Peroxide preservation
First Claim
Patent Images
1. A method of packaging a PVA sponge for use in scrubbing semiconductor wafers, said sponge having particulate, metal ion and anionic counts at or below the value specified for a clean room, said method comprising:
- (a) placing said sponge in a flexible plastic bag;
(b) said sponge containing a quality of de-ionized water with around 0.05% to around 0.01% by volume of hydrogen peroxide; and
(c) sealing said bag.
2 Assignments
0 Petitions
Reexamination
Accused Products
Abstract
Clean room cleaning articles such as PVA sponge brushes and pre-saturated wipers are packaged in a sealed container with a de-ionized water containing around 0.05 to 1% hydrogen peroxide.
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Citations
6 Claims
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1. A method of packaging a PVA sponge for use in scrubbing semiconductor wafers, said sponge having particulate, metal ion and anionic counts at or below the value specified for a clean room, said method comprising:
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(a) placing said sponge in a flexible plastic bag; (b) said sponge containing a quality of de-ionized water with around 0.05% to around 0.01% by volume of hydrogen peroxide; and (c) sealing said bag. - View Dependent Claims (2, 3)
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4. A method of packaging a PVA sponge brush, said sponge brush having particulate, metal ion and anionic counts at or below the values for a clean room, said method comprising placing said cleaning article in a plastic bag, said sponge brush containing a quantity of de-ionized water, said water containing hydrogen peroxide in an amount effective to kill and retard the growth of bacteria in said cleaning article but less than an amount sufficient to develop significant quantities of metallic ions in said container, and sealing said container, in which said amount of hydrogen peroxide is about 0.05% to around 0.1 by volume.
- 5. A packaged PVA sponge for use in clean rooms, said cleaning article having particulate, metal ion and anionic counts at or below the values specified for a clean room, said package comprising a sealed flexible plastic bag, said sponge being positioned in said bag, and containing a quantity of de-ionized water, said de-ionized water containing hydrogen peroxide in a concentration effective to kill and retard the growth of bacteria in said sponge, said amount being low enough to substantially ensure decomposition of said hydrogen peroxide in a relatively short period of time after the container is sealed and being between 0.05% and 0.1% by volume.
Specification