Spatial wavefront analysis and 3D measurement
First Claim
Patent Images
1. A method of wavefront analysis comprising:
- utilizing a light source to illuminate an object and to obtain a wavefront having an amplitude and a phase;
obtaining a plurality of differently phase changed transformed wavefronts corresponding to said wavefront being analyzed, including;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts by phase manipulation; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, wherein said plurality of different phase changes are applied to a region of said transformed wavefront, said region having a shape of said light source.
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Abstract
A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134) wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.
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Citations
74 Claims
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1. A method of wavefront analysis comprising:
- utilizing a light source to illuminate an object and to obtain a wavefront having an amplitude and a phase;
obtaining a plurality of differently phase changed transformed wavefronts corresponding to said wavefront being analyzed, including;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts by phase manipulation; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, wherein said plurality of different phase changes are applied to a region of said transformed wavefront, said region having a shape of said light source. - View Dependent Claims (2)
- utilizing a light source to illuminate an object and to obtain a wavefront having an amplitude and a phase;
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3. A method of wavefront analysis comprising:
- utilizing a light source to illuminate an object and to obtain a wavefront having an amplitude and a phase;
obtaining a plurality of differently phase changed transformed wavefronts corresponding to said wavefront being analyzed, including;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts by phase manipulation; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, wherein said plurality of different phase changes are applied to regions of said transformed wavefront, said regions having the form of a grating.
- utilizing a light source to illuminate an object and to obtain a wavefront having an amplitude and a phase;
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4. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, and wherein obtaining a plurality of differently phase changed transformed wavefronts comprises;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts, and wherein said transformed wavefront comprises a plurality of different polarization components; and
said plurality of different phase changes are effected by using a birefringent phase changer to apply different phase changes to said plurality of different polarization components of said transformed wavefront.
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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5. A method of wavefront analysis comprising:
- obtaining two differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining two intensity maps of said two phase changed transformed wavefronts;
employing interference between said two intensity maps to generate a third intensity map; and
employing said two intensity maps and said third intensity map to obtain an output indicating said amplitude and phase of said wavefront being analyzed.
- obtaining two differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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6. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, and wherein obtaining a plurality of differently phase changed transformed wavefronts comprises;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts, and wherein;
said plurality of different phase changes includes spatial phase changes;
said plurality of different spatial phase changes are effected by applying a spatially uniform, time-varying spatial phase change to part of said transformed wavefront;
said transform applied to said wavefront being analyzed is a Fourier transform;
said plurality of different spatial phase changes comprises at least three different phase changes, said plurality of intensity maps comprises at least three intensity maps; and
said employing step comprises;
expressing said wavefront being analyzed as a first complex function which has an amplitude and phase identical to said amplitude and phase of said wavefront being analyzed;
expressing said plurality of intensity maps as a function of said first complex function and of a spatial function governing said spatially uniform, time-varying spatial phase change;
defining a second complex function, having an absolute value and a phase, as a convolution of said first complex function and of a Fourier transform of said spatial function governing said spatially uniform, time-varying spatial phase change;
expressing each of said plurality of intensity maps as a third function of;
said amplitude of said wavefront being analyzed;
a square of said absolute value of said second complex function;
a difference between said phase of said wavefront being analyzed and said phase of said second complex function; and
a known phase delay produced by one of said at least three different phase changes which each correspond to one of said at least three intensity maps;
solving said third function to obtain said amplitude of said wavefront being analyzed, said absolute value of said second complex function and said difference between said phase of said wavefront being analyzed and said phase of said second complex function;
solving said second complex function to obtain said phase of said second complex function; and
