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System for clearance measurement and method of operating the same

  • US 7,605,595 B2
  • Filed: 09/29/2006
  • Issued: 10/20/2009
  • Est. Priority Date: 09/29/2006
  • Status: Expired due to Fees
First Claim
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1. A clearance sensing system comprising:

  • a probe separated from a test object by a variable distance d;

    an alternating current (AC) source for supplying a current through the probe, wherein the AC source and the probe are configured to generate and sustain a controlled plasma channel between a tip of the probe and the test object; and

    a processing unit for measuring a voltage difference between the tip of the probe and the test object and computing the variable distance d from the voltage difference.

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