Semiconductor device and method of fabricating the same

• US 7,605,902 B2
• Filed: 03/10/2006
• Issued: 10/20/2009
• Est. Priority Date: 07/06/1999
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Goto, Yuugo, Hirakata, Yoshiharu, Yamazaki, Shunpei, Kobayashi, Yuko
• Primary Examiner(s): LOUIE, WAI SING
• Application Number:
  US11/371,917
• Publication Number:
  US 20060151791A1
• Time in Patent Office: 1,320 Days
• Field of Search: 257/57, 257/59, 257/72, 257/83, 257/257, 257/290, 257/347, 257/351, 257/36
• US Class Current: 349/155
• CPC Class Codes: G02F 1/13306 Circuit arrangements or driving methods for the control of single liquid crystal cells G02F1/132, G02F1/133382 take precedence
• CPC Class Codes: G02F 1/133302 Rigid substrates, e.g. inorganic substrates
• CPC Class Codes: G02F 1/133345 Insulating layers G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence
• CPC Class Codes: G02F 1/13338 Input devices, e.g. touch panels
• CPC Class Codes: G02F 1/133512 Light shielding layers, e.g. black matrix G02F1/136209 takes precedence
• CPC Class Codes: G02F 1/13394 spacers regularly patterned on the cell subtrate, e.g. walls, pillars G02F1/133377 takes precedence
• CPC Class Codes: G02F 1/1341 Filling or closing of cells
• CPC Class Codes: G02F 1/134309 characterised by their geometrical arrangement
• CPC Class Codes: G02F 1/13454 Drivers integrated on the active matrix substrate G02F1/136277 takes precedence
• CPC Class Codes: G02F 1/1368 in which the switching element is a three-electrode device G02F1/136277 takes precedence
• CPC Class Codes: H01L 2029/7863 with an LDD consisting of more than one lightly doped zone or having a non-homogeneous dopant distribution, e.g. graded LDD
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1222 with a particular composition, shape or crystalline structure of the active layer
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/167 further characterised by the doping material H01L29/1604 takes precedence
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H01L 29/78627 with a significant overlap between the lightly doped drain and the gate electrode, e.g. GOLDD
• CPC Class Codes: H01L 29/78669 with inverted-type structure, e.g. with bottom gate
• CPC Class Codes: H01L 2924/00 : Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 : Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10S 438/924 : To facilitate selective etching
• CPC Class Codes: Y10S 438/98 : Utilizing process equivalents or options

Abstract

There is provided a high quality liquid crystal panel having a thickness with high accuracy, which is designed, without using a particulate spacer, within a free range in accordance with characteristics of a used liquid crystal and a driving method, and is also provided a method of fabricating the same. The shape of a spacer for keeping a substrate interval constant is made such that it is a columnar shape, a radius R of curvature is 2 μm or less, a height H is 0.5 μm to 10 μm, a diameter is 20 μm or less, and an angle α is 65° to 115°. By doing so, it is possible to prevent the lowering of an opening rate and the lowering of light leakage due to orientation disturbance.

Claims

1. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed on the plurality of spacers and formed over the second substrate; and

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,

wherein a width of the second end L₂ and a width of the center portion L₁ are set in the range of 0.8<

L₂/L₁<

3.

wherein a radius of curvature of an edge between a upper surface and a side surface of each of the plurality of spacers is 2μ

m or less.

2. The display device according to claim 1,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.

3. The display device according to claim 1,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

4. The display device according to claim 1,

wherein the width of the center portion is 20 μ

m or less.

5. A display device comprising:

a touch panel;

a back light; and

a liquid crystal panel between the touch panel and the back light, comprising;

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed on the plurality of spacers and formed over the second substrate; and

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,

wherein a width of the second end is larger than a width of the center portion, and

wherein a taper portion is formed at the second end.

6. The display device according to claim 5,

wherein the back light comprises LED.

7. The display device according to claim 5,

wherein the touch panel comprises a light emitting element and a light receiving element.

8. The display device according to claim 5,

wherein the touch panel comprises a pressure sensitive type detecting element.

9. The display device according to claim 5,

wherein the touch panel comprises a capacitive type detecting element.

10. The display device according to claim 5,

wherein each of the plurality of spacers comprises resin material.

11. The display device according to claim 5,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.

12. The display device according to claim 5,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

13. The display device according to claim 5,

wherein the width of the center portion is 20 μ

m or less.

