System for controlling the sublimation of reactants
First Claim
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1. A substrate processing system for forming a vapor from a solid precursors by distributing heat to the precursor in a sealed container, the system comprising:
- a vessel configured to hold units of solid precursor, the vessel including a base, a top portion opposite the base, and a sidewall extending from the top portion toward the base, the vessel having no heater therein;
an inlet that introduces a carrier gas into the vessel;
an outlet that releases gas comprising the vapor from the solid precursor from the vessel; and
a plurality of thermally conductive protrusions extending from at least one of the vessel base and the vessel sidewall, the thermally conductive protrusions positioned and dimensioned to extend through the units of solid precursor and to conduct heat generated by a heater external to the vessel from at least one of the vessel base and the vessel sidewall to the units of solid precursor when the vessel is loaded with the units of solid precursor, wherein the thermally conductive protrusions each have a top surface that is space apart from the vessel top portion, and wherein the thermally conductive protrusions do not form part of an electrical or fluid circuit.
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Abstract
An apparatus and method improves heating of a solid precursor inside a sublimation vessel. In one embodiment, inert, thermally conductive elements are interspersed among units of solid precursor. For example the thermally conductive elements can comprise a powder, beads, rods, fibers, etc. In one arrangement, microwave energy can directly heat the thermally conductive elements.
444 Citations
25 Claims
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1. A substrate processing system for forming a vapor from a solid precursors by distributing heat to the precursor in a sealed container, the system comprising:
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a vessel configured to hold units of solid precursor, the vessel including a base, a top portion opposite the base, and a sidewall extending from the top portion toward the base, the vessel having no heater therein; an inlet that introduces a carrier gas into the vessel; an outlet that releases gas comprising the vapor from the solid precursor from the vessel; and a plurality of thermally conductive protrusions extending from at least one of the vessel base and the vessel sidewall, the thermally conductive protrusions positioned and dimensioned to extend through the units of solid precursor and to conduct heat generated by a heater external to the vessel from at least one of the vessel base and the vessel sidewall to the units of solid precursor when the vessel is loaded with the units of solid precursor, wherein the thermally conductive protrusions each have a top surface that is space apart from the vessel top portion, and wherein the thermally conductive protrusions do not form part of an electrical or fluid circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 24)
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17. A system for producing in a sealed container a vapor used in substrate processing, the system comprising:
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a vessel having a base, a top portion opposite the base, and a sidewall extending from the top portion toward the base, the vessel having no heater therein and configured to be heated by an external heater; a batch of precursor for producing a substrate processing vapor, the batch of precursor positioned within the vessel; and a plurality of elongate heat transmitting solid forms that extend from at least one of the vessel base and the vessel sidewall, the elongate heat transmitting solid forms being interspersed through the batch of precursor and being configured to conduct heat generated by the external heater from at least a portion of the vessel to the batch of precursor, wherein the plurality of elongate heat transmitting solid forms each have a top surface that is spaced apart from the vessel top portion. - View Dependent Claims (18, 19, 20, 21, 22, 23, 25)
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Specification