Multiple frequency atomic force microscopy

• US 7,603,891 B2
• Filed: 10/05/2006
• Issued: 10/20/2009
• Est. Priority Date: 04/25/2006
• Status: Active Grant

• Current Assignee: Oxford Instruments Asylum Research Inc (Oxford Instruments PLC)
• Original Assignee: Asylum Research Corporation (Oxford Instruments PLC)
• Inventors: Proksch, Roger B.
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US11/544,130
• Publication Number:
  US 20070245815A1
• Time in Patent Office: 1,111 Days
• Field of Search: None
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/24 AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
• CPC Class Codes: G01Q 60/32 AC mode

Abstract

An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.

Claims

1. A method of operating an atomic force microscope, comprising:

exciting a probe tip of a cantilever at or near a resonant frequency of the cantilever which forms a first eigenmode, while keeping the tip sufficiently far from a sample having a surface that said cantilever oscillates at a free amplitude A₁₀ unaffected by the proximity of the cantilever to the sample surface and without making contact with the sample surface;

changing the relative distance in a Z direction between a base of the cantilever and the sample surface to an amount where a detected amplitude A₁ of the first eigenmode of the cantilever is affected by the proximity of the sample surface to the tip of the cantilever, without the tip of the cantilever making contact with the sample surface;

scanning the sample by creating relative movement between the tip of the cantilever and the sample surface, while using a feedback loop to control the distance between the base of the cantilever and the sample surface so that the amplitude A₁ of the first eigenmode of the cantilever is maintained at an essentially constant value;

exciting the probe tip of the cantilever at or near a second eigenmode of the cantilever, where said second eigenmode of the cantilever is a different eigenmode than said first eigenmode, said scanning being at an amplitude A₂ while keeping the first eigenmode drive and feedback loop with the same values and without using said second eigenmode in said feedback loop;

adjusting the amplitude A₂ of the second eigenmode of the cantilever until said amplitude A₂ indicates the second eigenmode is interacting with the sample surface with predominantly repulsive forces;

varying the amplitude A₂ of the second eigenmode of the cantilever over a range of values while not including said amplitude A₂ as an input to the feedback loop; and

measuring the amplitude and phase of the first and second eigenmodes of the cantilever as measured characteristics of the sample.

2. The method of claim 1, further comprising a display configured to display information including at least one information type selected from the group consisting of information indicative of the phase component of the first eigenmode of the cantilever, information indicative of the phase component of the second eigenmode of the cantilever, information indicative of the amplitude component of the first eigenmode of the cantilever and information indicative of the amplitude component of the second eigenmode of the cantilever.

3. A method as in claim 1, further comprising using the measured amplitude and phase out the first and second eigen-modes to provide information about a surface is interacting with the probe tip of the cantilever.

4. A method of operating an atomic force microscope comprising:

generating an oscillatory drive signal for a cantilever, the drive signal including a first frequency component and a different second frequency component, both of said first and second frequency components being resonant modes of a same physical portion of the cantilever;

applying the oscillatory drive signal to a first end of the cantilever opposite an interaction end of the cantilever, wherein the interaction end of the cantilever includes a probe tip;

positioning the cantilever proximate to a sample surface so that the probe tip interacts with the surface of the sample;

detecting information indicative of the amplitude of oscillation of the probe tip;

analyzing the information indicative of the amplitude of oscillation of the probe tip to determine a first amplitude component for the first frequency and a second amplitude component for the second frequency; and

using a feedback loop to control the cantilever based on the first amplitude component only and allowing the amplitude of oscillation of the second amplitude component to vary, wherein said feedback loop uses only said first amplitude component, and not said second amplitude component to control said cantilever.

5. The method of claim 4, wherein using the feedback loop to control the cantilever based on the first amplitude component comprises comparing the first amplitude component to a reference first amplitude component and changing a distance between a base of the cantilever and the sample surface based on the comparison.

6. The method of claim 5, wherein changing the distance between the base of the cantilever and the sample surface based on a comparison comprises changing the distance between the base of the cantilever and the sample surface to maintain the first amplitude component essentially equal to the reference first amplitude component.

7. The method of claim 4, wherein the first frequency component is a first eigenmode frequency of the cantilever, and wherein the second frequency component is a second different eigenmode frequency of the cantilever.

8. The method of claim 4, wherein the second amplitude component is indicative of a repulsive interaction between the probe tip and the sample surface.

9. The method of claim 4, wherein the second amplitude component is indicative of an attractive interaction between the probe tip and the sample surface.

