Integrated hybrid current sensor
First Claim
Patent Images
1. A sensor arrangement comprising:
- a substrate;
a first coil spaced apart from a surface of the substrate in a vertical direction, wherein the first coil comprises a primary winding for carrying a primary current generating a magnetic field;
a second coil spaced apart in the vertical direction from the first coil, wherein the second coil comprises a secondary winding magnetically coupled with the primary winding and providing a first signal dependent on the primary current;
at least one Hall element integrated in or arranged on the substrate, wherein the Hall element is arranged such that it is pervaded by the magnetic field of the primary current for providing a second signal depending on the primary current;
an isolation layer arranged between the first coil and the second coil; and
an evaluation circuit for determining a measurement signal representing the primary current from a first signal and a second signal.
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Abstract
A sensor arrangement for measuring current is disclosed. The sensor arrangement includes a substrate, at least one Hall element integrated in or arranged on the substrate, a first coil that is spaced apart from a surface of the substrate in a vertical direction, a second coil that is spaced apart in a vertical direction from the first coil, and an isolation layer that is arranged between the first coil and the second coil.
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Citations
27 Claims
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1. A sensor arrangement comprising:
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a substrate; a first coil spaced apart from a surface of the substrate in a vertical direction, wherein the first coil comprises a primary winding for carrying a primary current generating a magnetic field; a second coil spaced apart in the vertical direction from the first coil, wherein the second coil comprises a secondary winding magnetically coupled with the primary winding and providing a first signal dependent on the primary current; at least one Hall element integrated in or arranged on the substrate, wherein the Hall element is arranged such that it is pervaded by the magnetic field of the primary current for providing a second signal depending on the primary current; an isolation layer arranged between the first coil and the second coil; and an evaluation circuit for determining a measurement signal representing the primary current from a first signal and a second signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A sensor arrangement comprising:
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a substrate; at least one magnetic sensor element integrated in or arranged on the substrate; a first coil spaced apart from a surface of the substrate in a vertical direction, the first coil comprising a primary winding for carrying a primary current generating a magnetic field; a second coil spaced apart in the vertical direction from the first coil, the second coil comprising a secondary winding magnetically coupled with the primary winding and providing a first signal dependent on the primary current, wherein the magnetic sensor element is arranged such that it is pervaded by the magnetic field of the primary current for providing a second signal depending on the primary current; an isolation layer arranged between the first coil and the second coil; and an evaluation circuit for determining a measurement signal representing the primary current from the first signal and the second signal. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification