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Particle detection sensor, method for manufacturing particle detection sensor, and method for detecting particle using particle detection sensor

  • US 7,610,794 B2
  • Filed: 08/25/2006
  • Issued: 11/03/2009
  • Est. Priority Date: 08/26/2005
  • Status: Expired due to Fees
First Claim
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1. A particle detection sensor comprising:

  • a detector for detecting a detection object by determining whether a pair of electrodes are in contact or out of contact;

    wherein the detector comprises a base having an opening;

    wherein the base with the opening are over the pair of electrodes; and

    wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening.

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