Plasma processing system and baffle assembly for use in plasma processing system
First Claim
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1. A baffle assembly located in a plasma processing system having a chuck assembly for holding a substrate, comprising:
- a baffle carrier formed into a ring surrounding the chuck assembly attached to the plasma processing system; and
at least two baffle inserts having a plurality of passages therethrough, the at least two baffle inserts being removably disposed on top of and supported by the baffle carrier,wherein the at least two baffle inserts are not attached to the baffle carrier and lie on the baffle carrier.
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Abstract
The present invention presents a baffle assembly located in a plasma processing system, comprising a baffle carrier attached to the plasma processing system, and at least two baffle inserts having a plurality of passages therethrough, the at least two baffle inserts being supported by the baffle carrier.
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Citations
16 Claims
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1. A baffle assembly located in a plasma processing system having a chuck assembly for holding a substrate, comprising:
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a baffle carrier formed into a ring surrounding the chuck assembly attached to the plasma processing system; and at least two baffle inserts having a plurality of passages therethrough, the at least two baffle inserts being removably disposed on top of and supported by the baffle carrier, wherein the at least two baffle inserts are not attached to the baffle carrier and lie on the baffle carrier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A plasma processing system comprising:
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a processing chamber; a chuck assembly disposed in said chamber for holding a substrate; and a baffle assembly located in the processing chamber, wherein said baffle assembly comprises a baffle carrier formed into a ring surrounding the chuck assembly attached to the plasma processing system, and at least two baffle inserts having a plurality of passages therethrough, the at least two baffle inserts being removably disposed on top of and supported by the baffle carrier, wherein the at least two baffle inserts are not attached to the baffle carrier and lie on the baffle carrier. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification