Adaptive response time closed loop control algorithm
First Claim
1. A method for adapting a response time of a mass flow controller while the mass flow controller is controlling flow of a fluid to a reaction vessel, comprising:
- receiving a set point indicator, the set point indicator indicating a desired flow rate of the fluid;
receiving a sensor indicator generated by a sensor, the sensor indicator indicating a flow rate of the fluid being delivered to the vessel;
biasing the response time of a closed loop control algorithm to a slow mode;
briefly modifying the closed-loop-control algorithm to a fast mode when at least one threshold condition is satisfied based on the at least one of the sensor indicator or the set point indicator, the closed-loop-control algorithm affecting the rate which a valve in the mass flow controller changes position to provide the desired flow rate;
gradually modifying the closed-loop-control algorithm back to the slow mode;
stabilizing the closed-loop-control algorithm in response to the modifying the response time of the closed-loop-control algorithm by adjusting at least one parameter associated with the closed-loop-control algorithm.
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Accused Products
Abstract
A system and method for controlling a flow of a fluid using an adaptive closed-loop-control algorithm is described. One embodiment includes a method for receiving a set point indicator and/or a sensor indicator generated by a sensor. A response time of a closed-loop-control algorithm is modified when at least one threshold value is satisfied based on the sensor indicator and/or the set point indicator. The closed-loop-control algorithm, which is implemented by a flow controller, is stabilized in response to the modifying of the response time of the closed-loop-control algorithm by adjusting at least one parameter associated with the closed-loop-control algorithm.
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Citations
25 Claims
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1. A method for adapting a response time of a mass flow controller while the mass flow controller is controlling flow of a fluid to a reaction vessel, comprising:
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receiving a set point indicator, the set point indicator indicating a desired flow rate of the fluid; receiving a sensor indicator generated by a sensor, the sensor indicator indicating a flow rate of the fluid being delivered to the vessel; biasing the response time of a closed loop control algorithm to a slow mode; briefly modifying the closed-loop-control algorithm to a fast mode when at least one threshold condition is satisfied based on the at least one of the sensor indicator or the set point indicator, the closed-loop-control algorithm affecting the rate which a valve in the mass flow controller changes position to provide the desired flow rate; gradually modifying the closed-loop-control algorithm back to the slow mode; stabilizing the closed-loop-control algorithm in response to the modifying the response time of the closed-loop-control algorithm by adjusting at least one parameter associated with the closed-loop-control algorithm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for adapting a response time of a mass flow controller while the mass flow controller is controlling flow of a fluid to a processing vessel, comprising:
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receiving a set point indicator, the set point indicator indicating a desired flow rate of the fluid; receiving a sensor indicator generated by a sensor, the sensor indicator indicating a flow rate of the fluid being delivered to the vessel; biasing the response time of a closed loop control algorithm to a slow mode; modifying, while the mass flow controller is controlling flow of a fluid to a processing vessel, a feedback filter from a slow mode to a fast mode based on the at least one of the sensor indicator or the set point indicator, the feedback filter being associated with a closed-loop-control algorithm, the closed-loop-control algorithm being associated with a flow controller; gradually modifying the feedback filter back to the slow mode; and changing a tuning parameter associated with the closed-loop-control algorithm based on the modifying the feedback filter, the tuning parameter being changed to stabilize the closed-loop-control algorithm when the feedback filter is modified. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A mass flow controller, comprising:
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a processor configured to bias a response time of a closed loop control algorithm to a slow mode and to briefly modify the response time of the closed-loop-control algorithm from the slow mode to a fast mode when at least one threshold value is satisfied based on at least one of a sensor indicator generated by a sensor indicating a flow rate of a fluid being delivered to a processing vessel or a set point indicator indicating a desired flow rate of the fluid, the processor modifies the response time of the closed-loop-control algorithm by modifying a feedback filter associated with the closed-loop-control algorithm and a tuning parameter associated with the closed-loop-control algorithm, and the processor gradually modifies the closed-loop-control algorithm back to the slow mode; and a memory configured to store a parameter associated with at least one of the feedback filter and the tuning parameter, the processor accesses the parameter from the memory. - View Dependent Claims (23, 24, 25)
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Specification