Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD
First Claim
1. A lithographic apparatus, comprising:
- an array of individually controllable elements that modulate a beam of radiation;
a compressed pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam; and
a dictionary decompressor that at least partially decompresses the compressed representation, wherein the dictionary decompressor comprisesa first dictionary memory that is an external dictionary memory,a first dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the first dictionary memory, portions of pattern data corresponding to references to the first dictionary memory contained in the compressed representation, anda second dictionary decoder, having an internal dictionary memory, that at least partially decompresses at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in the compressed representation,wherein the requested dose pattern comprises two groups of repeating pattern features; and
the dictionary decompressor is configured so that;
the external dictionary memory stores pattern data corresponding to a first of the groups, andthe internal dictionary memory stores pattern data corresponding to a second of the groups, wherein the repeating pattern features in the first group are larger than the repeating pattern features in the second group.
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Abstract
A lithographic apparatus comprises an array of individually controllable elements that modulate a beam of radiation, a compressed-pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, and a dictionary decompressor that at least partially decompresses the compressed representation. The dictionary decompressor comprises an external dictionary memory, a first dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the external dictionary memory, portions of pattern data corresponding to references to the external dictionary memory contained in the compressed representation, and a second dictionary decoder having an internal dictionary memory, the second dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in compressed representation.
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Citations
18 Claims
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1. A lithographic apparatus, comprising:
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an array of individually controllable elements that modulate a beam of radiation; a compressed pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam; and a dictionary decompressor that at least partially decompresses the compressed representation, wherein the dictionary decompressor comprises a first dictionary memory that is an external dictionary memory, a first dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the first dictionary memory, portions of pattern data corresponding to references to the first dictionary memory contained in the compressed representation, and a second dictionary decoder, having an internal dictionary memory, that at least partially decompresses at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in the compressed representation, wherein the requested dose pattern comprises two groups of repeating pattern features; and the dictionary decompressor is configured so that; the external dictionary memory stores pattern data corresponding to a first of the groups, and the internal dictionary memory stores pattern data corresponding to a second of the groups, wherein the repeating pattern features in the first group are larger than the repeating pattern features in the second group. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 17, 18)
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14. A device manufacturing method, comprising:
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providing an array of individually controllable elements that modulate a beam of radiation; storing a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, wherein the requested dose pattern comprises two groups of repeating pattern features; and reading out and at least partially decompressing at least part of the compressed representation by extracting, from a dictionary memory including an external dictionary memory and an internal dictionary memory, portions of pattern data corresponding to references to the dictionary memory contained in the compressed representation, wherein the external dictionary memory stores pattern data corresponding to a first of the groups, and the internal dictionary memory stores pattern data corresponding to a second of the groups, wherein the repeating pattern features in the first group are larger than the repeating pattern features in the second group. - View Dependent Claims (15, 16)
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Specification