14. A display device comprising:

a touch panel;

a back light; and

a liquid crystal panel between the touch panel and the back light, comprising;

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a conductive film formed over the second substrate;

a plurality of spacers formed on the conductive film;

a second alignment film formed on the plurality of spacers and formed on the conductive film; and

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate,

wherein a contact surface between the second alignment film and at least one of the plurality of the spacers is continuously connected to a contact surface between the second alignment film and the conductive film.

15. The display device according to claim 14,

wherein the back light comprises LED.

16. The display device according to claim 14,

wherein the touch panel comprises a light emitting element and a light receiving element.

17. The display device according to claim 14,

wherein the touch panel comprises a pressure sensitive type detecting element.

18. The display device according to claim 14,

wherein the touch panel comprises a capacitive type detecting element.

19. The display device according to claim 14,

wherein each of the plurality of spacers comprises resin material.

20. The display device according to claim 14,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.

21. The display device according to claim 14,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

22. A display device comprising;

a touch panel;

a back light; and

a liquid crystal panel between the touch panel and the back light, comprising;

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed on the plurality of spacers and formed over the second substrate;

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, a center portion between the first end and the second end, and a lower portion between the center portion and the second end,

wherein an angle between a tangent plane at the center portion and a surface of the second substrate is larger than an angle between a tangent plane at the lower portion and the surface of the second substrate.

23. The display device according to claim 22,

wherein the back light comprises LED.

24. The display device according to claim 22,

wherein the touch panel comprises a light emitting element and a light receiving element.

25. The display device according to claim 22,

wherein the touch panel comprises a pressure sensitive type detecting element.

26. The display device according to claim 22,

wherein the touch panel comprises a capacitive type detecting element.

27. The display device according to claim 22,

wherein each of the plurality of spacers comprises resin material.

28. The display device according to claim 22,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.

29. The display device according to claim 22,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

30. The display device according to claim 22,

wherein the width of the center portion is 20 μ

m or less.

31. A display device comprising:

a touch panel;

a back light; and

a liquid crystal panel between the touch panel and the back light, comprising;

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed on the plurality of spacers and formed over the second substrate; and

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,

wherein a width of the second end L₂ and a width of the center portion L₁ are set in a range of 1<

L₂/L₁<

2.5.

32. The display device according to claim 31,

wherein the back light comprises LED.

33. The display device according to claim 31,

wherein the touch panel comprises a light emitting element and a light receiving element.

34. The display device according to claim 31,

wherein the touch panel comprises a pressure sensitive type detecting element.

35. The display device according to claim 31,

wherein the touch panel comprises a capacitive type detecting element.

36. The display device according to claim 31,

wherein each of the plurality of spacers comprises resin material.

37. The display device according to claim 31,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.

38. The display device according to claim 31,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

39. The display device according to claim 31,

wherein the width of the center portion is 20 μ

m or less.

40. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed on the plurality of spacers and formed over the second substrate; and

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein at least one of the plurality of the columnar spacers at least partly overlaps an active layer of the thin film transistor,

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,

wherein a width of the second end is larger than a width of the center portion, and

wherein a taper portion is formed at the second end.

41. The display device according to claim 40, wherein each of the plurality of spacers comprises resin material.

42. The display device according to claim 40,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.

43. The display device according to claim 40,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

44. The display device according to claim 41,

wherein the width of the center portion is 20 μ

m or less.

45. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a conductive film formed over the second substrate;

a plurality of spacers formed on the conductive film;

a second alignment film formed on the plurality of spacers and formed on the conductive film; and

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein at least one of the plurality of the columnar spacers at least partly overlaps an active layer of the thin film transistor comprised in any one of the plurality of pixels,

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate,

wherein a contact surface between the second alignment film and at least one of the plurality of the spacers is continuously connected to a contact surface between the second alignment film and the conductive film.

46. The display device according to claim 45,

wherein each of the plurality of spacers comprises resin material.

47. The display device according to claim 45,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of pixels.

48. The display device according to claim 45,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

49. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed on the plurality of spacers and formed over the second substrate;

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein at least one of the plurality of the columnar spacers at least partly overlaps an active layer of the thin film transistor comprised in any one of the plurality of pixels,

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, a center portion between the first end and the second end, and a lower portion between the center portion and the second end,

wherein an angle between a tangent plane at the center portion and a surface of the second substrate is larger than an angle between a tangent plane at the lower portion and the surface of the second substrate.

