Angular velocity sensor structure

• US 7,607,349 B2
• Filed: 09/13/2007
• Issued: 10/27/2009
• Est. Priority Date: 08/31/2006
• Status: Active Grant

• Current Assignee: Barun Electronics Co., Ltd.
• Original Assignee: SML Electronics, Inc.
• Inventors: Lee, Sang Chul, Kim, Sung Wook
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): Shah, Samir M
• Application Number:
  US11/854,871
• Publication Number:
  US 20080053225A1
• Time in Patent Office: 775 Days
• Field of Search: 734/88, 735/041.2, 73/13.7, 73/13.8, 734/93, 735/040.2, 735/040.3, 735/07, 735/10
• US Class Current: 73/488
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

An angular velocity sensor structure for improving the off-axis sensitivity is provided in which a structure for detecting an off-axis acceleration component applied to the angular velocity sensor structure is directly adapted to the sensor structure, thereby measuring the off-axis acceleration component actually applied to the sensor structure without distortion.

Claims

1. An angular velocity sensor structure comprising:

a driving unit movably formed on a board;

an angular velocity detecting unit formed on the board that detects angular velocity by the motion of the driving unit; and

an off-axis acceleration detecting unit formed on the same board as the angular velocity detecting unit that detects off-axis acceleration by the motion of the driving unit

wherein the angular velocity detected by the angular velocity detecting unit is corrected using the off-axis acceleration detected by the off-axis acceleration detecting unit.

2. The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same capacitance.

3. The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same structure.

4. The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same capacitance and structure.