Particle detection sensor, method for manufacturing particle detection sensor, and method for detecting particle using particle detection sensor

• US 7,610,794 B2
• Filed: 08/25/2006
• Issued: 11/03/2009
• Est. Priority Date: 08/26/2005
• Status: Expired due to Fees

• Current Assignee: Panduit Corporation, Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Tateishi, Fuminori, Izumi, Konami, Yamaguchi, Mayumi
• Primary Examiner(s): Rogers; David A.
• Application Number:
  US11/467,320
• Publication Number:
  US 20070044579A1
• Time in Patent Office: 1,166 Days
• Field of Search: 73/232, 73/233, 73/233.3, 73/233.4, 73/280.1, 73/280.5, 73/10.1, 73/310.2, 73/310.3, 73/310.5, 73/310.7
• US Class Current: 73/31.05
• CPC Class Codes: G01N 15/1023 Microstructural devices for non-optical measurement
• CPC Class Codes: G01N 15/1031 by measuring electrical or magnetic effects

Abstract

A compact sensor with which particles floating in the air can be easily detected. A sensor having a microstructure which detects a detection object by contact is used. A microstructure has an opening to be a detection hole corresponding to the size of a detection object, and a pair of electrodes having a bridge structure are provided thereabove or thereunder so as to partially contact with each other.

Claims

1. A particle detection sensor comprising:

a detector for detecting a detection object by determining whether a pair of electrodes are in contact or out of contact;

wherein the detector comprises a base having an opening;

wherein the base with the opening are over the pair of electrodes; and

wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening.

2. A particle detection sensor according to claim 1,

wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening.

3. A particle detection sensor according to claim 1,

wherein the particle detection sensor further comprises a communication device.

4. A particle detection sensor according to claim 1,

wherein the opening is one of openings are arranged in matrix.

5. A particle detection sensor according to claim 1,

wherein the pair of electrodes have a bridge structure.

6. A particle detection sensor comprising:

a detecting element comprising a pair of electrodes and a base having an opening over the pair of electrodes; and

a circuit for determining whether the pair of electrodes are in contact or out of contact,

wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening.

7. A particle detection sensor according to claim 6,

wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening.

8. A particle detection sensor according to claim 6,

wherein the particle detection sensor further comprises a communication device.

9. A particle detection sensor according to claim 6,

wherein the opening is one of openings are arranged in matrix.

10. A particle detection sensor according to claim 6,

wherein the pair of electrodes have a bridge structure.

11. A particle detection sensor comprising:

a detector for detecting a detection object by determining whether the pair of electrodes are in contact or out of contact;

wherein the detector comprises;

an insulating layer;

a pair of electrodes over the insulating layer; and

a base having an opening over the pair of electrodes,

wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening.

12. A particle detection sensor according to claim 11,

wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening.

13. A particle detection sensor according to claim 11,

wherein the particle detection sensor further comprises a communication device.

14. A particle detection sensor according to claim 11,

wherein the opening is one of openings are arranged in matrix.

15. A particle detection sensor according to claim 11,

wherein the pair of electrodes have a bridge structure.

16. A particle detection sensor comprising:

a detecting element comprising;

an insulating layer;

a pair of electrodes over the insulating layer; and

a base having an opening over the pair of electrodes; and

a circuit for determining whether the pair of electrodes are in contact or out of contact.

17. A particle detection sensor according to claim 16,

wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening.

18. A particle detection sensor according to claim 16,

wherein the particle detection sensor further comprises a communication device.

19. A particle detection sensor according to claim 16,

wherein the opening is one of openings are arranged in matrix.

20. A particle detection sensor according to claim 16,

wherein the pair of electrodes have a bridge structure.

21. A particle detection sensor comprising:

a detector,

wherein the detector comprises at least one conductor capable of transforming and a base with an opening; and

wherein the one conductor is under the base and the opening.

22. A particle detection sensor according to claim 21,

wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening.

23. A particle detection sensor according to claim 21,

wherein the particle detection sensor further comprises a communication device.

24. A particle detection sensor according to claim 21,

wherein the opening is one of openings are arranged in matrix.

25. A particle detection sensor according to claim 21,

wherein the pair of electrodes have a bridge structure.

26. A particle detection sensor comprising:

a detector for detecting a detection object by determining whether a pair of electrodes are in contact or out of contact;

wherein the detector comprises a base having an opening; and

wherein the base with the opening are over the pair of electrodes.

27. A particle detection sensor according to claim 26,

wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening.

28. A particle detection sensor according to claim 26,

wherein the particle detection sensor further comprises a communication device.

29. A particle detection sensor according to claim 26,

wherein the opening is one of openings are arranged in matrix.

30. A particle detection sensor according to claim 26,

wherein the pair of electrodes have a bridge structure.