50. The display device according to claim 49,

wherein each of the plurality of spacers comprises resin material.

51. The display device according to claim 49,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.

52. The display device according to claim 49,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

53. The display device according to claim 49,

wherein the width of the center portion is 20 μ

m or less.

54. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

a first alignment film formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed on the plurality of spacers and formed over the second substrate; and

a liquid crystal material interposed between the first alignment film and the second alignment film;

wherein at least one of the plurality of the columnar spacers at least partly overlaps an active layer of the thin film transistor comprised in any one of the plurality of pixels,

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,

wherein a width of the second end L₂ and a width of the center portion L₁ are set in a range of 1<

L₂/L₁<

2.5.

55. The display device according to claim 54,

wherein each of the plurality of spacers comprises resin material.

56. The display device according to claim 54,

wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.

57. The display device according to claim 54,

wherein the plurality of spacers is disposed at a density of 10 to 200 ones per mm².

58. The display device according to claim 54,

wherein the width of the center portion is 20 μ

m or less.

59. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor comprising an active layer formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

an insulating film comprising organic resin formed over the interlayer insulating film;

a first alignment film formed over the insulating film;

a second substrate opposed to the first substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed over the second substrate and covering the plurality of spacers; and

a liquid crystal material interposed between the first alignment film and the second alignment film,

wherein at least one of the plurality of spacers at least partly overlaps with a channel formation region in the active layer,

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate,

wherein a width of the second end is larger than a width of the first end, and

wherein an edge of the first end and the second end have curved portion.

60. The display device according to claim 59, a color filter is formed over the first substrate.

61. The display device according to claim 59, wherein each of the plurality of spacers comprises resin material.

62. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

an insulating film comprising organic resin formed over the interlayer insulating film;

a first alignment film formed over the insulating film;

a second substrate opposed to the first substrate;

a conductive film formed over the second substrate;

a plurality of spacers formed over the conductive film;

a second alignment film formed over the plurality of spacers and the conductive film; and

a liquid crystal material interposed between the first alignment film and the second alignment film,

wherein at least one of the plurality of spacers is directly contacted to both of the conductive film and the second alignment film,

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate,

wherein a width of the second end is larger than a width of the first end, and wherein an edge of the first end and the second end have curved portion.

63. The display device according to claim 62, a color filter is formed over the first substrate.

64. The display device according to claim 62, wherein the conductive film comprises ITO.

65. The display device according to claim 62,

wherein each of the plurality of spacers comprises resin material.

66. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor comprising an active layer formed over the first substrate;

an interlayer insulating film over the thin film transistor;

an insulating film comprising organic resin over the interlayer insulating film;

a first alignment film formed over the insulating film;

a second substrate opposed to the first substrate;

a conductive film formed over the second substrate;

a plurality of spacers formed over the conductive film;

a second alignment film formed over the plurality of spacers and the conductive film; and

a liquid crystal material interposed between the first alignment film and the second alignment film,

wherein at least one of the plurality of spacers is directly contacted with both of the conductive film and the second alignment film;

wherein at least one of the plurality of spacers at least partly overlaps with a channel formation region in the active layer;

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate;

wherein a width of the second end is larger than a width of the first end, and wherein edge of the first end and the second end has curved portion.

67. The display device according to claim 66, a color filter is formed over the first substrate.

68. The display device according to claim 66, wherein the conductive film comprises ITO.

69. The display device according to claim 66, wherein each of the plurality of spacer comprises resin material.

70. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor comprising an active layer over the first substrate;

an interlayer insulating film formed over the thin film transistor;

an insulating film comprising organic resin formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a conductive film formed between the insulating film and the second substrate;

an alignment film; and

a plurality of spacers, each of which is formed between the alignment film and the conductive film, and

wherein each of the plurality of spacers is surrounded by the alignment film and the conductive film, and in direct contacts with both of the alignment film and the conductive film;

wherein at least one of the plurality of spacers at least partly overlaps with a channel formation region in the active layer,

wherein each of the plurality of spacers has a first end and a second end

wherein a width of the second end is larger than a width of the first end, and

wherein an edge of the first end and the second end have curved portion.

