Method and apparatus for reviewing defects
First Claim
Patent Images
1. A method for reviewing defects of a sample including these steps:
- a first step for, on the basis of position information of defects on a sample placed on a table that can move in an X-Y plane, where the position information of defects is previously detected and obtained by inspecting the sample by an other inspection system, driving the table and making the defects come into the viewing field of an optical microscope, and adjusting a focus of a detection optical system of the optical microscope onto the sample;
a second step for re-detecting the defects by the optical microscope;
a third step for correcting the position information of defects on the basis of the position information of defects re-detected at the second step; and
a fourth step for reviewing the defects whose position information is corrected at the third step by an electron microscope,wherein at the first step, adjusting the focus of the detection optical system of the optical microscope onto the sample is made by moving a part of or a whole of the detection optical system in a normal line direction of the sample surface.
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Abstract
A method and an apparatus for reviewing defects detected by an optical particle inspection system or an optical profile inspection system in detail by an electron microscope are provided. In order to putting defects to be reviewed in the viewing field of the electron microscope and reducing the size of the apparatus, the electron microscope reviews defects detected by an optical defect inspection system. In the electron microscope, an optical microscope for reviewing detects is arranged, and when focusing of this optical microscope is carried out, the illumination position and the detection position of the optical microscope are not changed to the sample.
13 Citations
16 Claims
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1. A method for reviewing defects of a sample including these steps:
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a first step for, on the basis of position information of defects on a sample placed on a table that can move in an X-Y plane, where the position information of defects is previously detected and obtained by inspecting the sample by an other inspection system, driving the table and making the defects come into the viewing field of an optical microscope, and adjusting a focus of a detection optical system of the optical microscope onto the sample; a second step for re-detecting the defects by the optical microscope; a third step for correcting the position information of defects on the basis of the position information of defects re-detected at the second step; and a fourth step for reviewing the defects whose position information is corrected at the third step by an electron microscope, wherein at the first step, adjusting the focus of the detection optical system of the optical microscope onto the sample is made by moving a part of or a whole of the detection optical system in a normal line direction of the sample surface. - View Dependent Claims (2, 3, 4, 5)
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6. A method for reviewing defects of a sample including these steps:
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a step for, by use of an image obtained by light-field illuminating on a sample placed on a table that can move in an X-Y plane and photographing the sample by an optical microscope, adjusting and aligning a position and a rotation direction of the sample in the X-Y plane; a step for, on the basis of position information of defects on the sample aligned, where the position information of defects previously detected and obtained by inspecting the sample by other inspection system, driving the table and making the defects come into the viewing field of the optical microscope, and adjusting a focus of a dection optical system of the optical microscope on the sample; a step for dark-field illuminating on the defects and re-detecting the defects by use of the optical microscope with the adjusted focus of the detection optical system and obtaining position information of the defects in the X-Y plane; a step for correcting the position information of defects detected and obtained by inspecting the sample by an other inspection system beforehand on the basis of the position information of the re-detected defects in the X-Y plane; and a step for driving the table so that the defects of the sample whose position information is corrected come into the viewing field of an electron microscope and reviewing the defects by the electron microscope, wherein, in the step for adjusting the focus of the detection optical system of the optical microscope on the sample, adjusting the focus of the detection optical system of the optical microscope on the sample is made by moving a part of or a whole of the detection optical system of the optical microscope in a normal line direction of the sample surface. - View Dependent Claims (7, 8, 9, 10)
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11. An apparatus for reviewing defects of a sample including:
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an optical microscope means that, by use of position information of defects on a sample previously detected by an other defect inspection system, re-detects the defects and has a light-field illumination optical system and a dark-field illumination optical system; a table means that loads the sample and can move on an X-Y plane; a focus position adjusting means that adjusts a focus position of a detection optical system of the optical microscope means onto the sample placed on the table means; a position information correcting means that corrects position information of defects previously detected by the other detect inspection system on the basis of the position information of defects on the sample re-detected by the optical microscope means whose focus position is corrected by the focus position adjusting means; and an electronic microscope means that reviews the defects whose position information is corrected by the position information correcting means on the sample transferred by the table means, wherein the focus position adjusting means adjusts the focus position of the optical microscope means on the sample placed on the table means by moving a part of or a whole of the detection optical system of the optical microscope means in the normal line direction of the sample surface. - View Dependent Claims (12, 13, 14, 15, 16)
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Specification