obtaining said phase of said wavefront being analyzed by adding said phase of said second complex function to said difference between said phase of said wavefront being analyzed and said phase of said second complex function, said square of said absolute value of said second complex function is obtained by approximating a square of said absolute value to a polynomial of a given degree; and
said employing step comprises computing a confidence level map characterizing confidence in each of a plurality of portions of said phase of said wavefront being analyzed, by comparing said square of said absolute value of said second complex function to said polynomial of a given degree, the confidence level map comprising a plurality of confidence levels respectively corresponding to a plurality of portions within said intensity maps. - View Dependent Claims (7, 8, 9, 10, 11, 12)
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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13. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, and wherein said step of employing also comprises normalizing each of the plurality of intensity maps to obtain a plurality of intensity maps having the same sum of intensity values. - View Dependent Claims (14)
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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15. A method of phase change analysis comprising:
- obtaining a phase change analysis wavefront which has an amplitude and a phase;
applying a transform to said phase change analysis wavefront thereby to obtain a transformed wavefront;
applying at least one phase change to said transformed wavefront, thereby to obtain at least one phase changed transformed wavefront;
obtaining at least one intensity map of said at least one phase changed transformed wavefront; and
employing said at least one intensity map to obtain an output indication of said at least one phase change applied to said transformed phase change analysis wavefront. - View Dependent Claims (16, 17, 18, 19, 20, 21)
- obtaining a phase change analysis wavefront which has an amplitude and a phase;
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22. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, the method also comprising;
performing said obtaining steps and said employing step wherein said wavefront being analyzed comprises a wavefront originating from a known object having known amplitude and phase values;
computing amplitude and phase calibration values by comparing the output of the employing step performed on said known object to said known amplitude and phase values; and
when performing said obtaining and employing steps on an unknown object, using said amplitude and phase calibration values to correct the output for said unknown object generated in said employing step. - View Dependent Claims (23, 24, 25, 26)
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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27. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, and also comprising using an iris to block off a portion of a wavefront, thereby to generate said wavefront being analyzed, and wherein the plurality of intensity maps are obtained using a camera having an imaging area which is larger than the image of said iris on the imaging area. - View Dependent Claims (30)
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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28. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, and wherein obtaining a plurality of differently phase changed transformed wavefronts comprises;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts, and wherein said plurality of different phase changes includes spatial phase changes, and wherein said plurality of different spatial phase changes are effected by applying a spatially uniform, time-varying spatial phase change to part of said transformed wavefront, and wherein;
said transform applied to said wavefront being analyzed is a Fourier transform;
said step of employing includes;
expressing said wavefront being analyzed as a first complex function which has an amplitude and phase identical to said amplitude and phase of said wavefront being analyzed;
expressing said plurality of intensity maps as a function of said first complex function and of a spatial function governing said spatially uniform, time-varying spatial phase change;
defining a second complex function, having an absolute value and a phase, as a convolution of said first complex function and of a Fourier transform of said spatial function governing said spatially uniform, time-varying spatial phase change;
expressing each of said plurality of intensity maps as a third function of;
said amplitude of said wavefront being analyzed;
said absolute value of said second complex function;
a difference between said phase of said wavefront being analyzed and said phase of said second complex function; and
a known phase delay produced by one of said different phase changes which each correspond to one of said intensity maps;
solving said third function to obtain said amplitude of said wavefront being analyzed, said absolute value of said second complex function and said difference between said phase of said wavefront being analyzed and said phase of said second complex function;
solving said second complex function to obtain said phase of said second complex function; and
obtaining said phase of said wavefront being analyzed by adding said phase of said second complex function to said difference between said phase of said wavefront being analyzed and said phase of said second complex function, wherein said step of obtaining an output indicating said amplitude and phase of said wavefront being analyzed comprises employing said plurality of intensity maps and said square of the absolute value of the second complex function to obtain said output.
