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Mesoscale and microscale device fabrication methods using split structures and alignment elements

  • US 7,611,616 B2
  • Filed: 08/18/2006
  • Issued: 11/03/2009
  • Est. Priority Date: 05/07/2002
  • Status: Expired due to Fees
First Claim
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1. A method for forming at least a portion of a three-dimensional device having a desired configuration, comprising:

  • a. forming at least first and second portions of a structure from a plurality of adhered layers of at least one structural material where the first portion has a first surface and the second portion has a second surface where the first and second surfaces are separated from one another during formation of the layers but which are to be located in contact or in proximity to one another in the desired configuration;

    b. separating the structure from any sacrificial material that would hinder the bringing of the first and second portions into contact or into proximity or which would be effectively trapped if in place when the first and second portions are brought together; and

    c. rotating at least one of the first and second portions relative to the other to bring the first and second surfaces into contact or into proximity to yield the three-dimensional device,wherein the forming comprises depositing at least one of the at least one structural material or the sacrificial material selectively onto a substrate or previously deposited material via one or more openings in a masking material that is adhered to the substrate or previously deposited material.

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