Sealed wafer packaging of microelectromechanical systems

• US 7,605,466 B2
• Filed: 10/15/2007
• Issued: 10/20/2009
• Est. Priority Date: 10/15/2007
• Status: Active Grant

• Current Assignee: General Electric Company
• Original Assignee: General Electric Company
• Inventors: Hays, David Cecil, Iannotti, Joseph Alfred, Claydon, Glenn Scott, Keimel, Christopher Fred, Kapusta, Christopher James, Boomhower, Oliver Charles, Aimi, Marco Francesco, Gowda, Arun Virupaksha
• Primary Examiner(s): DANG, TRUNG Q
• Application Number:
  US11/872,562
• Publication Number:
  US 20090096088A1
• Time in Patent Office: 736 Days
• Field of Search: 257/723, 257/E23.01, 438/107
• US Class Current: 257/723
• CPC Class Codes: B81C 1/00269 Bonding of solid lids or wafers to the substrate
• CPC Class Codes: B81C 2203/0118 Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
• CPC Class Codes: B81C 2203/019 characterised by the material or arrangement of seals between parts
• CPC Class Codes: B81C 2203/032 Gluing
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/1461 MEMS

Abstract

Multiple microelectromechanical systems (MEMS) on a substrate are capped with a cover using a layer that may function as a bonding agent, separation layer, and hermetic seal. A substrate has a first side with multiple MEMS devices. A cover is formed with through-holes for vias, and with standoff posts for layer registration and separation. An adhesive sheet is patterned with cutouts for the MEMS devices, vias, and standoff posts. The adhesive sheet is tacked to the cover, then placed on the MEMS substrate and heated to bond the layers. The via holes may be metalized with leads for circuit board connection. The MEMS units may be diced from the substrate after sealing, thus protecting them from contaminants.

Claims

1. A MEMS unit comprising:

a MEMS device on a substrate;

a cover;

an adhesive sheet comprising cutouts for the MEMS device;

the adhesive sheet disposed between the substrate and the cover;

standoff posts spanning between the substrate and the cover; and

the substrate, the adhesive sheet, and the cover bonded together in registration;

whereby the MEMS device is sealed and protected from contamination.

2. The MEMS unit of claim 1 wherein:

the cover further comprises through-holes for vias;

the adhesive sheet further comprises respective cutouts for the vias; and

the vias are filled with electrically conductive material from the MEMS device to an exterior surface of the cover.

3. The MEMS unit of claim 2 wherein the standoff posts extend from the cover, and the adhesive sheet further comprises respective cutouts for the standoff posts, thereby providing registration between the adhesive sheet and the cover.

4. A method for making a MEMS unit as in claim 3, comprising:

forming multiple MEMS devices on the substrate;

forming a cover for the multiple MEMS devices, wherein the cover is formed with respective standoff posts and respective through-holes for the vias;

patterning the adhesive sheet with respective cutouts for the MEMS devices, the vias, and the standoff posts;

the standoff posts ranging from about 85% to about 98% as tall as a thickness of the adhesive sheet before bonding;

placing the adhesive sheet between the substrate and the cover;

bonding the cover, the adhesive sheet, and the substrate together by heating them;

metalizing the vias to form leads from the MEMS devices to the exterior surface of the cover; and

dicing the MEMS devices into individual unit packages after the above steps are complete;

whereby the MEMS devices are protected from contamination during dicing.

5. The method of claim 4, wherein the placing and bonding steps comprise:

placing the cover in registration with the patterned adhesive sheet by inserting the standoff posts into the respective cutouts in the adhesive sheet;

tacking the adhesive sheet to the cover by raising the temperature of the cover to a first temperature sufficient to adhere the adhesive sheet to the cover;

placing the adhesive sheet and the cover on the substrate in registration with the MEMS devices; and

heating the MEMS substrate, adhesive sheet, and cover to a second temperature sufficient to bond them together without additional adhesive.

6. The method of claim 4, wherein the cover is formed from a silicon wafer by applying first and second etching masks to respective first and second sides of the cover, and removing parts of the cover through patterns in the masks by etching techniques to create the standoff posts and through-holes, then coating or growing an insulating film over the silicon cover to provide electrical isolation between the leads.

7. The method of claim 4 wherein the bonding step further comprises applying a clamping pressure in a range from about 1 PSI to about 200 PSI between the cover and the substrate

17. The MEMS unit of claim 2 wherein at least a portion of the electrically conductive material of the MEMS device is in contact with the adhesive sheet.

8. A method of packaging microelectromechanical systems (MEMS) devices, comprising:

forming multiple MEMS devices and electrical contact pads therefor on a first side of a MEMS substrate;

forming first and second etching masks on respective first and second sides of a cover;

reducing parts of the second side of the cover by etching through the second etching mask, thus forming standoff posts on the second side of the cover;

depositing a working layer on the second side of the cover;

reducing parts of the first side of the cover by etching through the first etching mask to the working layer, thus forming through-holes in the cover for vias;

stripping the working layer and the etching masks from the cover;

patterning an adhesive sheet to match the cover and the MEMS substrate with respective cutouts in the adhesive sheet for the MEMS devices, the vias, and the standoff posts;

bonding the second side of the cover to the first side of the MEMS substrate using the adhesive sheet as a bonding layer, with the through-holes of the cover in registration with the respective cutouts in the adhesive sheet and with the pads of the MEMS substrate;

metalizing the through-holes in the cover and the respective cutouts in the adhesive sheet for the vias to form leads; and

singulating the now-sealed MEMS devices into individual packages after the above steps are complete.

9. The method of claim 8, wherein the bonding step comprises:

placing the patterned adhesive sheet in registration with the cover by inserting the cover standoff posts into the respective cutouts in the adhesive sheet for the standoff posts;

tacking the adhesive sheet to the cover by raising the temperature of the cover to a first temperature sufficient to adhere the adhesive sheet to the cover;

placing the adhesive sheet and the cover on the MEMS substrate; and

heating the MEMS substrate, the adhesive sheet, and the cover to a second temperature sufficient to bond them together without additional adhesive.

10. The method of claim 8, wherein the etching masks are formed of silicon nitride (Si₃N₄), and the reducing steps comprise anisotropic etching by potassium hydroxide (KOH).

11. The method of claim 8, wherein the depositing step comprises sputtering a layer of copper on the second side of the cover to form the working layer.

12. The method of claim 8, further comprising after the stripping step coating the cover with silicon dioxide (SiO₂).

13. The method of claim 8, wherein the standoff posts are in the range from about 85% to about 98% as tall as a thickness of the adhesive sheet before bonding.

14. The method of claim 13, wherein the standoff posts are about 90% as tall as a thickness of the adhesive sheet.

15. A sealed assembly of MEMS units comprising:

a plurality of MEMS devices on a substrate;

a cover for the plurality of MEMS devices, the cover comprising standoff posts and through-holes for vias;

an adhesive sheet comprising respective cutouts for the MEMS devices, the standoff posts, and the vias;

the adhesive sheet disposed between the substrate and the cover;

the standoff posts spanning between the substrate and the cover, providing separation therebetween, and providing registration between the cover and the adhesive sheet;

the substrate, the adhesive sheet, and the cover bonded together in registration; and

the vias metalized;

whereby the MEMS devices are sealed and protected from contamination.

16. A sealed MEMS device singulated from the sealed assembly of claim 15.