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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29. A method for analyzing a wavefront having an amplitude and a phase, the method comprising:
- using an iris to block off a portion of a wavefront, thereby to generate a wavefront being analyzed;
Fourier-transforming said wavefront being analyzed and effecting a spatial phase change on a portion of the transformed wavefront, thereby to generate at least one partially phase changed transformed wavefront, including a known phase changed wavefront portion and a phase unchanged wavefront portion;
obtaining at least one intensity map of said at least one partially phase changed transformed wavefront, the map representing interference between the phase changed portion and the phase unchanged portion, wherein said map is obtained using a camera having an imaging area which is larger than the image of said iris on the imaging area, thereby to define inside and outside map portions representing intensity of light impinging on the imaging area portion inside and outside the iris image respectively; and
employing said at least one intensity map to obtain an output indicating said amplitude and phase of said wavefront being analyzed, including;
expressing said wavefront being analyzed as a first complex function which has an amplitude and phase identical to said amplitude and phase of said wavefront being analyzed;
expressing said intensity map as a function of said first complex function and of a spatial function; and
defining a second complex function, having an absolute value and a phase, as a convolution of said first complex function and of a Fourier transform of said spatial function;
wherein said absolute value of said second complex function is obtained by approximating said absolute value to a polynomial of a given degree, and wherein the square of the absolute value of the second complex function is derived from the portion of the imaging area which is external to the image of said iris on the imaging area, assuming that the phase of the second complex function is constant over the imaging area; and
computing the amplitude and phase of the wavefront being analyzed by assuming said inside map portion represents interference between said wavefront being analyzed and a wavefront having said absolute value of said second complex function as an amplitude and having a phase which is constant over the imaging area.
- using an iris to block off a portion of a wavefront, thereby to generate a wavefront being analyzed;
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31. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, and wherein obtaining a plurality of differently phase changed transformed wavefronts comprises;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts, and wherein said plurality of different phase changes includes spatial phase changes, and wherein said plurality of different spatial phase changes are effected by applying a spatial phase change to part of said transformed wavefront, wherein said step of applying a plurality of different phase changes comprises duplicating the transformed wavefront into several wavefronts and wherein said step of applying a plurality of different phase changes comprises applying a different spatial phase change to each of said several wavefronts. - View Dependent Claims (32)
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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33. A method of providing simultaneous surface and layer thickness measurements of a multilayer object comprising:
- illuminating the multilayer object with broadband illumination;
analyzing illumination emerging from said multilayer object to provide a spectral analysis output; and
utilizing said spectral analysis output to provide simultaneously both surface and layer thickness information regarding said multilayer object. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41)
- illuminating the multilayer object with broadband illumination;
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42. A method of analyzing a wavefront, comprising a plurality of different wavelength components, after the wavefront exits an object, the method comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase, including;
applying a transform to each of the plurality of different wavelength components, thereby to generate a plurality of transformed wavefront components; and
applying a plurality of scalable phase changes to the plurality of transformed wavefront components respectively;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed. - View Dependent Claims (43, 44)
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase, including;
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45. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, and wherein obtaining a plurality of differently phase changed transformed wavefronts comprises;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts, wherein said applying a plurality of different phase changes comprises providing an optical system having a selectable plurality of optical configurations creating a corresponding plurality of phase changes respectively. - View Dependent Claims (46, 47, 48, 49, 50, 51)
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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52. An apparatus for wavefront analysis comprising:
- a light source, to illuminate an object and to obtain a wavefront having an amplitude and a phase;
a wavefront transformer, obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed having a phase and an amplitude, including;
a transformed wavefront generator, applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
a phase changer, applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts;
an intensity map provider, obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts by phase manipulation; and
an intensity map utilizer, employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed, wherein said plurality of different phase changes are applied to a region of said transformed wavefront, corresponding to a shape of said light source.
- a light source, to illuminate an object and to obtain a wavefront having an amplitude and a phase;
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53. An apparatus for wavefront analysis comprising:
- a wavefront transformer, obtaining two differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
an intensity map provider, obtaining two intensity maps of said two phase changed transformed wavefronts; and
an intensity map utilizer, employing said two intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed; and
wherein;
said intensity map provider is also operative for employing interference between said two intensity maps to generate a third intensity map; and
said obtaining two differently phase changed transformed wavefronts comprises;
applying a transform to said wavefront being analyzed thereby to obtain a transformed wavefront; and
applying a plurality of different phase changes to said transformed wavefront, thereby to obtain a plurality of differently phase changed transformed wavefronts.
