriented.

36. The structure of claim 33, wherein the MgO tunnel barrier is (100) oriented.

37. The structure of claim 33, wherein the MgO tunnel barrier includes polycrystalline grains.

38. The structure of claim 33, wherein each of the layers includes an alloy of Fe and Co, and the Fe content of the alloy is between 1 and 99 atomic %.

39. The structure of claim 33, wherein the tunnel junction has been annealed at a temperature greater than 200°

C. to increase the tunnel magnetoresistance of the tunnel junction.

40. The structure of claim 33, wherein the tunnel junction has been annealed at a temperature greater than 350°

C. to increase the tunnel magnetoresistance of the tunnel junction.

41. The structure of claim 31, wherein the magnetic tunnel junction is sufficiently free of defects and deleterious oxide, that the magnetic tunnel junction has a tunnel magnetoresistance of greater than 120% at room temperature.

42. The structure of claim 41, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.