On-chip reflectron and ion optics

• US 7,605,377 B2
• Filed: 10/17/2006
• Issued: 10/20/2009
• Est. Priority Date: 10/17/2006
• Status: Expired due to Fees

• Current Assignee: Zyvex Labs, Llc
• Original Assignee: Zyvex Corporation
• Inventors: Tsui, Kenneth, Verbeck, Guido Fridolin IV
• Primary Examiner(s): Souw; Bernard E
• Application Number:
  US11/550,241
• Publication Number:
  US 20080087841A1
• Time in Patent Office: 1,099 Days
• Field of Search: 250/281, 250/282, 250/287, 250/396.R, 315/5.18, 315/5.19, 315/5.27, 315/5.28, 315/5.34, 315/5.37, 315/351, 257/249
• US Class Current: 250/396.00R
• CPC Class Codes: H01J 49/0018 Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
• CPC Class Codes: H01J 49/405 characterised by the reflectron, e.g. curved field, electrode shapes
• CPC Class Codes: H01J 49/406 with multiple reflections

Abstract

A microelectronics apparatus comprising a substrate, a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate, and a plurality of ion reflection lenses each coupled to the substrate, wherein each ion reflection lens: (1) is substantially perpendicular to each of the grid electrodes; (2) extends substantially perpendicular from the substrate; and (3) has an aperture aligned with the central axis.

Claims

1. A microelectronics apparatus, comprising:

a substrate;

a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate; and

a plurality of ion reflection lenses coupled to the substrate, wherein each ion reflection lens;

is substantially perpendicular to each of the grid electrodes;

extends substantially perpendicular from the substrate; and

has an aperture aligned with the central axis has a thickness ranging between about 5 μ

m and about 100 μ

m.

2. The apparatus of claim 1 wherein each ion reflection lens comprises a microconnector portion configured to couple with a corresponding socket formed in the substrate.

3. The apparatus of claim 1 wherein the substrate includes a plurality of traces configured to deliver an electrical signal to the grid electrodes and ion reflection lenses.

4. The apparatus of claim 1 further comprising an ion source and an ion detector each coupled to the substrate, wherein the grid electrodes and the ion reflection lenses are configured to direct an ion emitted from the ion source towards the ion detector.

5. The apparatus of claim 4 wherein the ion source and ion detector are oriented side-by-side.

6. The apparatus of claim 1 wherein the pair of grid electrodes is a first pair of a grid electrodes, the plurality of ion reflection lenses is a plurality of first ion reflection lenses, and the apparatus further comprises:

a second pair of grid electrodes coupled to the substrate;

a third pair of grid electrodes coupled to the substrate;

a fourth pair of grid electrodes coupled to the substrate;

a plurality of second ion reflection lenses coupled to the substrate;

a plurality of third ion reflection lenses coupled to the substrate; and

a plurality of fourth ion reflection lenses coupled to the substrate, wherein;

the first pair grid electrodes and the plurality of first ion reflection lenses are collectively configured to direct an ion from an ion source coupled to the substrate towards the second pair of grid electrodes and the plurality of second ion reflection lenses, collectively;

the second pair of grid electrodes and the plurality of second ion reflection lenses are collectively configured to direct the ion from the first pair of grid electrodes and the plurality of first ion reflection lenses, collectively, towards the third pair of grid electrodes and the plurality of third ion reflection lenses, collectively;

the third pair of grid electrodes and the plurality of third ion reflection lenses are collectively configured to direct the ion from the second pair of grid electrodes and the plurality of second ion reflection lenses, collectively, towards the fourth pair of grid electrodes and the plurality of fourth ion reflection lenses, collectively; and

the fourth pair of grid electrodes and the plurality of fourth ion reflection lenses are collectively configured to direction the ion from the third pair of grid electrodes and the plurality of third ion reflection lenses, collectively, towards an ion detector coupled to the substrate.

7. The apparatus of claim 6 wherein the pluralities of first, second, third and fourth ion reflection lenses each comprise the same number of ion reflection lenses.

