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Adaptive response time closed loop control algorithm

  • US 7,603,186 B2
  • Filed: 04/28/2006
  • Issued: 10/13/2009
  • Est. Priority Date: 04/28/2006
  • Status: Active Grant
First Claim
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1. A method for adapting a response time of a mass flow controller while the mass flow controller is controlling flow of a fluid to a reaction vessel, comprising:

  • receiving a set point indicator, the set point indicator indicating a desired flow rate of the fluid;

    receiving a sensor indicator generated by a sensor, the sensor indicator indicating a flow rate of the fluid being delivered to the vessel;

    biasing the response time of a closed loop control algorithm to a slow mode;

    briefly modifying the closed-loop-control algorithm to a fast mode when at least one threshold condition is satisfied based on the at least one of the sensor indicator or the set point indicator, the closed-loop-control algorithm affecting the rate which a valve in the mass flow controller changes position to provide the desired flow rate;

    gradually modifying the closed-loop-control algorithm back to the slow mode;

    stabilizing the closed-loop-control algorithm in response to the modifying the response time of the closed-loop-control algorithm by adjusting at least one parameter associated with the closed-loop-control algorithm.

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