Mini-prober for TFT-LCD testing

• US 7,602,199 B2
• Filed: 05/09/2007
• Issued: 10/13/2009
• Est. Priority Date: 05/31/2006
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Brunner, Matthias, Liu, Yong, Nguyen, Hung T., Krishnaswami, Sriram, Johnston, Benjamin M.
• Primary Examiner(s): Nguyen; Ha Tran T
• Assistant Examiner(s): Kusumakar; Karen M
• Application Number:
  US11/746,515
• Publication Number:
  US 20070296437A1
• Time in Patent Office: 888 Days
• Field of Search: 324/761, 324/770, 324/754, 324/757, 324/158.1, 349/31
• US Class Current: 324/760.02
• CPC Class Codes: G01R 31/2808 Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards probe, multiprobe, probe manipulator or probe fixture G01R1/067
• CPC Class Codes: G09G 3/006 Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays testing individual LED's G01R31/2635; testing lamps G01R31/44; testing of optical features of LCD displays G02F1/1309

Abstract

An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

Claims

1. A prober assembly adapted to test a large area substrate, comprising:

a rectangular frame having a lateral member extending along the width of the frame with a length that is equal to or less than half of the length of the large area substrate and a longitudinal member extending along the length of the frame with a length that is equal to or greater than the width of the large area substrate;

a plurality of prober pins extending from a lower surface of the frame along the length of the lateral and longitudinal members and adapted to contact the large area substrate; and

a prober support member having a linear drive configured to laterally move the rectangular frame with respect to the substrate.

2. The apparatus of claim 1, wherein the frame further comprises a plurality of contact heads adapted to contact the large area substrate.

3. The apparatus of claim 1, wherein at least one of the lateral member or the longitudinal member includes a contact plate in communication with the plurality of prober pins.

4. The apparatus of claim 3, wherein the contact plate is disposed on the lower surface of the frame.

5. The apparatus of claim 1, wherein at least two opposing sides of the frame include at least one lug extending therefrom.

6. The apparatus of claim 1, wherein at least two opposing sides of the frame include at least two lugs extending therefrom.

7. The apparatus of claim 1, wherein two opposing sides of the frame include at least one lug extending therefrom and two sides of the frame include at least two lugs extending therefrom.

8. The apparatus of claim 1, wherein the width of the frame is adjustable.

9. The apparatus of claim 1, wherein the frame includes at least two indexing pins extending from the lower surface thereof.

10. A prober assembly adapted to test a large area substrate, comprising:

a rectangular frame with a rectangular aperture formed therethrough and a cross-member extending across the aperture;

a plurality of contact heads coupled to the cross-member and adapted to contact the large area substrate, wherein the rectangular frame comprises an area that is equal to or less than half of the area of the large area substrate; and

a prober support member having a linear drive configured to laterally move the rectangular frame with respect to the substrate.

11. The apparatus of claim 10, wherein the plurality of contact heads include a plurality of prober pins extending from a lower surface thereof.

12. The apparatus of claim 10, wherein the width of the frame is equal to or less than half of a length of the large area substrate and the length of the frame is equal to or greater than a width of the large area substrate.

13. The apparatus of claim 10, wherein at least two opposing sides of the frame include at least one lug extending therefrom.

14. The apparatus of claim 10, wherein at least two opposing sides of the frame include at least two lugs extending therefrom.

15. The apparatus of claim 10, wherein two opposing sides of the frame include at least one lug extending therefrom and two sides of the frame include at least two lugs extending therefrom.

16. The apparatus of claim 10, wherein the width of the frame is adjustable.

17. A test system, comprising:

a testing table sized to receive a rectangular substrate; and

a prober assembly adapted to contact the substrate, wherein the prober assembly comprises;

a rectangular frame having a lateral member and a longitudinal member; and

a plurality of prober pins extending from a lower surface of the frame along the length of the lateral member and along the length of the longitudinal member and adapted to contact the substrate, wherein the rectangular frame comprises an area that is equal to or less than half of the area of the substrate and is movable by at least two motors along a length of the testing table.

18. The system of claim 17, wherein two opposing sides of the frame include at least one lug extending therefrom and two sides of the frame include at least two lugs extending therefrom.

19. The system of claim 17, wherein the width of the frame is equal to or less than half of the length of the substrate and the length of the frame is equal to or greater than the width of the substrate.