Transistor, memory cell array and method of manufacturing a transistor

• US 7,612,406 B2
• Filed: 09/08/2006
• Issued: 11/03/2009
• Est. Priority Date: 09/08/2006
• Status: Expired due to Fees

• Current Assignee: Polaris Innovations Limited (Wi-LAN Inc.)
• Original Assignee: Infineon Technologies AG
• Inventors: Kluge, Johannes von
• Primary Examiner(s): Wilson; Allan R.
• Application Number:
  US11/517,557
• Publication Number:
  US 20080061322A1
• Time in Patent Office: 1,152 Days
• Field of Search: 257/213, 257/346, 257/302, 257/306, 257/301, 257/330, 257/E27.091, 257/E27.096
• US Class Current: 257/330
• CPC Class Codes: H01L 29/66621 using etching to form a recess at the gate location etching of semiconductor bodies H01L21/302
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H10B 12/053 the transistor being at least partially in a trench in the substrate vertical transistor in combination with a capacitor formed in a substrate trench H10B12/0383

Abstract

A transistor includes a first and second source/drain regions, a channel connecting the first and second source/drain regions, and a gate electrode to control an electrical current flowing in the channel. The gate electrode is disposed in a gate groove, the gate groove being defined in a top surface of a semiconductor substrate. The first and second source/drain regions extend at least to a depth d1, the depth d1 being measured from the top surface of the substrate. A top surface of the gate electrode is disposed beneath the top surface of the semiconductor substrate. A top surface of the gate electrode is disposed at a depth d2 which is less than the depth d1, the depth d2 being measured from the substrate surface.

Claims

1. An integrated circuit including a transistor, the transistor comprising:

first and second source/drain regions formed in a semiconductor material and extending at least to a first depth with respect to a top surface of the semiconductor material;

a channel region disposed between the first and second source/drain regions and comprising a fin-like portion including a ridge with a top side and two lateral sides in a cross-section perpendicular to a first direction defined by a line extending between the first and second source/drain regions; and

a gate electrode disposed in a gate groove defined in a top surface of the semiconductor material between the first and second source/drain regions;

wherein a top surface of the gate electrode is disposed between the top surface of the semiconductor material and the first depth; and

wherein the gate electrode surrounds the ridge at the top side and the two lateral sides.

2. The integrated circuit of claim 1, further comprising a spacer comprising a dielectric material, the spacer being disposed adjacent a sidewall of the gate groove and located between the gate electrode and the semiconductor material, wherein a bottom side of the spacer is disposed at a depth no greater than the first depth.

3. The integrated circuit of claim 1, wherein the first source/drain region, the second source/drain region, and the channel region are formed in an active area defined by two opposing isolation trenches, and a width of the ridge is equal to the width of the active area, the width being defined along the first direction.

4. The integrated circuit of claim 1, further comprising at least one vacuum spacer disposed adjacent one of the sidewalls of the gate groove and located between the gate electrode and the semiconductor material, wherein a bottom side of the vacuum spacer is disposed at a depth no greater than the first depth.

5. The integrated circuit of claim 4, wherein a width of the gate groove between a bottom edge of the vacuum spacer and the top surface of the semiconductor material is larger than a width of the gate groove below the bottom edge of the vacuum spacer.

6. The integrated circuit of claim 4, wherein the gate groove has a step at the position of the bottom side of the vacuum spacer.

7. An integrated circuit including a memory cell array comprising:

a plurality of bit lines extending in a first direction;

a plurality of memory cells, each of the memory cells comprising a storage element and an access transistor configured to electrically couple the storage element to one of the bit lines, wherein individual ones of the access transistors are formed in a semiconductor material and comprise;

doped portions arranged adjacent a top surface of the semiconductor material and extending to a first depth, wherein the doped portions of each of the access transistors comprise a first source/drain region and a second source/drain region;

a channel region formed between the first and second source/drain regions and comprising a fin-like portion including a ridge with a top side and two lateral sides in a cross-section perpendicular to a first direction defined by a line extending between the first and second source/drain regions; and

a gate electrode surrounding the ridge at the top side and the two lateral sides; and

a plurality of word lines configured to address the access transistors and extending in a second direction intersecting the first direction;

wherein a top surface of each of the word lines is disposed at a depth between the top surface of the semiconductor material and the first depth.

8. The integrated circuit of claim 7, wherein a plurality of isolation trenches are formed in the semiconductor material to define active areas between the isolation trenches, wherein the isolation trenches are configured to insulate adjacent active areas from each other, and the access transistors are formed in the active areas.

9. The integrated circuit of claim 7, wherein the storage elements comprise storage capacitors formed in the semiconductor material.

10. The integrated circuit of claim 7, wherein the storage elements comprise storage capacitors formed above the semiconductor material.

11. The integrated circuit of claim 7, wherein the gate electrode forms part of a corresponding word line.

12. The integrated circuit of claim 11, wherein each gate electrode is disposed in a gate groove extending in the top surface of the semiconductor material between the first and the second source/drain regions of each access transistor.