10. The system of claim 4, further comprising a display configured to display information including at least one information type selected from the group consisting of information indicative of the first amplitude component and information indicative of the second amplitude component.

11. A method as in claim 4, further comprising wherein said using a feedback loop comprises controlling the feedback loop independent of the second amplitude component.

12. A method as in claim 4, further comprising using information measured from said cantilever to provide information about the surface that is interacting with the probe tip of the cantilever.

13. A scanning probe system comprising:

a drive system configured to generate an oscillatory drive signal for a cantilever, the drive signal including a first frequency component and a different second frequency component, where said first and second frequency components are eigenmodes of said cantilever;

a positioning system configured to position the cantilever in response to a cantilever control signal;

a measurement system configured to receive a signal indicative of the oscillation of the cantilever and to generate information indicative of the oscillation amplitude based on the received signal;

an analysis system configured to receive the information indicative of the oscillation amplitude of the cantilever and to determine a first amplitude component for the first frequency and a second amplitude component for the second frequency; and

a feedback system to generate the cantilever control signal based on the first amplitude component and not on the oscillation amplitude, wherein the drive system is configured to generate an oscillatory drive signal for a cantilever, and wherein the drive signal further includes a third frequency component that is another eigenmode of said cantilever.

14. The system of claim 13, further comprising a cantilever holder configured to oscillate a back end of the cantilever opposite a probe tip end of the cantilever.

15. The system of claim 14, further comprising the cantilever.

16. The system of claim 13, wherein the drive system comprises a frequency synthesizer configured to generate a signal at the first frequency component a signal at the second frequency component.

17. The system of claim 13, wherein the analysis system comprises a first lock-An amplifier configured to generate a signal indicative of the first amplitude component for the first frequency and a second lock-in amplifier configured to generate a signal indicative of the second amplitude component for the second frequency.

18. The system of claim 13, wherein the measurement system comprises an optical lever system.

19. The system of claim 13, wherein the scanning probe system is an atomic force microscope.

20. The system of claim 13, wherein the positioning system includes a scan system configured to create relative movement between a probe tip of the cantilever and a sample surface.

21. The system of claim 20, wherein the scan system comprises a stage including one or more piezos and flexures.

22. The system of claim 13, wherein the measurement system is further configured to generate information indicative of the oscillation phase of the cantilever based on the received signal and the analysis system is further configured to receive the information indicative of the oscillation phase of the cantilever and to determine a first phase component for the first frequency and a second phase component for the second frequency.

23. The system of claim 22, further comprising a display configured to display information including at least one information type selected from the group consisting of information indicative of the first phase component, information indicative of the second phase component, information indicative of the first amplitude component, and information indicative of the second amplitude component.

24. The system of claim 13, wherein both said first frequency component and said second frequency component are resonant modes of the same section of the cantilever.

25. A method of operating an atomic force microscope, comprising:

moving a probe tip of a cantilever at a first frequency near a resonant frequency of the cantilever while keeping the tip sufficiently distant from a sample having a surface that it said cantilever oscillates at the a first free amplitude without making contact with the sample surface;

moving an item to reduce a relative distance in a Z direction between a base of the cantilever and the sample surface in a way such that a detected amplitude of a first vibrational mode of the cantilever that is a first mode associated with said first frequency, is affected by a proximity of the sample surface to the tip of the cantilever without the probe tip of the cantilever making contact with the sample surface;

scanning the sample by creating relative movement between the probe tip of the cantilever and the sample surface, while using a feedback loop to control the distance between the base of the cantilever and the sample surface so that the detected amplitude A1 of the first vibrational mode of the cantilever is controlled to be a substantially constant value;

exciting the probe tip of the cantilever at or near a second vibrational mode of the cantilever at second amplitude, where said second vibrational mode is a mode that is a harmonic mode above a fundamental resonance frequency of the cantilever, while keeping the first vibrational mode drive and feedback loop with the same values;

monitoring said first second amplitudes to interact with the sample surface with predominantly repulsive forces; and

not including said second amplitude as an input to the feedback loop, wherein

one of said vibrational modes is attractive and another of said vibrational modes is repulsive.

26. The method of claim 25, further comprising a display configured to display information including at least one information type selected from the group consisting of information indicative of the phase component of a first eigenmode of the cantilever, information indicative of the phase component of a second eigenmode of the cantilever, information indicative of the amplitude component of the first eigenmode of the cantilever and information indicative of the amplitude component of the second eigenmode of the cantilever.

27. A method as in claim 25, further comprising using the measured amplitude and phase of first and second eigenmodes to provide information about a surface is interacting with the probe tip of the cantilever.