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On-chip reflectron and ion optics

  • US 7,605,377 B2
  • Filed: 10/17/2006
  • Issued: 10/20/2009
  • Est. Priority Date: 10/17/2006
  • Status: Expired due to Fees
First Claim
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1. A microelectronics apparatus, comprising:

  • a substrate;

    a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate; and

    a plurality of ion reflection lenses coupled to the substrate, wherein each ion reflection lens;

    is substantially perpendicular to each of the grid electrodes;

    extends substantially perpendicular from the substrate; and

    has an aperture aligned with the central axis has a thickness ranging between about 5 μ

    m and about 100 μ

    m.

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