Method and machine for determining a space coordinate of a measurement point on a measurement object

• US 7,610,162 B2
• Filed: 07/10/2007
• Issued: 10/27/2009
• Est. Priority Date: 01/18/2005
• Status: Active Grant

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Inventors: Grupp, Guenter
• Primary Examiner(s): Feliciano; Eliseo Ramos
• Assistant Examiner(s): O MALLEY, MARY CATHERINE
• Application Number:
  US11/827,064
• Publication Number:
  US 20080033680A1
• Time in Patent Office: 840 Days
• Field of Search: 702/86, 702 94- 95, 702/150, 702/155, 702/158, 700 56- 61, 700 63- 64, 33/1.M, 33503-504, 335/56, 335/59
• US Class Current: 702/95
• CPC Class Codes: G01B 21/042 Calibration or calibration artifacts G01B3/30, G01B9/02072 take precedence
• CPC Class Codes: G01B 5/008 using coordinate measuring machines

Abstract

A measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports. An actual difference value between the displacement positions of a first and a second support is determined. A static difference value representing is provided and subtracted from the actual difference, in order to obtain a dynamic difference value representing a static difference between the first and the second displacement positions is subtracted from the actual difference value in order to obtain a dynamic difference value. The space coordinate of the measurement point is determined as a function of the dynamic difference value.

Claims

1. A method for determining at least one space coordinate of a measurement point on a measurement object using a coordinate measuring machine (“

CMM”

) having a probe head arranged on a displacement mechanism comprising first and second movable supports for controling movement of the probe head along at least a first axis, comprising the steps of;

conducting a calibration run of the CMM and obtaining measurement values of the displacement position of each of said first and second movable supports at a plurality of defined positions of said probe head,

storing in a memory a plurality of static difference values determined in accordance with the difference in the respective measurement values for said first and second movable supports at each of said plurality of defined positions,

subsequently conducting a measurement run of the CMM by approaching the measuring point with the probe head,

determining a first displacement position of the first movable support and determining a second displacement position of the second movable support,

determining an actual difference value between the first and the second displacement positions,

determining from the static difference values stored in said memory a static difference value which represents a static difference between the first and the second displacement positions,

subtracting the static difference value from the actual difference in order to obtain a dynamic difference value,

correcting the first displacement position using the dynamic difference value in order to obtain a pre-corrected displacement position, and

subsequently correcting the pre-corrected displacement position by using the static difference value,

thereby determining the space coordinate of the measurement point.

2. The method of claim 1, wherein said first and second movable supports are moved substantially parallel along said first axis when approaching the measurement point, and wherein the probe head is moved along a second axis transverse to said first axis when approaching the measurement point, wherein the space coordinate is determined along both said first axis and said second axis by using the dynamic difference value.

3. The method of claim 1, wherein the plurality of static difference values determined by means of said calibration run are permanently stored in said memory.

4. The method of claim 1, wherein the plurality of static difference values determined by said calibration run are determined without any measurement value corrections.

5. The method of claim 1, wherein the measurement point is approached by means of at least two drives, a first drive moving the first movable support and a second drive moving the second movable support, and further wherein the calibration run is carried out with only one of the drives.

6. The method of claim 1, wherein the first and the second displacement positions are determined by means of separate first and second temperature-corrected measuring instruments.

7. The method of claim 1, wherein the measurement point is approached by means of at least two drives, a first drive moving the first movable support, a second drive moving the second movable support, and the two drives being actuated by a common regulator which receives the dynamic difference value as an input quantity.

8. The method of claim 7, wherein the first and second drives are switched off when the dynamic difference value exceeds a predefined threshold value.

9. The method of claim 7, wherein the common regulator comprises a position regulator and a synchronous regulator, which is subordinated to the position regulator, the dynamic difference value being supplied to the synchronous regulator as an input quantity.

10. The method of claim 7, wherein a drive current for the first and second drives is limited to a predefined maximum value.

11. The method of claim 10, wherein the predefined maximum value is approximately equal to the current value required for an acceleration of the first and second movable supports.

12. The method of claim 7, wherein the common regulator controls the first and second movable drives so that drive currents of approximately the same level result in both drives.

13. A coordinate measuring machine for determining during a measurement run at least one space coordinate of a measurement point on a measurement object, comprising

a displacement mechanism having a first and a second movable support,

a probe head arranged on the displacement mechanism for approaching the measuring point,

a first and a second measuring instrument for determining a first displacement position of the first movable support and a second displacement position of the second movable support, respectively,

an actual difference formation unit for determining an actual difference value between the first and second displacement positions,

a memory for permanently storing and providing a static difference value representing a static difference between the first and second displacement positions, said static difference value being determined by means of a previously conducted calibration run and then stored in the memory, and

a calculation unit for determining the space coordinate of the measurement point, the calculation unit comprising a subtractor for subtracting the static difference value from the actual difference value in order to obtain a dynamic difference value, and further configured to correct the first displacement position using the dynamic difference value in order to obtain a pre-corrected displacement position, and subsequently correct the pre-corrected displacement position by using the static difference value, thereby determining the space coordinate of the measurement point.

14. A computer program product comprising program code configured for carrying out a method, when executed on a processor of a coordinate measuring machine, comprising the following steps:

approaching the measuring point with a probe head arranged on a displacement mechanism which comprises a first and a second movable support,

determining a first displacement position of the first support and determining a second displacement position of the second support,

determining an actual difference value between the first and the second displacement positions,

receiving a static difference value which represents a static difference between the first and the second displacement positions, said static difference value being determined by means of a previously conducted calibration run and then stored in a memory,

subtracting the static difference value from the actual difference value in order to obtain a dynamic difference value,

correcting the first displacement position using the dynamic difference value in order to obtain a pre-corrected displacement position, and

subsequently correcting the pre-corrected displacement position by using the static difference value,

thereby determining the space coordinate of the measurement point.

15. A method for determining at least one space coordinate of a measurement point on a measurement object, comprising the steps of:

approaching the measuring point with a probe head arranged on a displacement mechanism which comprises a first and a second movable support,

determining a first displacement position of the first support and determining a second displacement position of the second support,

determining an actual difference value between the first and the second displacement positions,

providing a static difference value which represents a static difference between the first and the second displacement positions,

subtracting the static difference value from the actual difference value in order to obtain a dynamic difference value, and

determining the space coordinate of the measurement point as a function of the dynamic difference value and the static difference value,

wherein the measurement point is approached by means of at least two drives, a first drive moving the first support, and a second drive mechanically independent of said first drive for moving the second support, and further wherein the first and second drives are actuated by a common electronic regulator which receives the dynamic difference value as an input quantity.