Data processing equipment, inspection assistance system, and data processing method
First Claim
1. A data processing apparatus configured to be connectable to an inspection tool for detecting defects of a target and a review tool for acquiring images of outward appearance of the defects via a communication network,wherein said data processing apparatus is configured to:
- receive first defect information including coordinate information with regard to the defects detected by said inspection tool under a plurality of inspection conditions from said inspection tool;
receive second defect information being acquired by said review tool based on said coordinate information from said review tool; and
display, on a display window of the data processing apparatus, the first defect information from said inspection tool and the second defect information from said review tool side by side in such a manner that images with regard to the defects which have been detected under the plurality of inspection conditions and judged to be the same defect based on the coordinate information are arranged in a same column or row.
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Accused Products
Abstract
A data processing apparatus, which is connected to an inspection tool and an review tool via a network, automatically receives inspection result file regarding defect information from the inspection tool and image information from the review tool. Moreover, the data processing apparatus makes comparative check between the defect, image, and attribute information outputted from the inspection tool and the defect, image, and attribute information observed in the review tool. Finally, the data processing apparatus displays, on its window, both of the above-described information in a manner of being organized and arranged side by side.
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Citations
20 Claims
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1. A data processing apparatus configured to be connectable to an inspection tool for detecting defects of a target and a review tool for acquiring images of outward appearance of the defects via a communication network,
wherein said data processing apparatus is configured to: -
receive first defect information including coordinate information with regard to the defects detected by said inspection tool under a plurality of inspection conditions from said inspection tool; receive second defect information being acquired by said review tool based on said coordinate information from said review tool; and display, on a display window of the data processing apparatus, the first defect information from said inspection tool and the second defect information from said review tool side by side in such a manner that images with regard to the defects which have been detected under the plurality of inspection conditions and judged to be the same defect based on the coordinate information are arranged in a same column or row. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 18)
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12. An inspection-operation assistance system, comprising:
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an inspection tool for detecting defects of a target to be detected under a plurality of inspection conditions, and outputting first defect information including coordinate information, a review tool for acquiring images of outward appearance of said defects based on said coordinate information, and a data processing apparatus for performing transfer/reception of information and images with said inspection tool and said review tool, and displaying, on a display window of the data processing apparatus, the first defect information from said inspection tool and second defect information from said review tool side by side in such a manner that images with regard to the defects which have been detected under said plurality of inspection conditions and judged to be the same defect based on the coordinate information are arranged in a same column or row. - View Dependent Claims (13, 14, 19)
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15. A data processing method, comprising the steps of:
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performing transfer/reception of information and images with a review tool and an inspection tool via a communication network, said review tool being configured to acquire images of outward appearance of defects based on first defect information including coordinate information under a plurality of inspection conditions output from the inspection tool, said inspection tool being configured to detect said defects of a target to be detected under the plurality of inspection conditions and output the first defect information, and displaying, on a display window of a data processing apparatus, the first defect information from said inspection tool and second defect information from said review tool side by side by side in such a manner images with regard to the defects which have been detected under the plurality of inspection conditions and judged to be the same defect based on the coordinate information are arranged in a same column or row. - View Dependent Claims (16, 17, 20)
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Specification