- a wavefront transformer, obtaining two differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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54. A method of optical property analysis of an object by analyzing a wavefront exiting the object, the method comprising:
- providing an imaging system having a defined depth of focus;
repeating the following steps focusing on each of several depths within the object;
obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase and which is exiting an object;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed; and
combining the several outputs generated by repeating said obtaining and employing steps in order to obtain a slice-by-slice optical transmission profile of the object. - View Dependent Claims (55)
- providing an imaging system having a defined depth of focus;
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56. A method of wavefront analysis operative to analyze a wavefront exiting from an object, the method comprising:
- focusing an imaging system on the object without changing the distance from the object to the imaging system and obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed.
- focusing an imaging system on the object without changing the distance from the object to the imaging system and obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase;
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57. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain a modulo 2 output indicating said amplitude and phase of said wavefront being analyzed, wherein said step of employing comprises computing at least one characteristic of the object'"'"'s surface geometry by analyzing a Moiré
pattern generated by projecting stripes on the object and viewing the object through a grating; and
resolving the 2π
ambiguity of the modulo 2π
output using at least one characteristic of the object'"'"'s surface geometry. - View Dependent Claims (58, 59, 60)
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed;
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61. A method for wavefront analysis utilizing a propagated wavefront, the method comprising:
- utilizing a propagated wavefront, which corresponds to a wavefront being analyzed, having an amplitude and a phase, for obtaining a plurality of differently phase changed transformed propagated wavefronts;
obtaining a plurality of intensity maps of said plurality of phase changed transformed propagated wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed. - View Dependent Claims (62, 63, 64)
- utilizing a propagated wavefront, which corresponds to a wavefront being analyzed, having an amplitude and a phase, for obtaining a plurality of differently phase changed transformed propagated wavefronts;
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65. A method for wavefront analysis comprising:
- in a first mode of operation;
obtaining a plurality of differently phase changed transformed wavefronts corresponding to an wavefront being analyzed which has an amplitude and a phase;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said wavefront being analyzed; and
in a second mode of operation;
carrying out an interferometric measurement on said wavefront being analyzed employing a reference in order to provide an output indicating the location of a source of said wavefront being analyzed. - View Dependent Claims (66, 67)
- in a first mode of operation;
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68. A method of wavefront analysis comprising:
- obtaining a wavefront being analyzed which has an amplitude and a phase;
obtaining a modified wavefront which has an amplitude and a phase in which estimated known differences of the wavefront being analyzed from a planar-like wavefront are removed by an optical element;
obtaining a plurality of differently phase changed transformed modified wavefronts corresponding to said modified wavefront;
obtaining a plurality of intensity maps of said plurality of phase changed transformed modified wavefronts;
employing said plurality of intensity maps to obtain an output indicating said amplitude and phase of said modified wavefront; and
obtaining an output indicating said amplitude and phase of said wavefront being analyzed, by reintroducing said estimated known differences from said planar-like wavefront to said output indicating said amplitude and phase of said modified wavefront. - View Dependent Claims (69, 70)
- obtaining a wavefront being analyzed which has an amplitude and a phase;
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71. A wavefront analysis system comprising:
- a wavefront generator, operative to obtain a wavefront being analyzed which has an amplitude and a phase;
an optical element, operative to modify said wavefront to obtain a modified wavefront which has an amplitude and a phase in which estimated known differences of the wavefront being analyzed from a planar-like wavefront are removed by said optical element;
a phase changer, operative to provide a plurality of differently phase changed transformed modified wavefronts corresponding to said modified wavefront;
an intensity map generator, operative to generate a plurality of intensity maps of said plurality of phase changed transformed modified wavefronts;
an intensity map utilizer, employing said plurality of intensity maps to provide an output indicating said amplitude and phase of said modified wavefront; and
a wavefront reconstructor, operative to obtain an output indicating said amplitude and phase of said wavefront being analyzed by reintroducing said estimated known differences from said planar-like wavefront to said output indicating said amplitude and phase of said modified wavefront. - View Dependent Claims (72, 73)
- a wavefront generator, operative to obtain a wavefront being analyzed which has an amplitude and a phase;
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74. A method of wavefront analysis comprising:
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has a polarization;
obtaining a plurality of intensity maps of said plurality of phase changed transformed wavefronts; and
employing said plurality of intensity maps to obtain an output indicating said polarization of said wavefront being analyzed.
- obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has a polarization;
Specification