Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD

• US 7,606,430 B2
• Filed: 08/30/2005
• Issued: 10/20/2009
• Est. Priority Date: 08/30/2005
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Tinnemans, Patricius Aloysius Jacobus, Van Engelen, Remco Johannes, Kessels, Lambertus Gerardus Maria
• Primary Examiner(s): Mariam; Daniel G
• Assistant Examiner(s): Seth; Manav
• Application Number:
  US11/214,055
• Publication Number:
  US 20070045572A1
• Time in Patent Office: 1,512 Days
• Field of Search: 382143-149, 382/232, 382/233, 382/243, 382/245, 382/251, 382/276, 358/3.06, 358/3.13, 35842601-42616, 341 50-107
• US Class Current: 382/232
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus

Abstract

A lithographic apparatus comprises an array of individually controllable elements that modulate a beam of radiation, a compressed-pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, and a dictionary decompressor that at least partially decompresses the compressed representation. The dictionary decompressor comprises an external dictionary memory, a first dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the external dictionary memory, portions of pattern data corresponding to references to the external dictionary memory contained in the compressed representation, and a second dictionary decoder having an internal dictionary memory, the second dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in compressed representation.

Claims

1. A lithographic apparatus, comprising:

an array of individually controllable elements that modulate a beam of radiation;

a compressed pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam; and

a dictionary decompressor that at least partially decompresses the compressed representation, wherein the dictionary decompressor comprises

a first dictionary memory that is an external dictionary memory,

a first dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the first dictionary memory, portions of pattern data corresponding to references to the first dictionary memory contained in the compressed representation, and

a second dictionary decoder, having an internal dictionary memory, that at least partially decompresses at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in the compressed representation,

wherein the requested dose pattern comprises two groups of repeating pattern features; and

the dictionary decompressor is configured so that;

the external dictionary memory stores pattern data corresponding to a first of the groups, and

the internal dictionary memory stores pattern data corresponding to a second of the groups, wherein the repeating pattern features in the first group are larger than the repeating pattern features in the second group.

2. The lithographic apparatus of claim 1, further comprising:

a controllable link that forwards at least a portion of the data decompressed by the second dictionary decoder to the internal dictionary memory, wherein the controllable link forwards only those parts of the decompressed data that correspond to features that are to be extracted by the second dictionary decoder later in the decoding process.

3. The lithographic apparatus of claim 2, wherein the controllable link selects parts of the decompressed data to forward to the internal dictionary memory on the basis of markers in the data input to the second dictionary decoder for decompression, the markers indicating which sequences of data will be extracted by the second dictionary decoder later in the decoding process.

4. The lithographic apparatus of claim 1, wherein:

the first and second dictionary decoders are implemented using at least one Field Programmable Gate Array;

the internal dictionary memory is implemented in memory that is integral with the at least one Field Programmable Gate Array; and

the external dictionary memory is implemented in memory that is formed separately from the at least one Field Programmable Gate Array and connected via a communication interface.

5. The lithographic apparatus of claim 1, wherein the external dictionary memory is implemented using Synchronous Dynamic Random Access Memory.

6. The lithographic apparatus of claim 1, wherein the internal dictionary memory is implemented using Static Random Access Memory.

7. The lithographic apparatus of claim 1, wherein content of at least one of the dictionary memories changes according to a region of the requested pattern being processed by the dictionary decompressor.

8. The lithographic apparatus of claim 7, wherein at least one of the dictionary memories is progressively updated by storing subsequent portions of output from at least one of the dictionary decoders.

9. The lithographic apparatus of claim 7, wherein output from the first dictionary decoder forms an input for the second dictionary decoder and the internal dictionary memory is progressively updated by storing subsequent portions of the output from the second dictionary decoder.

10. The lithographic apparatus of claim 7, wherein the at least one of the dictionary memories is progressively updated by importing data from an external memory device.

11. The lithographic apparatus of claim 7, wherein content of at least one of the dictionary memories includes data relating to a portion of the requested pattern, the portion corresponding to a region of the requested pattern that has been most recently processed.

12. The lithographic apparatus of claim 11, wherein the portion of the requested pattern is delimited by a window of a substantially predetermined size, which is smaller than the requested dose pattern, and wherein the window is moved during decompression so as to contain only the region of the pattern most recently processed.

13. The lithographic apparatus of claim 1, wherein:

the dictionary decompressor outputs partially compressed data in at least one of the following forms;

run-length encoded data, Huffman encoded data, delta encoded data and dictionary-based encoded data; and

the lithographic apparatus further comprises at least one of the following;

a run-length decoder, a Huffman decoder, a delta decoder and a dictionary-based decoder, each arranged at least partially to decode the partially compressed data.

17. The lithographic apparatus of claim 1, wherein a radiation dose in the dose pattern above a dose threshold causes an area of a substrate exposed to the radiation dose to develop a layer or resist, such that the area of the substrate exposed to the radiation dose is protected from etching by the resist.

18. The lithographic apparatus of claim 1, wherein a radiation dose in the dose pattern below a dose threshold causes an area of a resist exposed to the radiation dose to be removed.

14. A device manufacturing method, comprising:

providing an array of individually controllable elements that modulate a beam of radiation;

storing a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, wherein the requested dose pattern comprises two groups of repeating pattern features; and

reading out and at least partially decompressing at least part of the compressed representation by extracting, from a dictionary memory including an external dictionary memory and an internal dictionary memory, portions of pattern data corresponding to references to the dictionary memory contained in the compressed representation, wherein the external dictionary memory stores pattern data corresponding to a first of the groups, and the internal dictionary memory stores pattern data corresponding to a second of the groups, wherein the repeating pattern features in the first group are larger than the repeating pattern features in the second group.

15. A flat panel display manufactured according to the method of claim 14.

16. An integrated circuit device manufactured according to the method of claim 14.