8. The apparatus of claim 1 wherein the ion reflection lenses each have a thickness of about 50 μ

m.

9. The apparatus of claim 1 wherein the ion reflection lenses each have a central aperture that is metallized such that, upon being energized, the metallized central aperture creates an electronic field configured to modify direction of ion flight therethrough.

10. A method of manufacturing a microelectronics, comprising:

coupling an ion source and an ion detector to a substrate;

coupling a pair of grid electrodes to the substrate on opposing sides of a central axis of the ion source; and

coupling a plurality of ion reflection lenses to the substrate in series such that the grid electrodes interpose the ion source and the plurality of ion reflection lenses;

wherein the ion reflection lenses each have a thickness ranging between about 5 μ

m and about 100 μ

m

wherein the grid electrodes and the ion reflection lenses are electrically biased to collectively direct ions emitted from the ion source to travel through the grid electrodes and the ion reflection lenses back towards the ion detector.

11. The method of claim 10 wherein each ion reflection lens comprises a microconnector portion configured to couple with a corresponding socket formed in the substrate, such that coupling the grid electrodes and ion reflection lenses to the substrate comprises coupling a corresponding microconnector portion and socket pair.

12. The method of claim 10 wherein the substrate includes a plurality of traces configured to deliver an electrical signal to the grid electrodes and ion reflection lenses.

13. The method of claim 10 wherein coupling the ion source and ion detector to the substrate comprises orienting the ion source and ion detector side-by-side on the substrate.

14. The method of claim 10 wherein the pair of grid electrodes is a first pair of a grid electrodes, the plurality of ion reflection lenses is a plurality of first ion reflection lenses, and the method further comprises:

coupling a second pair of grid electrodes to the substrate;

coupling a third pair of grid electrodes to the substrate;

coupling a fourth pair of grid electrodes to the substrate;

coupling a plurality of second ion reflection lenses to the substrate;

coupling a plurality of third ion reflection lenses to the substrate; and

coupling a plurality of fourth ion reflection lenses to the substrate, wherein;

the first pair grid electrodes and the plurality of first ion reflection lenses are collectively configured to direct an ion from an ion source coupled to the substrate towards the second pair of grid electrodes and the plurality of second ion reflection lenses, collectively;

the second pair of grid electrodes and the plurality of second ion reflection lenses are collectively configured to direct the ion from the first pair of grid electrodes and the plurality of first ion reflection lenses, collectively, towards the third pair of grid electrodes and the plurality of third ion reflection lenses, collectively;

the third pair of grid electrodes and the plurality of third ion reflection lenses are collectively configured to direct the ion from the second pair of grid electrodes and the plurality of second ion reflection lenses, collectively, towards the fourth pair of grid electrodes and the plurality of fourth ion reflection lenses, collectively; and

the fourth pair of grid electrodes and the plurality of fourth ion reflection lenses are collectively configured to direction the ion from the third pair of grid electrodes and the plurality of third ion reflection lenses, collectively, towards an ion detector coupled to the substrate.

15. The method of claim 14 wherein the pluralities of first, second, third and fourth ion reflection lenses each comprise the same number of ion reflection lenses.

16. The method of claim 10 wherein the ion reflection lenses each have a thickness of about 50 μ

m.

17. The method of claim 10 further comprising:

forming the grid electrodes and ion reflection lenses in corresponding first locations in the substrate;

releasing the grid electrodes and ion reflection lenses from the substrate after each are formed; and

repositioning the released grid electrodes and ion reflection lenses from their corresponding first locations towards corresponding second positions;

wherein coupling the grid electrodes and ion reflection lenses to the substrate comprises coupling the grid electrodes and ion reflection lenses to the substrate in their corresponding second positions.

18. The method of claim 10 wherein the ion reflection lenses each have a central aperture that is metallized such that, upon being energized, the metallized central aperture creates an electronic field configured to modify direction of ion flight therethrough.