71. The display device according to claim 70, a color filter is formed over the first substrate.

72. The display device according to claim 70, wherein the conductive film comprises ITO.

73. The display device according to claim 70, wherein each of the plurality of spacer comprises resin material.

74. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor comprising an active layer formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

an insulating film comprising organic resin over the interlayer insulating film;

a second substrate opposed to the first substrate;

a conductive film formed between the insulating film and the second substrate;

an alignment film; and

a plurality of spacers, each of which is formed between the alignment film and the conductive film,

wherein each of the plurality of spacers has a first end and a second end

wherein the alignment film covers the first end and a side surface of each of the plurality of spacers,

wherein the second end is in direct contact with the conductive film;

wherein at least one of the plurality of spacers at least partly overlaps with a channel formation region in the active layer,

wherein a width of the second end is larger than a width of the first end, and

wherein an edge of the first end and the second end have curved intersected portion.

75. The display device according to claim 74, a color filter is formed over the first substrate.

76. The display device according to claim 74, wherein the conductive film comprises ITO.

77. The display device according to claim 74, wherein each of the plurality of spacers comprises resin material.

78. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

an insulating film comprising organic resin formed over the interlayer insulating film;

a first alignment film formed over the insulating film;

a second substrate opposed to the first substrate;

a light-shielding film formed over the second substrate;

a plurality of spacers formed over the second substrate;

a second alignment film formed over the plurality of spacers and the second substrate; and

a liquid crystal material interposed between the first alignment film and the second alignment film,

wherein at least one of the plurality of spacers at least partly overlaps with the the light-shielding film,

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate,

wherein a width of the second end is larger than a width of the first end, and

wherein an edge of the first end and the second end have curved portion.

79. The display device according to claim 78, a color filter is formed over the first substrate.

80. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

an insulating film comprising organic resin formed over the interlayer insulating film;

a first alignment film formed over the insulating film;

a second substrate opposed to the first substrate;

a light-shielding film formed over the second substrate;

a conductive film formed over the second substrate;

a plurality of spacers formed over the conductive film;

a second alignment film over the plurality of spacers and the conductive film; and

a liquid crystal material interposed between the first alignment film and the second alignment film,

wherein at least one of the plurality of spacers is directly contacted to both of the conductive film and the second alignment film;

wherein at least one of the plurality of spacers at least partly overlaps with the light-shielding film,

wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate,

wherein a width of the second end is larger than a width of the first end, and

wherein an edge of the first end and the second end have curved portion.

81. The display device according to claim 80, a color filter is formed over the first substrate.

82. The display device according to claim 80, wherein the conductive film comprises ITO.

83. The display device according to claim 80, wherein each of the plurality of spacers comprises resin material.

84. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

an insulating film comprising organic resin over the interlayer insulating film;

a second substrate opposed to the first substrate;

a light-shielding film formed over the second substrate;

a conductive film formed between the insulating film and the second substrate;

an alignment film; and

a plurality of spacers, each of which is formed between the alignment film and the conductive film, and

wherein each of the plurality of spacers is surrounded by the alignment film and the conductive film, and in direct contacts with both of the alignment film and the conductive film,

wherein at least one of the plurality of spacers at least partly overlaps with the light-shielding film,

wherein each of the plurality of spacers has a first end and a second end,

wherein a width of the second end is larger than a width of the first end, and

wherein an edge of the first end and the second end have curved intersected portion.

85. The display device according to claim 84, a color filter is formed over the first substrate.

86. The display device according to claim 84, wherein the conductive film comprises ITO.

87. The display device according to claim 84, wherein each of the plurality of spacer comprises resin material.

88. A display device comprising:

a first substrate;

a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor formed over the first substrate;

an interlayer insulating film formed over the thin film transistor;

an insulating film comprising organic resin formed over the interlayer insulating film;

a second substrate opposed to the first substrate;

a light-shielding formed over the second substrate;

a conductive film formed between the insulating film and the second substrate;

an alignment film; and

a plurality of spacers, each of which is formed between the alignment film and the conductive film, and

wherein each of the plurality of spacers has a first end and a second end,

wherein the alignment film covers the first end and a side surface of each of the plurality of spacers;

wherein the second end is in direct contact with the conductive film;

wherein at least one of the plurality of spacers at least partly overlaps with the light-shielding film,

wherein a width of the second end is larger than a width of the first end, and

wherein an edge of the first end and the second end have curved portion.

89. The display device according to claim 88, a color filter is formed over the first substrate.

90. The display device according to claim 88, wherein the conductive film comprises ITO.

91. The display device according to claim 88, wherein each of the plurality of spacers comprises resin material.