Plurality of hidden hinges for mircromirror device

• US 7,605,971 B2
• Filed: 08/18/2007
• Issued: 10/20/2009
• Est. Priority Date: 11/01/2003
• Status: Active Grant

• Current Assignee: Ignite USA (Ignite), Olympus Corporation
• Original Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Inventors: Maeda, Yoshihiro, Ichikawa, Hirotoshi, Ishii, Fusao
• Primary Examiner(s): Thompson; Timothy J
• Application Number:
  US11/894,246
• Publication Number:
  US 20070285756A1
• Time in Patent Office: 794 Days
• Field of Search: 359/223, 359/224, 359/238, 359/290, 359/291
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A mirror device comprises plural mirror elements, each of which comprises a mirror for reflecting illumination light emitted from a light source, a hinge for supporting the mirror placed on a substrate, a hinge structural body for supporting the hinge, and electrodes for controlling a deflection direction of the mirror placed on the substrate, and in each of which the hinge is placed so as to traverse the edge of the mirror or the border with an adjacent mirror. Also enabled is a configuration of a projection apparatus, which comprises the mirror device.

Claims

1. A mirror device comprising:

a plurality of mirror elements, each comprising a mirror for reflecting light projected from a light source;

a hinge disposed on a substrate under said mirror for supporting the mirror, and an electrode disposed at a distance away from said hinge on said substrate under said mirror for controlling a deflection direction of the mirror is attached to a surface of said mirror on an edge or a corner of said mirror; and

said hinge further includes a first and a second branches separated by a gap wherein said first branch is attached to said surface of said mirror and said second branch is attached to an adjacent mirror.

2. The mirror device according to claim 1, wherein:

said electrode functioning as address electrodes for receiving control circuit signals for selecting and activating said mirror.

3. The mirror device according to claim 1, further comprising:

a stopper disposed under said mirror on said substrate for contacting and stopping said mirror from deflecting beyond a predefined maximum declined angle.

4. A mirror device, comprising:

a mirror element comprising a mirror for reflecting a light projected from a light source,

a plurality of hinges disposed on a substrate each attaching via a support layer to a bottom surface of said mirror for supporting said mirror thereon wherein said support layer is shaped with a cutoff portions at respective connection parts with said hinges;

an electrode disposed on the substrate for applying a voltage for controlling a deflection direction of the mirror; and

at least one side of the cutoff portions is oriented in a direction substantially parallel with an incident direction of the light emitted from the light source.

5. A mirror device comprising:

a mirror element comprising a mirror for reflecting a light projected from a light source,

a plurality of hinges disposed on a substrate each attaching via a support layer to a bottom surface of said mirror for supporting said mirror thereon wherein said support layer is shaped with a cutoff portions at respective connection parts with said hinges;

an electrode disposed on the substrate for applying a voltage for controlling a deflection direction of the mirror;

at least one side of the cutoff portions is oriented in a direction substantially parallel with an incident direction of the light emitted from the light source; and

the support layer extending as an integral support surface attached to at least said mirror and an adjacent mirror.

6. A mirror device, comprising:

a plurality of mirror elements, each comprising a mirror for reflecting light projected from a light source;

a hidden hinge connected to a hinge electrode disposed on a substrate for supporting the mirror; and

the hinge electrode is shared between said mirror and an adjacent mirror.

7. The mirror device according to claim 6, wherein:

the hinge electrode is disposed under a gap of between adjacent mirrors.

8. A mirror device, comprising:

a plurality of mirror elements, each comprising a mirror for reflecting a light projected from a light source;

a stopper disposed on a substrate for contacting the mirror when inclined to a predefined maximum declined angle; and

the stopper is shared between said mirror and an adjacent mirror.

9. The mirror device according to claim 8, wherein:

the stopper is disposed under a gap of between said mirror and said adjacent mirror.

10. A mirror device comprising:

a plurality of mirror elements each comprising a mirror for reflecting an illumination light emitted from a light source;

a plurality of hinges disposed on a substrate each attaching to a bottom surface on a corner or a edge of said mirror for supporting the mirror;

a plurality of electrodes disposed on said substrate for applying a voltage for controlling a deflection direction of the mirrors;

a plurality of stoppers disposed on said substrate for contacting said mirror inclining thereto thus stopping said mirror from further deflecting beyond a predefined maximum inclining angle relative to a horizontal state of the mirror; and

said stopper is disposed near a deflection axis of said mirror and also near a location on said substrate under a gap of between said mirror and said adjacent mirror whereby said stopper is shared between said mirror and said adjacent mirror.