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Integrated hybrid current sensor

  • US 7,605,580 B2
  • Filed: 06/29/2007
  • Issued: 10/20/2009
  • Est. Priority Date: 06/29/2007
  • Status: Expired due to Fees
First Claim
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1. A sensor arrangement comprising:

  • a substrate;

    a first coil spaced apart from a surface of the substrate in a vertical direction, wherein the first coil comprises a primary winding for carrying a primary current generating a magnetic field;

    a second coil spaced apart in the vertical direction from the first coil, wherein the second coil comprises a secondary winding magnetically coupled with the primary winding and providing a first signal dependent on the primary current;

    at least one Hall element integrated in or arranged on the substrate, wherein the Hall element is arranged such that it is pervaded by the magnetic field of the primary current for providing a second signal depending on the primary current;

    an isolation layer arranged between the first coil and the second coil; and

    an evaluation circuit for determining a measurement signal representing the primary current from a first signal and a second signal.

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